公开(公告)号：US20170195507A1

公开(公告)日：2017-07-06

申请号：US15313886

申请日：2015-02-27

申请人： KYOCERA Document Solutions Inc.

发明人： Takashi KAINUMA ,  Shunsuke YAMASAKI

IPC分类号： H04N1/00 ,  H04N1/10 ,  G03G15/00

CPC分类号： H04N1/00557 ,  G03B27/62 ,  G03G15/605 ,  G03G2215/00185 ,  H04N1/00 ,  H04N1/00519 ,  H04N1/00551 ,  H04N1/00554 ,  H04N1/10 ,  H04N1/107 ,  H04N2201/0081 ,  H04N2201/0422

摘要： An image reading apparatus (6) includes a document placing table (6a) to an upper surface of which a contact glass (25) is fixed, and a document pressing device (24) supported at an end of the document placing table (6a) to be openable/closable via a hinge portion, and having, on its back surface side, a document presser (30) that presses a document placed on the contact glass (25). The document pressing device (24) includes a light transmission window (31) transmitting light in a front-surface-to-back-surface direction of the document pressing device (24). The light transmission window (31) is disposed at a position not overlapping with the contact glass (25) when the document pressing device (24) is at the closure position, and when the document pressing device (24) has moved in an opening direction from the closure position, light that has passed through the light transmission window (31) reaches the contact glass (25).

公开(公告)号：US09432538B2

公开(公告)日：2016-08-30

申请号：US14781015

申请日：2014-10-30

申请人： KYOCERA Document Solutions Inc.

发明人： Yuya Kobayashi

IPC分类号： H04N1/00 ,  G03B27/50 ,  G03B27/62 ,  H04N1/04 ,  H04N1/10

CPC分类号： H04N1/0071 ,  G03B27/50 ,  G03B27/62 ,  H04N1/00551 ,  H04N1/00708 ,  H04N1/0074 ,  H04N1/0075 ,  H04N1/00753 ,  H04N1/00766 ,  H04N1/04 ,  H04N1/10 ,  H04N1/1017 ,  H04N1/1039 ,  H04N1/1061 ,  H04N2201/0094

摘要： An image forming apparatus that includes: an image reading portion capable of reading image data of the document sheet; document sheet detection sensors; an ADF including a document holding surface on which first and second areas having different reflection characteristics and third and fourth areas having different reflection characteristics are formed; a first reading control portion that causes the image reading portion to read image data of both the first and second areas when the ADF is closed; a first document sheet width detection portion that detects a width of the document sheet based on the image data read from the first area or the image data read from the second area; and a first size detection portion capable of detecting the size of the document sheet based on detection results from the first document sheet width detection portion and the document sheet detection sensors.

摘要翻译： 一种图像形成装置，包括：图像读取部，能够读取原稿的图像数据; 文件检测传感器; ADF，其包括形成具有不同反射特性的第一和第二区域的文档保持表面和形成具有不同反射特性的第三和第四区域; 第一读取控制部分，当ADF关闭时，使得图像读取部分读取第一和第二区域的图像数据; 基于从第一区域读取的图像数据或从第二区域读取的图像数据来检测文档片材的宽度的第一文档片材宽度检测部分; 以及第一尺寸检测部，其能够根据来自第一文件张宽度检测部和文件片检测传感器的检测结果来检测文件片的尺寸。

公开(公告)号：US08850980B2

公开(公告)日：2014-10-07

申请号：US11694612

申请日：2007-03-30

申请人： Sidlgata V. Sreenivasan ,  Philip D. Schumaker ,  Ian M. McMackin

发明人： Sidlgata V. Sreenivasan ,  Philip D. Schumaker ,  Ian M. McMackin

IPC分类号： B29C59/02 ,  H01L21/02 ,  G03F9/00 ,  B82Y40/00 ,  G03F7/00 ,  G03B27/42 ,  G03B27/62 ,  B82Y10/00

CPC分类号： G03B27/62 ,  B82Y10/00 ,  B82Y40/00 ,  G03B27/42 ,  G03F7/0002 ,  G03F9/00 ,  G03F9/7042 ,  G03F9/7076 ,  G03F9/7084

摘要： The present invention is directed towards a choice of the shape of the patterned fields for Level 0 (patterned by imprint or photolithography or e-beam, etc.) and Level 1 (patterned by imprint) such that these shapes when tessellated together eliminate the open areas causes by the moats.

