公开(公告)号：US20240003743A1

公开(公告)日：2024-01-04

申请号：US18467121

申请日：2023-09-14

Applicant: Gigaphoton Inc.

Inventor： Takamitsu KOMAKI ,  Toshihiro OGA

IPC: G01J3/45

CPC classification number: G01J3/45

Abstract: A laser device connectable to an exposure apparatus includes a spectrometer configured to generate a measurement waveform from an interference pattern of laser light output from the laser device; and a processor configured to calculate a first spectral waveform indicating a relationship between a wavelength and a light intensity using the measurement waveform, calculate a representative waveform included in a wavelength range of the first spectral waveform, and calculate an evaluation value of the first spectral waveform using a first integration value obtained by integrating, over the wavelength range, a product of a function of a wavelength deviation from the representative wavelength and the light intensity.

公开(公告)号：US20240001486A1

公开(公告)日：2024-01-04

申请号：US18467361

申请日：2023-09-14

Applicant: Gigaphoton Inc.

Inventor： Takamitsu KOMAKI ,  Toshihiro OGA

IPC: B23K26/06 ,  B23K26/70 ,  G02B27/10

CPC classification number: B23K26/0648 ,  B23K26/707 ,  B23K26/0626 ,  G02B27/1093 ,  B23K26/0643 ,  B23K26/0652 ,  B23K2101/40

Abstract: A control method for a spectrum waveform of a laser beam output from a laser apparatus to an exposure apparatus includes acquiring a longitudinal chromatic aberration of the exposure apparatus, setting a target value of an evaluation value of the spectrum waveform by using a relation between the longitudinal chromatic aberration and the evaluation value, and controlling the spectrum waveform by using the target value.