公开(公告)号：US20220367360A1

公开(公告)日：2022-11-17

申请号：US17879574

申请日：2022-08-02

Applicant: GlobalFoundries U.S. Inc.

Inventor： Mahbub Rashed ,  Irene Y. Lin ,  Steven Soss ,  Jeff Kim ,  Chinh Nguyen ,  Marc Tarabbia ,  Scott Johnson ,  Subramani Kengeri ,  Suresh Venkatesan

IPC: H01L23/535 ,  H01L21/8234 ,  H01L27/02 ,  H01L21/768 ,  H01L21/285 ,  H01L21/8238 ,  H01L23/532 ,  H01L27/092 ,  H01L29/08

Abstract: A semiconductor device including four transistors. Gates of first and third transistors extend longitudinally as part of a first linear strip. Gates of second and fourth transistors extend longitudinally as part of a second linear strip parallel to and spaced apart from first linear strip. Aligned first and second gate cut isolations separate gates of first and second transistor from gates of third transistor and fourth transistor respectively. First and second CB layers connect to the gate of first transistor and second transistor respectively. CA layer extends longitudinally between first end and second end of CA layer connects to CB layers. CB layers are electrically connected to gates of first transistor adjacent first end of CA layer and second transistor adjacent second end of CA layer respectively. CA layer extends substantially parallel to first and second linear strips and is substantially perpendicular to first and second CB layers.

公开(公告)号：US20250038111A1

公开(公告)日：2025-01-30

申请号：US18901781

申请日：2024-09-30

Applicant: GlobalFoundries U.S. Inc.

Inventor： Mahbub Rashed ,  Irene Y. Lin ,  Steven Soss ,  Jeff Kim ,  Chinh Nguyen ,  Marc Tarabbia ,  Scott Johnson ,  Subramani Kengeri ,  Suresh Venkatesan

IPC: H01L23/535 ,  H01L21/285 ,  H01L21/768 ,  H01L21/8234 ,  H01L21/8238 ,  H01L23/532 ,  H01L27/02 ,  H01L27/092 ,  H01L27/118 ,  H01L29/08

Abstract: A semiconductor device including a semiconductor substrate. A first transistor and a second transistor are formed on the semiconductor substrate. Each transistor comprises a source, a drain, and a gate. A CA layer forms a local interconnect layer electrically connected to one of the source and the drain of the first transistor. A CB layer forms a local interconnect layer electrically connected to the gate of one of the first transistor and the second transistor. An end of the CB layer is disposed at a center of the CA layer

公开(公告)号：US12148702B2

公开(公告)日：2024-11-19

申请号：US17879574

申请日：2022-08-02

Applicant: GlobalFoundries U.S. Inc.

Inventor： Mahbub Rashed ,  Irene Y. Lin ,  Steven Soss ,  Jeff Kim ,  Chinh Nguyen ,  Marc Tarabbia ,  Scott Johnson ,  Subramani Kengeri ,  Suresh Venkatesan

IPC: H01L23/535 ,  H01L21/285 ,  H01L21/768 ,  H01L21/8234 ,  H01L21/8238 ,  H01L23/532 ,  H01L27/02 ,  H01L27/092 ,  H01L29/08 ,  H01L27/118

Abstract: A semiconductor device including four transistors. Gates of first and third transistors extend longitudinally as part of a first linear strip. Gates of second and fourth transistors extend longitudinally as part of a second linear strip parallel to and spaced apart from first linear strip. Aligned first and second gate cut isolations separate gates of first and second transistor from gates of third transistor and fourth transistor respectively. First and second CB layers connect to the gate of first transistor and second transistor respectively. CA layer extends longitudinally between first end and second end of CA layer connects to CB layers. CB layers are electrically connected to gates of first transistor adjacent first end of CA layer and second transistor adjacent second end of CA layer respectively. CA layer extends substantially parallel to first and second linear strips and is substantially perpendicular to first and second CB layers.

公开(公告)号：US11444031B2

公开(公告)日：2022-09-13

申请号：US17039187

申请日：2020-09-30

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Mahbub Rashed ,  Irene Y. Lin ,  Steven Soss ,  Jeff Kim ,  Chinh Nguyen ,  Marc Tarabbia ,  Scott Johnson ,  Subramani Kengeri ,  Suresh Venkatesan

IPC: H01L23/535 ,  H01L21/8234 ,  H01L27/02 ,  H01L21/768 ,  H01L21/285 ,  H01L21/8238 ,  H01L23/532 ,  H01L27/092 ,  H01L29/08 ,  H01L27/118

Abstract: A semiconductor device is provided for implementing at least one logic element. The semiconductor device includes a semiconductor substrate. The first transistor and a second transistor are formed on the semiconductor substrate. Each transistor comprises a source, a drain, and a gate. The gate of the first transistor extends longitudinally as part of a first linear strip and the gate of the second transistor extends longitudinally as part of the second linear strip parallel to and spaced apart from the first linear strip. A first CB layer forms a local interconnect layer electrically connected to the gate of the first transistor. A second CB layer forms a local interconnect layer electrically connected to the gate of the second transistor. A CA layer forms a local interconnect layer extending longitudinally between a first end and a second end of the CA layer. The CA layer is electrically connected to the first and second CB layers. The first CB layer is electrically connected adjacent the first end of the CA layer and the second layer is electrically connected adjacent the second end of the CA layer. The first CB layer, the second CB layer and the CA layer are disposed between a first metal layer and the semiconductor substrate. The first metal layer being disposed above each source, each drain, and each gate of the first and second transistors. The CA layer extends substantially parallel to the first and second linear strips and is substantially perpendicular to the first and second CB layers. At least one via selectively provides an electrical connection between the CA or CB layers and the at least one metal layer.