公开(公告)号：US20100250004A1

公开(公告)日：2010-09-30

申请号：US12725821

申请日：2010-03-17

申请人： Fuminori Makino ,  Yasushi Koyanagawa ,  Ryuta Nakajima

发明人： Fuminori Makino ,  Yasushi Koyanagawa ,  Ryuta Nakajima

IPC分类号： G05D3/12

CPC分类号： B23Q1/621 ,  G03F7/70716 ,  H01L21/682

摘要： An XY stage device having an X-axis movable body which moves in the X-axis direction on a platen, and a Y-axis movable body which moves in the Y-axis direction on the platen and guides the movement of the X-axis movable body in the X-axis direction. The XY stage device includes a pair of actuators which can be provided so as to be separated from each other in the X-axis direction, and drives the Y-axis movable body in the Y-axis direction, a detector which detects the yawing angle that can be the angle of the Y-axis movable body in a rotational direction around the Z-axis, a controller which controls the driving of the pair of actuators on the basis of the yawing angle detected by the detector, and a pair of supporters which supports the Y-axis movable body on the platen. One of the pair of supporters can be a rolling guide which guides the movement of the Y-axis movable body in the Y-axis direction, and the other of the pair of supporters can be an air pad which supports the Y-axis movable body in non-contact with the platen.

摘要翻译： 具有在台板上沿X轴方向移动的X轴移动体和Y轴移动体的XY平台装置，其沿着Y轴方向移动到台板上并引导X轴的移动 移动体在X轴方向。 XY台装置包括一对致动器，其可以设置成在X轴方向上彼此分离并且驱动Y轴可移动体在Y轴方向上，检测器检测偏航角 可以是围绕Z轴的旋转方向上的Y轴移动体的角度，基于由检测器检测出的偏航角来控制一对致动器的驱动的控制器，以及一对支撑体 其支撑台板上的Y轴可移动体。 一对支撑体中的一个可以是引导Y轴可移动体在Y轴方向上的运动的滚动导轨，另一个支撑件可以是支撑Y轴移动体的气垫 与压板非接触。

公开(公告)号：US08517363B2

公开(公告)日：2013-08-27

申请号：US12725821

申请日：2010-03-17

申请人： Fuminori Makino ,  Yasushi Koyanagawa ,  Ryuta Nakajima

发明人： Fuminori Makino ,  Yasushi Koyanagawa ,  Ryuta Nakajima

IPC分类号： G05D3/12

CPC分类号： B23Q1/621 ,  G03F7/70716 ,  H01L21/682

摘要： An XY stage device having an X-axis movable body which moves in the X-axis direction on a platen, and a Y-axis movable body which moves in the Y-axis direction on the platen and guides the movement of the X-axis movable body in the X-axis direction. The XY stage device includes a pair of actuators which can be provided so as to be separated from each other in the X-axis direction, and drives the Y-axis movable body in the Y-axis direction, a detector which detects the yawing angle that can be the angle of the Y-axis movable body in a rotational direction around the Z-axis, a controller which controls the driving of the pair of actuators on the basis of the yawing angle detected by the detector, and a pair of supporters which supports the Y-axis movable body on the platen. One of the pair of supporters can be a rolling guide which guides the movement of the Y-axis movable body in the Y-axis direction, and the other of the pair of supporters can be an air pad which supports the Y-axis movable body in non-contact with the platen.

摘要翻译： 具有在台板上沿X轴方向移动的X轴移动体和Y轴移动体的XY平台装置，其沿着Y轴方向移动到台板上并引导X轴的移动 移动体在X轴方向。 XY台装置包括一对致动器，其可以设置成在X轴方向上彼此分离并且驱动Y轴可移动体在Y轴方向上，检测器检测偏航角 可以是围绕Z轴的旋转方向上的Y轴移动体的角度，基于由检测器检测出的偏航角来控制一对致动器的驱动的控制器，以及一对支撑体 其支撑台板上的Y轴可移动体。 一对支撑体中的一个可以是引导Y轴可移动体在Y轴方向上的运动的滚动导轨，另一个支撑件可以是支撑Y轴移动体的气垫 与压板非接触。

公开(公告)号：US06789457B2

公开(公告)日：2004-09-14

申请号：US10241761

申请日：2002-09-12

申请人： Kazutoshi Sakaki ,  Fuminori Makino

发明人： Kazutoshi Sakaki ,  Fuminori Makino

IPC分类号： F15B903

CPC分类号： F15B9/09

摘要： A controlling and computing device performs the steps of: differentiating a slider position represented by a position detection signal fed from a position sensor, and calculating the velocity of the slider, differentiating the calculated velocity so as to calculate an acceleration: using a slider target position, the slider position, the velocity and the acceleration to calculate position instruction values to be fed to two servo amplifiers; performing a computation on the respectively calculated position instruction values, so as to compensate for a pressure change which has occurred in each of pressure chambers due to a change in the position of a pressure receiving plate in a cylinder chamber; and producing the respectively compensated position instruction values to the two servo amplifiers.

