公开(公告)号：US20180341077A1

公开(公告)日：2018-11-29

申请号：US16055243

申请日：2018-08-06

Applicant: Gigaphoton Inc.

Inventor： Yukio WATANABE ,  Hiroshi SOMEYA ,  Yuki KAWASHIMA ,  Yuto TANAKA

IPC: G02B6/42 ,  G03F7/20 ,  H05G2/00

CPC classification number: G02B6/4296 ,  G03F7/70033 ,  G03F7/70991 ,  H05G2/008

Abstract: An optical unit and an optical path tube are easily connected. A structure of connection between a side surface (1a) of the optical unit and the optical path tube includes: an extensible tube (72) constituting at least a part of the optical path tube, the extensible tube being extensible in a tube axis direction; a flange (26) attached to one end of the optical path tube; a flange receiving part (20) provided on the optical unit, the flange receiving part (20) receiving a front surface (26a) of the flange (26), the front surface (26a) of the flange (26) being an end surface on an open side; and a biasing part (23, 72) configured to bias at least a part of the optical path tube in a direction in which the extensible tube (72) extends.

公开(公告)号：US20240248416A1

公开(公告)日：2024-07-25

申请号：US18537898

申请日：2023-12-13

Applicant: Gigaphoton Inc.

Inventor： Takuya ISHII ,  Yuto TANAKA ,  Shinichi HAGIWARA

IPC: G03F7/00

CPC classification number: G03F7/70725

Abstract: A tilt stage includes a mounting table on which a target supply device supplying a target to a predetermined region in a chamber is mounted, a rotation support portion supporting the mounting table rotatably about at least first and second axes, a first tilt support portion including a first ball and a first contact surface in contact with the first ball and supporting the mounting table, a first adjuster adjusting posture of the target supply device by moving one of the first ball and the first contact surface in a first direction, a second tilt support portion including a second ball and a second contact surface in contact with the first ball and supporting the mounting table, and a second adjuster adjusting the posture of the target supply device by moving one of the second ball and the second contact surface in a second direction.