摘要翻译： 本发明涉及用于0级（通过压印或光刻或电子束等图案化）和1级（通过印记图案化）的图案化场的形状的选择，使得这些形状在细分时一起消除开路 地区由护城河引起。

公开(公告)号：US08253928B2

公开(公告)日：2012-08-28

申请号：US12549194

申请日：2009-08-27

申请人： Yoshiyuki Usui ,  Shinichi Hirano

发明人： Yoshiyuki Usui ,  Shinichi Hirano

IPC分类号： G03B27/58 ,  G03B27/62

CPC分类号： G03B27/62 ,  G03F9/7011

摘要： An exposure apparatus for exposing a substrate to radiant energy includes: a stage including a chuck, and configured to hold the substrate on the chuck with vacuum and to be moved; a recovery device configured to recover the substrate from the stage; a first detector configured to detect an error of holding of the substrate on the chuck; a measuring device configured to measure an amount of positional deviation of the substrate relative to the chuck; and a controller configured to cause the measuring device to measure the amount of positional deviation in a case where the first detector detects the error, and to control an operation of the stage such that the amount of positional deviation falls within a tolerance based on the measured amount.

摘要翻译： 一种用于将衬底暴露于辐射能的曝光装置包括：包括卡盘的台，并且被配置为将真空保持在卡盘上并被移动; 构造成从所述载物台回收所述基板的恢复装置; 第一检测器，被配置为检测所述基板在所述卡盘上的保持误差; 测量装置，被配置为测量所述基板相对于所述卡盘的位置偏移量; 以及控制器，其被配置为使得所述测量装置在所述第一检测器检测到所述误差的情况下测量位置偏差量，并且基于所测量的位置偏差落入公差内来控制所述台的操作 量。

公开(公告)号：US20120200948A1

公开(公告)日：2012-08-09

申请号：US13022813

申请日：2011-02-08

申请人： Jack Reese ,  Shawn Reid

发明人： Jack Reese ,  Shawn Reid

IPC分类号： G02B5/08

CPC分类号： G02B5/08 ,  G02B7/182 ,  G03B27/62 ,  G03G15/605 ,  Y10S359/90

摘要： Devices, systems, and methods for facilitating the imaging of books are presented. A first transparent plate and a second transparent plate may be positioned at approximately a 45 degree angle to the first transparent plate. A dual-sided mirror may be configured to be positioned substantially parallel with the first transparent plate and to be positioned substantially parallel with the second transparent plate. The first side of the dual-sided mirror may be configured to reflect a first image of a first page of a book, the first image being received by the dual-sided mirror through the first transparent plate. The second side of the dual-sided mirror may be configured to reflect a second image of a second page of the book, the second image being received by the dual-sided mirror through the second transparent plate.

摘要翻译： 介绍了便于图书成像的设备，系统和方法。 第一透明板和第二透明板可以与第一透明板大致成45度的角度定位。 双面镜可以被配置为基本上与第一透明板平行地定位并且与第二透明板基本平行地定位。 双面镜的第一面可以被配置为反映书的第一页的第一图像，第一图像由双面镜通过第一透明板接收。 双面镜的第二面可以被配置为反映书的第二页的第二图像，第二图像由双面镜通过第二透明板接收。

公开(公告)号：US20110063600A1

公开(公告)日：2011-03-17

申请号：US12794709

申请日：2010-06-04

申请人： Xian-Jun Wang ,  Ming-Jie Zhao ,  Jian-Chun Yu

发明人： Xian-Jun Wang ,  Ming-Jie Zhao ,  Jian-Chun Yu

IPC分类号： G03B27/62 ,  H04N5/253

CPC分类号： G03B27/62

摘要： A film holder is provided. During scanning of a to-be-scanned object, the film holder is inserted into a scanning device. The film holder includes an input portion, a guiding portion and an information window. The input portion has an entrance, a channel and an exit, the channel disposed between the entrance and the exit. During scanning of the to-be-scanned object, the to-be-scanned object passes through the channel. The guiding portion connects to the input portion for guiding the to-be-scanned object. The information window is formed at and through the guiding portion. During scanning of the to-be-scanned object, the side regions of the to-be-scanned object pass through the information window. Functions of the scanning device are effectively augmented; the film is kept from being scratched; the quality of image scanning is kept from being deteriorated; and it is convenient to use the scanning device.

摘要翻译： 提供电影持有人。 在扫描被扫描物体的扫描期间，将胶片保持器插入到扫描装置中。 胶片保持器包括输入部分，引导部分和信息窗口。 输入部分具有入口，通道和出口，通道设置在入口和出口之间。 待扫描对象的扫描期间，被扫描对象通过通道。 引导部分连接到用于引导被扫描物体的输入部分。 信息窗口形成在导引部分上并通过引导部分。 扫描被扫描物体时，待扫描物体的侧面区域通过信息窗口。 有效增强扫描装置的功能; 电影不被划伤; 防止图像扫描的质量恶化; 并且使用扫描装置是方便的。

