公开(公告)号：US10444645B1

公开(公告)日：2019-10-15

申请号：US16031677

申请日：2018-07-10

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Erik R. Hosler ,  Sheldon J. Meyers

IPC: G03B27/52 ,  G03F7/20

Abstract: A method includes identifying a first contamination region of a collector of a light source and enabling a subset of a plurality of temperature control elements positioned on the collector to cause a second contamination region to be formed on the collector symmetric to the first contamination region.

公开(公告)号：US10748671B2

公开(公告)日：2020-08-18

申请号：US16031767

申请日：2018-07-10

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Erik R. Hosler ,  Sheldon J. Meyers

IPC: G21K1/04 ,  H05G2/00 ,  G03F7/20 ,  G21K1/06

Abstract: A method includes identifying a contamination region of a collector in a light source, positioning a subset of a plurality of movable light-blocking elements around a periphery of a circular aperture of the light source to compensate for the contamination region, and transmitting light from the light source through the circular aperture.

公开(公告)号：US20200020458A1

公开(公告)日：2020-01-16

申请号：US16031767

申请日：2018-07-10

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Erik R. Hosler ,  Sheldon J. Meyers

IPC: G21K1/04 ,  H05G2/00 ,  G21K1/06 ,  G03F7/20

Abstract: A method includes identifying a contamination region of a collector in a light source, positioning a subset of a plurality of movable light-blocking elements around a periphery of a circular aperture of the light source to compensate for the contamination region, and transmitting light from the light source through the circular aperture.