摘要翻译： 控制和计算装置执行以下步骤：区分由位置传感器馈送的位置检测信号表示的滑块位置，并计算滑块的速度，区分计算出的速度以便计算加速度：使用滑块目标位置 ，滑块位置，速度和加速度，以计​​算要馈送到两个伺服放大器的位置指令值; 对分别计算的位置指令值执行计算，以补偿由于气缸室中的受压板的位置的变化而在每个压力室中发生的压力变化; 并向两个伺服放大器产生分别补偿的位置指令值。

公开(公告)号：US07959141B2

公开(公告)日：2011-06-14

申请号：US12318251

申请日：2008-12-23

申请人： Fuminori Makino

发明人： Fuminori Makino

IPC分类号： B23Q3/18

CPC分类号： G03B27/62 ,  H02K7/08 ,  H02K7/09 ,  H02K16/00 ,  H02K41/031 ,  H02K2201/18

摘要： The present invention reduces the footprint of a stage apparatus to achieve a more compact apparatus. Using a Y-axis shaft having a magnet on the inside and a Y-axis mover constituted by a coil that surrounds the Y-axis shaft as a Y-axis drive part for moving a Y-axis movable body makes the drive part smaller than a linear motor. Consequently, a lateral part that faces a side gliding surface is arranged downwardly of the one Y-axis mover, to thereby eliminate the footprint occupied by the lateral part when lined up side-by-side with the Y-axis drive part.

摘要翻译： 本发明减少了平台装置的占地面积，以实现更紧凑的装置。 使用在内侧具有磁铁的Y轴和由围绕Y轴的线圈构成的Y轴移动体作为用于移动Y轴移动体的Y轴驱动部，使得驱动部小于 线性马达。 因此，面向侧滑动面的横向部分布置在一个Y轴移动件的下方，从而消除了与Y轴驱动部并列排列时由横向部分占据的占地面积。

公开(公告)号：US20100158645A1

公开(公告)日：2010-06-24

申请号：US12318252

申请日：2008-12-23

申请人： Fuminori Makino

发明人： Fuminori Makino

IPC分类号： H01L21/677

CPC分类号： H01L21/68

摘要： The present invention enables a movable body to be moved without generating pitching. X-axis drive parts, which have: X-axis shafts formed by disposing a plurality of magnets along an X-axis direction and connected to a pair of Y-axis movers; and X-axis movers constituted by coils surrounding the X-axis shafts, are respectively arranged on both outer sides of an X-axis movable body, thereby making it possible to adjust the position of the X-axis movable body in the vertical direction. Then, lowering the position of the X-axis movable body in the vertical direction brings the center of gravity location of the X-axis movable body in the vertical direction in proximity to the X-axis shafts and Y-axis drive parts having Y-axis movers. Consequently, the X-axis movable body is stabilized and supported by the X-axis drive parts.

摘要翻译： 本发明使移动体能够移动而不产生俯仰。 X轴驱动部，其具有：X轴，其通过沿X轴方向配置多个磁体而与一对Y轴移动体连接形成; 由绕X轴的线圈构成的X轴移动体分别配置在X轴移动体的两侧，能够调整X轴移动体的上下方向的位置。 然后，使X轴可移动体的垂直方向的位置降低，使X轴移动体的重心位置与Y轴驱动部的X轴方向和Y轴方向的驱动部相邻， 轴移动。 因此，X轴移动体被X轴驱动部稳定并支撑。

公开(公告)号：US20100155560A1

公开(公告)日：2010-06-24

申请号：US12318251

申请日：2008-12-23

申请人： Fuminori Makino

发明人： Fuminori Makino

IPC分类号： A47B81/00

CPC分类号： G03B27/62 ,  H02K7/08 ,  H02K7/09 ,  H02K16/00 ,  H02K41/031 ,  H02K2201/18

摘要： The present invention reduces the footprint of a stage apparatus to achieve a more compact apparatus. Using a Y-axis shaft having a magnet on the inside and a Y-axis mover constituted by a coil that surrounds the Y-axis shaft as a Y-axis drive part for moving a Y-axis movable body makes the drive part smaller than a linear motor. Consequently, a lateral part that faces a side gliding surface is arranged downwardly of the one Y-axis mover, to thereby eliminate the footprint occupied by the lateral part when lined up side-by-side with the Y-axis drive part.

摘要翻译： 本发明减少了平台装置的占地面积，以实现更紧凑的装置。 使用在内侧具有磁铁的Y轴和由围绕Y轴的线圈构成的Y轴移动体作为用于移动Y轴移动体的Y轴驱动部，使得驱动部小于 线性马达。 因此，面向侧滑动面的横向部分布置在一个Y轴移动件的下方，从而消除了与Y轴驱动部并列排列时由横向部分占据的占地面积。