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1.发明授权Sample plan creation for optical proximity correction with minimal number of clips 有权使用最少数量的剪辑进行光学邻近校正的示例计划创建公开(公告)号：US09405186B1
公开(公告)日：2016-08-02
申请号：US14628446
申请日：2015-02-23
Applicant: GLOBALFOUNDRIES INC.
Inventor： Amr Y. Abdo , Nathalie Casati , Maria Gabrani , James M. Oberschmidt , Ramya Viswanathan , Josef S. Watts
CPC classification number: G03F1/36 , G06F17/5081
Abstract: Methods, program products, and systems for improving optical proximity correction (OPC) calibration, and automatically determining a minimal number of clips, are disclosed. The method can include using a computing device to perform actions including: calculating a total relevancy score for a projected sample plan including a candidate clip, and wherein the relevancy score is derived from at least one relevancy criterion and a relevancy weight; calculating a relevancy score for the candidate clip, the relevancy score for the candidate clip being a contribution from the candidate clip to the total relevancy score; and adding the candidate clip to a sample plan for the IC layout and removing the candidate clip from the plurality of clips in response a difference in relevancy score between the projected sample plan and one or more previous sample plans substantially fitting a non-linear relevancy score function.
Abstract translation: 公开了用于改进光学邻近校正（OPC）校准以及自动确定最小数量的片段的方法，程序产品和系统。 该方法可以包括使用计算设备来执行动作，包括：计算包括候选剪辑的投影样本计划的总相关性得分，并且其中所述相关性得分来自至少一个相关性标准和相关权重; 计算候选剪辑的相关性分数，候选剪辑的相关性分数是从候选剪辑到总相关性分数的贡献; 以及将所述候选剪辑添加到所述IC布局的样本计划并从所述多个剪辑中移除所述候选剪辑，以响应所述预测样本计划与基本拟合非线性相关性得分的一个或多个先前样本计划之间的相关性得分的差异 功能。
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2.发明申请SAMPLE PLAN CREATION FOR OPTICAL PROXIMITY CORRECTION WITH MINIMAL NUMBER OF CLIPS 有权采用最小数量的光学近似校正的样本计划公开(公告)号：US20160246167A1
公开(公告)日：2016-08-25
申请号：US14628446
申请日：2015-02-23
Applicant: GLOBALFOUNDRIES INC.
Inventor： Amr Y. Abdo , Nathalie Casati , Maria Gabrani , James M. Oberschmidt , Ramya Viswanathan , Josef S. Watts
CPC classification number: G03F1/36 , G06F17/5081
Abstract: Methods, program products, and systems for improving optical proximity correction (OPC) calibration, and automatically determining a minimal number of clips, are disclosed. The method can include using a computing device to perform actions including: calculating a total relevancy score for a projected sample plan including a candidate clip, and wherein the relevancy score is derived from at least one relevancy criterion and a relevancy weight; calculating a relevancy score for the candidate clip, the relevancy score for the candidate clip being a contribution from the candidate clip to the total relevancy score; and adding the candidate clip to a sample plan for the IC layout and removing the candidate clip from the plurality of clips in response a difference in relevancy score between the projected sample plan and one or more previous sample plans substantially fitting a non-linear relevancy score function.
Abstract translation: 公开了用于改进光学邻近校正（OPC）校准以及自动确定最小数量的片段的方法，程序产品和系统。 该方法可以包括使用计算设备来执行动作，包括：计算包括候选剪辑的投影样本计划的总相关性得分，并且其中所述相关性得分来自至少一个相关性标准和相关权重; 计算候选剪辑的相关性分数，候选剪辑的相关性分数是从候选剪辑到总相关性分数的贡献; 以及将所述候选剪辑添加到所述IC布局的样本计划并从所述多个剪辑中移除所述候选剪辑，以响应所述预测样本计划与基本拟合非线性相关性得分的一个或多个先前样本计划之间的相关性得分的差异 功能。
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