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公开(公告)号:US20180248001A1
公开(公告)日:2018-08-30
申请号:US15443276
申请日:2017-02-27
Applicant: GLOBALFOUNDRIES INC.
Inventor: Anthony K. STAMPER , Vincent J. MCGAHAY , Zhong-Xiang HE
IPC: H01L29/06 , H01L23/31 , H01L23/528
CPC classification number: H01L29/0619 , H01L23/3171 , H01L23/528 , H01L29/0649
Abstract: The present disclosure relates to semiconductor structures and, more particularly, to segmented guard-ring and chip edge seals and methods of manufacture. The structure includes: a guard ring structure formed in a low-k dielectric material; and an edge seal structure formed through the low-k dielectric material to at least a substrate underneath the low-k dielectric material.
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公开(公告)号:US20190074253A1
公开(公告)日:2019-03-07
申请号:US15698027
申请日:2017-09-07
Applicant: GLOBALFOUNDRIES INC.
Inventor: Vincent J. MCGAHAY , Nicholas A. POLOMOFF , Shaoning YAO , Anupam ARORA
CPC classification number: H01L23/562 , H01L23/585 , H01L23/62 , H01L23/66 , H01L2223/6605
Abstract: The present disclosure relates to semiconductor structures and, more particularly, to arc resistant crackstop structures and methods of manufacture. The structure includes: a crackstop structure comprising dual rails surrounding an active area of an integrated circuit; and a through-BOx electrical contact electrically connecting each of the dual rails to an underlying substrate.
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