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公开(公告)号:US20220342207A1
公开(公告)日:2022-10-27
申请号:US17641181
申请日:2020-09-02
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor: Daiki SUZUKI , Yoshihisa WARASHINA , Ryusuke KITAURA , Hidetaka KAWAOKA
Abstract: A method for manufacturing a light scanning system includes a process of assembling a plurality of device structures, each of device structures including a mirror device and a magnet, a process of acquiring, for each of device structures, first data for correcting a change in a deflection angle of the mirror with respect to a change in a frequency of a current signal, and second data for correcting at least one of a shift of the mirror swinging with a first axis from a Y-axis and a shift of the mirror swinging with a second axis from an X-axis, a process of acquiring, for at least one of device structures, third data for correcting a change in a deflection angle of the mirror with respect to a change in an operating temperature, and a process of storing the first, second, and third data in the storage part.
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公开(公告)号:US20240295727A1
公开(公告)日:2024-09-05
申请号:US18439947
申请日:2024-02-13
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor: Hidetaka KAWAOKA , Tomoyuki IDE
CPC classification number: G02B26/0816 , G02B26/101
Abstract: An actuator device includes: a first movable portion; a second movable portion; a magnet portion; a coil; and a controller configured to supply a first drive signal for resonantly driving the first movable portion and a second drive signal for non-resonantly driving the second movable portion to the coil. An abnormality detection method includes: supplying the second drive signal to the coil by the controller; acquiring an output value corresponding to a counter electromotive force generated in the coil while the second drive signal is supplied to the coil; and determining whether an abnormality has occurred in a tilted state of the second movable portion on the basis of the second drive signal supplied to the coil and the acquired output value.
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公开(公告)号:US20220342210A1
公开(公告)日:2022-10-27
申请号:US17641192
申请日:2020-09-02
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor: Hidetaka KAWAOKA , Yoshihisa WARASHINA , Ryusuke KITAURA , Daiki SUZUKI
Abstract: A light scanning system includes a mirror device, a magnet, a temperature sensor, and an arithmetic part. The arithmetic part generates first and second current signals based on a first target deflection angle and a first target frequency, a second target deflection angle and a second target frequency, an operating temperature, first data for correcting a change in a deflection angle of a mirror with respect to a change in a frequency of a current signal input to each of first and second drive coils, second data for correcting at least one of a shift of the mirror swinging with a first axis from a Y-axis and a shift of the mirror swinging with a second axis from an X-axis, and third data for correcting a change in a deflection angle of the mirror with respect to a change in the operating temperature.
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