公开(公告)号：US10446421B2

公开(公告)日：2019-10-15

申请号：US15951547

申请日：2018-04-12

Applicant: GLOBALFOUNDRIES INC.

Inventor： Cyril Cabral, Jr. ,  Lawrence A. Clevenger ,  John M. Cohn ,  Jeffrey P. Gambino ,  William J. Murphy ,  Anthony J. Telensky

IPC: H01L21/67 ,  C23C14/54 ,  G01B7/06 ,  G03F7/20 ,  G05B19/418

Abstract: Systems and methods are provided for implementing a crystal oscillator to monitor and control semiconductor fabrication processes. More specifically, a method is provided for that includes performing at least one semiconductor fabrication process on a material of an integrated circuit (IC) disposed within a processing chamber. The method further includes monitoring by at least one electronic oscillator disposed within the processing chamber for the presence or absence of a predetermined substance generated by the at least one semiconductor fabrication process. The method further includes controlling the at least one semiconductor fabrication process based on the presence or absence of the predetermined substance detected by the at least one electronic oscillator.