MICROSCOPE
    2.
    发明公开
    MICROSCOPE 审中-公开

    公开(公告)号:US20240307998A1

    公开(公告)日:2024-09-19

    申请号:US18592745

    申请日:2024-03-01

    申请人: DISCO CORPORATION

    发明人: Takehito KAWASUMI

    IPC分类号: B23K26/03 B23K26/06

    摘要: An observation method for irradiating one side of an object, the object having a plate shape, the one side, and the other side, with a light beam, and observing the other side of the object or an interior of the object includes a holding step of holding the object at the other side on a holding surface of a holding table, and a detection step of irradiating the object with the light beam from a lighting unit capable of applying the light beam with a wavelength having transmissivity for the object, with a focal point of the light beam being positioned at a predetermined position on the other side or in the interior, and detecting reflected light from the object by an imaging unit including an objective lens having an optical axis inclined obliquely to an optical axis of a condenser lens of the lighting unit.

    LASER PROCESSING DEVICE AND LASER PROCESSING METHOD

    公开(公告)号:US20240286226A1

    公开(公告)日:2024-08-29

    申请号:US18572631

    申请日:2022-06-28

    发明人: Takeshi SAKAMOTO

    摘要: Provided is a laser processing apparatus including: a support unit that supports an object; a light source that outputs laser light; a spatial light modulator that modulates the laser light output from the light source in correspondence with a modulation pattern and outputs the modulated laser light; a converging lens that converges the laser light output from the spatial light modulator toward the object, and forms a converging spot of the laser light in the object; a movement unit that relatively moves the converging spot with respect to the object; and a control unit that controls at least the light source, the spatial light modulator, and the movement unit. The modulation pattern is controlled so that a beam shape of the converging spot becomes an inclined shape on at least the first surface side in relation to the center of the converging spot.

    METHOD AND APPARATUS FOR MODIFYING A SUBSTRATE

    公开(公告)号:US20240253157A1

    公开(公告)日:2024-08-01

    申请号:US18565408

    申请日:2022-08-05

    申请人: Intel Corporation

    摘要: The present application relates to a method for modifying a substrate, which comprises generating a pulsed laser beam comprising a train of laser pulses, the train of laser pulses including at least three consecutive laser pulses, and controlling a direction of the pulsed laser beam and/or a position of the substrate from laser pulse to laser pulse so that the at least three consecutive laser pulses sequentially irradiate at least three regions of the substrate according to a predetermined spatial sequence which defines the relative spatial positions of the at least three regions of the substrate and the order of irradiation of the at least three regions of the substrate. The present application relates also to an apparatus (100) for modifying a substrate (108). The method and apparatus (100) may be used, in particular though not exclusively, for forming an optical device.

    A DEVICE AND A METHOD FOR OPTICAL ENGRAVING OF A DIFFRACTION GRATING ON A WORKPIECE

    公开(公告)号:US20240253152A1

    公开(公告)日:2024-08-01

    申请号:US18561660

    申请日:2022-05-19

    摘要: A device for engraving a diffraction grating on a workpiece, comprises an optical set-up comprising a laser, a beam forming device, a beam splitting device, and a focusing head. The laser is configured to output a laser beam. The beam forming device is configured to control a diameter of and a light intensity distribution in the laser beam, and output a primary laser beam. The beam splitting device is configured for a splitting of the primary laser beam into a plurality of split beams for the engraving. The focusing head comprises a microscope objective lens (109) configured to focus the respective split beams in respective foci on the workpiece, an auto-focusing system configured to produce a positioning signal for adjusting and maintaining a distance between the microscope objective lens and the workpiece in order to maintain the respective foci of the split beams on the workpiece and output the positioning signal; and a micro-actuator configured to receive the positioning signal and adjust the distance between the microscope objective lens and the workpiece, whereby the auto-focusing system and the micro-actuator are operationally connected in a closed-loop. The device for engraving further comprises a positioning device configured to perform a relative positioning between the workpiece in the respective foci of the split beams, and the optical set-up; and a controller configured to control the positioning device and the laser according to engraving instructions for the diffraction grating.

    LASER PROCESSING DEVICE
    8.
    发明公开

    公开(公告)号:US20240207972A1

    公开(公告)日:2024-06-27

    申请号:US18544809

    申请日:2023-12-19

    IPC分类号: B23K26/06 B23K26/082

    摘要: A laser processing device includes a laser source, a zoom assembly for converging a laser light emitted by the laser source, a scanning galvanometer assembly for receiving the converged laser light exiting from the zoom assembly and emitting the laser light at a preset angle, and a reflection assembly arranged between the scanning galvanometer assembly and a workpiece. The zoom assembly includes a plurality of lens groups, the reflection assembly includes a plurality of reflectors for reflecting the laser light emitted by the scanning galvanometer assembly to the workpiece. A distance between any two lens groups of the plurality of lens groups is adjustable to adjust a position of a principle plane of the zoom assembly, thereby adjusting a focus position reflected to the workpiece.