Distributed feedback laser having enhanced etch stop features
    1.
    发明授权
    Distributed feedback laser having enhanced etch stop features 有权
    分布式反馈激光器具有增强的蚀刻停止特征

    公开(公告)号:US08705582B2

    公开(公告)日:2014-04-22

    申请号:US13932971

    申请日:2013-07-01

    Abstract: In one example embodiment, a DFB laser includes a substrate; an active region positioned above the substrate; a grating layer positioned above the active region, the grating layer including a portion that serves as a primary etch stop layer; a secondary etch stop layer positioned above the grating layer; and a spacer layer interposed between the grating layer and the secondary etch stop layer.

    Abstract translation: 在一个示例性实施例中,DFB激光器包括基板; 位于所述基板上方的有源区域; 位于有源区上方的光栅层,所述光栅层包括用作主蚀刻停止层的部分; 位于光栅层上方的次蚀刻停止层; 以及插入在光栅层和次蚀刻停止层之间的间隔层。

    DISTRIBUTED FEEDBACK LASER HAVING ENHANCED ETCH STOP FEATURES
    2.
    发明申请
    DISTRIBUTED FEEDBACK LASER HAVING ENHANCED ETCH STOP FEATURES 有权
    分布式反馈激光具有增强的消弧功能

    公开(公告)号:US20130287405A1

    公开(公告)日:2013-10-31

    申请号:US13932971

    申请日:2013-07-01

    Abstract: In one example embodiment, a DFB laser includes a substrate; an active region positioned above the substrate; a grating layer positioned above the active region, the grating layer including a portion that serves as a primary etch stop layer; a secondary etch stop layer positioned above the grating layer; and a spacer layer interposed between the grating layer and the secondary etch stop layer.

    Abstract translation: 在一个示例性实施例中,DFB激光器包括基板; 位于所述基板上方的有源区域; 位于有源区上方的光栅层,所述光栅层包括用作主蚀刻停止层的部分; 位于光栅层上方的次蚀刻停止层; 以及插入在光栅层和次蚀刻停止层之间的间隔层。

    Grating coupled laser for Si photonics

    公开(公告)号:US11435522B2

    公开(公告)日:2022-09-06

    申请号:US16569486

    申请日:2019-09-12

    Abstract: A grating coupled laser (GCL) includes an active section and a passive section. The passive section is butt coupled to the active section to form a butt joint with the active section. The active section includes an active waveguide. The passive section includes a passive waveguide, a transmit grating coupler, and a top cladding. The passive waveguide is optically coupled end to end with the active waveguide and includes a first portion and a second portion. The first portion of the passive waveguide is positioned between the second portion of the passive waveguide and the active waveguide. The transmit grating coupler is optically coupled to the passive waveguide and includes grating teeth that extend upward from the second portion of the passive waveguide. The top cladding is positioned directly above the first portion of the passive waveguide and is absent directly above at least some of the transmit grating coupler.

    GRATING COUPLED LASER FOR SI PHOTONICS
    4.
    发明申请

    公开(公告)号:US20200081204A1

    公开(公告)日:2020-03-12

    申请号:US16569486

    申请日:2019-09-12

    Abstract: A grating coupled laser (GCL) includes an active section and a passive section. The passive section is butt coupled to the active section to form a butt joint with the active section. The active section includes an active waveguide. The passive section includes a passive waveguide, a transmit grating coupler, and a top cladding. The passive waveguide is optically coupled end to end with the active waveguide and includes a first portion and a second portion. The first portion of the passive waveguide is positioned between the second portion of the passive waveguide and the active waveguide. The transmit grating coupler is optically coupled to the passive waveguide and includes grating teeth that extend upward from the second portion of the passive waveguide. The top cladding is positioned directly above the first portion of the passive waveguide and is absent directly above at least some of the transmit grating coupler.

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