公开(公告)号：US20100208228A1

公开(公告)日：2010-08-19

申请号：US12707461

申请日：2010-02-17

申请人： Shinichiro Koga ,  Kazuhiko Mishima

发明人： Shinichiro Koga ,  Kazuhiko Mishima

IPC分类号： G03B27/62

CPC分类号： G03B27/62 ,  G03F9/7011 ,  G03F9/7015

摘要： An exposure apparatus of the present invention is an exposure apparatus which exposes a pattern of an original plate 3 onto a substrate 5, and the exposure apparatus comprises an original plate alignment detection system 13 which moves the original plate 3 in an in-plane direction at an outside of an exposure region to measure positions of a plurality of alignment marks of the original plate 3, an interferometer 23 which measures a position of the original plate alignment detection system 13, a calculator which calculates a position and a shape of the original plate 3 from the positions of the plurality of alignment marks, and a correction unit which performs a correction in accordance with the position and the shape of the original plate 3 during exposure.

摘要翻译： 本发明的曝光装置是将原版3的图案曝光在基板5上的曝光装置，曝光装置包括：原版平板对准检测系统13，其将原版3沿平面内方向移动 用于测量原版3的多个对准标记的位置的曝​​光区域的外侧，测量原版对准检测系统13的位置的干涉仪23，计算原版的位置和形状的计算器 3，并且在曝光期间根据原版3的位置和形状执行校正的校正单元。

公开(公告)号：US20100155560A1

公开(公告)日：2010-06-24

申请号：US12318251

申请日：2008-12-23

申请人： Fuminori Makino

发明人： Fuminori Makino

IPC分类号： A47B81/00

CPC分类号： G03B27/62 ,  H02K7/08 ,  H02K7/09 ,  H02K16/00 ,  H02K41/031 ,  H02K2201/18

摘要： The present invention reduces the footprint of a stage apparatus to achieve a more compact apparatus. Using a Y-axis shaft having a magnet on the inside and a Y-axis mover constituted by a coil that surrounds the Y-axis shaft as a Y-axis drive part for moving a Y-axis movable body makes the drive part smaller than a linear motor. Consequently, a lateral part that faces a side gliding surface is arranged downwardly of the one Y-axis mover, to thereby eliminate the footprint occupied by the lateral part when lined up side-by-side with the Y-axis drive part.

摘要翻译： 本发明减少了平台装置的占地面积，以实现更紧凑的装置。 使用在内侧具有磁铁的Y轴和由围绕Y轴的线圈构成的Y轴移动体作为用于移动Y轴移动体的Y轴驱动部，使得驱动部小于 线性马达。 因此，面向侧滑动面的横向部分布置在一个Y轴移动件的下方，从而消除了与Y轴驱动部并列排列时由横向部分占据的占地面积。

公开(公告)号：US20090015817A1

公开(公告)日：2009-01-15

申请号：US12170380

申请日：2008-07-09

申请人： Yoshihiro Morimoto

发明人： Yoshihiro Morimoto

IPC分类号： G03B27/62

CPC分类号： G03F7/709 ,  G03B27/62 ,  G03F7/70833

摘要： An exposure apparatus configured to expose a substrate to light to transfer a pattern of a reticle onto the substrate includes a reticle stage configured to mount the reticle, a structure configured to support the reticle stage, a plurality of first supporting members configured to support the structure; and a second supporting member configured to support the structure outside an area formed by connecting the three first supporting members. The second supporting member includes a unit configured to dampen vibration of the structure.

摘要翻译： 一种被配置为将基板曝光以将掩模版图案转印到基板上的曝光装置包括：被配置为安装所述掩模版的标线片台，构造成支撑所述标线片台的结构;多个第一支撑构件，其构造成支撑所述结构 ; 以及第二支撑构件，其构造成将所述结构支撑在通过连接所述三个第一支撑构件形成的区域的外部。 第二支撑构件包括构造成抑制结构的振动的单元。

公开(公告)号：US20080204694A1

公开(公告)日：2008-08-28

申请号：US11712192

申请日：2007-02-28

申请人： Emily Y. Shu ,  George Chen

发明人： Emily Y. Shu ,  George Chen

IPC分类号： G03B27/62

CPC分类号： G03B27/62

摘要： In an embodiment of the invention, an apparatus includes a reticle having a frontside including a pattern to be imaged onto a semiconductor wafer, a thin film located over a backside of the reticle to form a global convex shape and to reduce friction when sliding on a chuck, and the chuck having a topside to which the backside of the reticle conforms.

摘要翻译： 在本发明的一个实施例中，一种装置包括具有正面的掩模版，该掩模版包括要成像到半导体晶片上的图案，位于掩模版背面之上的薄膜，以形成全局凸形，并且当在 卡盘，并且卡盘具有顶盖的背面符合的顶侧。