公开(公告)号：US20220342210A1

公开(公告)日：2022-10-27

申请号：US17641192

申请日：2020-09-02

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Hidetaka KAWAOKA ,  Yoshihisa WARASHINA ,  Ryusuke KITAURA ,  Daiki SUZUKI

IPC: G02B27/00 ,  G02B26/10 ,  G02B26/08 ,  G02B7/18

Abstract: A light scanning system includes a mirror device, a magnet, a temperature sensor, and an arithmetic part. The arithmetic part generates first and second current signals based on a first target deflection angle and a first target frequency, a second target deflection angle and a second target frequency, an operating temperature, first data for correcting a change in a deflection angle of a mirror with respect to a change in a frequency of a current signal input to each of first and second drive coils, second data for correcting at least one of a shift of the mirror swinging with a first axis from a Y-axis and a shift of the mirror swinging with a second axis from an X-axis, and third data for correcting a change in a deflection angle of the mirror with respect to a change in the operating temperature.

公开(公告)号：US20200249084A1

公开(公告)日：2020-08-06

申请号：US16636548

申请日：2018-07-24

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Masahiro YAMAZAKI ,  Katsumi SHIBAYAMA ,  Ryusuke KITAURA

IPC: G01J1/44 ,  G01J1/02

Abstract: A light detector includes a light detecting element and a reference element. The reference element includes a second substrate and a second membrane disposed on a second surface so as to form a void space between the second membrane and the second surface of the second substrate. The second membrane includes a pair of second wiring layers facing each other with a second gap extending along a second line interposed therebetween and a second resistance layer electrically connected to each of the pair of second wiring layers and having an electrical resistance depending on a temperature. An outer shape of the second membrane when viewed from a direction perpendicular to the second surface is a polygonal shape. The second line extends between diagonals facing each other with a geometric center position of the second membrane interposed therebetween when viewed from a direction perpendicular to the second surface.

公开(公告)号：US20220342207A1

公开(公告)日：2022-10-27

申请号：US17641181

申请日：2020-09-02

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Daiki SUZUKI ,  Yoshihisa WARASHINA ,  Ryusuke KITAURA ,  Hidetaka KAWAOKA

IPC: G02B26/10 ,  G02B26/08

Abstract: A method for manufacturing a light scanning system includes a process of assembling a plurality of device structures, each of device structures including a mirror device and a magnet, a process of acquiring, for each of device structures, first data for correcting a change in a deflection angle of the mirror with respect to a change in a frequency of a current signal, and second data for correcting at least one of a shift of the mirror swinging with a first axis from a Y-axis and a shift of the mirror swinging with a second axis from an X-axis, a process of acquiring, for at least one of device structures, third data for correcting a change in a deflection angle of the mirror with respect to a change in an operating temperature, and a process of storing the first, second, and third data in the storage part.

公开(公告)号：US20200072677A1

公开(公告)日：2020-03-05

申请号：US16468070

申请日：2017-11-30

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Masahiro YAMAZAKI ,  Katsumi SHIBAYAMA ,  Ryusuke KITAURA

IPC: G01J5/24 ,  G01J5/02 ,  H01L31/0232 ,  H01L31/09

Abstract: A light detector includes: a substrate; and a membrane which is supported on a surface of the substrate so that a space is formed between the surface of the substrate and the membrane, in which the membrane includes a first wiring layer and a second wiring layer which are opposite each other with a gap extending along a line having a curved portion interposed therebetween and a resistance layer which is electrically connected to each of the first wiring layer and the second wiring layer and has an electric resistance depending on a temperature, and in which a first edge portion at the side of the line in the first wiring layer and a second edge portion at the side of the line in the second wiring layer respectively continuously extend.

公开(公告)号：US20200249094A1

公开(公告)日：2020-08-06

申请号：US16636539

申请日：2018-07-24

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Masahiro YAMAZAKI ,  Katsumi SHIBAYAMA ,  Ryusuke KITAURA ,  Ryosuke KOIKE ,  Go TANAKA

IPC: G01J5/20 ,  G01J1/02 ,  G01J5/04 ,  G01J5/02 ,  H01L27/144 ,  H01L31/0248 ,  H01L31/09 ,  H01L31/0232

Abstract: A light detector includes a substrate, a membrane disposed on a surface of the substrate, a first and a second electrode post supporting the membrane. The first electrode post includes a first main body portion having a tubular shape spreading from a first electrode pad toward a side opposite to the substrate, and a first flange portion provided in an end portion at the side opposite to the substrate in the first main body portion. The first flange portion is provided with a first sloped surface inclined so as to approach the substrate as it goes away from the first main body portion. A first wiring layer reaches an inner surface of the first main body portion through the first sloped surface. The second electrode post and the second wiring layer are formed similarly to the first electrode post and the first wiring layer.

公开(公告)号：US20200072676A1

公开(公告)日：2020-03-05

申请号：US16468046

申请日：2017-11-30

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Masahiro YAMAZAKI ,  Katsumi SHIBAYAMA ,  Ryusuke KITAURA

IPC: G01J5/20

Abstract: A light detector includes: a substrate; and a membrane, in which the membrane includes a first wiring layer and a second wiring layer which are opposite each other with a gap extending along a line interposed therebetween, a resistance layer which is electrically connected to each of the first wiring layer and the second wiring layer and has an electric resistance depending on a temperature, a light absorption layer, and a separation layer which is disposed between each of the first wiring layer and the second wiring layer and the light absorption layer, and in which the light absorption layer includes a first region which spreads to the side opposite to the second wiring layer with respect to the first wiring layer and a second region which spreads to the side opposite to the first wiring layer with respect to the second wiring layer.

公开(公告)号：US20180266945A1

公开(公告)日：2018-09-20

申请号：US15542530

申请日：2016-01-13

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Ryusuke KITAURA ,  Masatoshi ISHIHARA ,  Masahiro YAMAZAKI ,  Hironori TAKAHASHI

IPC: G01N21/3581 ,  G01J1/02 ,  G01R29/08 ,  G01J5/20 ,  G01J5/08 ,  G01J5/04 ,  H01Q1/24 ,  H01Q1/38

CPC classification number: G01N21/3581 ,  G01J1/02 ,  G01J1/0252 ,  G01J3/42 ,  G01J5/045 ,  G01J5/08 ,  G01J5/0837 ,  G01J5/20 ,  G01J5/24 ,  G01R29/08 ,  H01Q1/24 ,  H01Q1/38 ,  H01Q19/30

Abstract: A THz bolometer detector includes a directional antenna 1 that receives a THz wave having a wavelength λ and radiates the received THz wave, a reception antenna 2 that is provided so as to face the directional antenna 1, and a bolometer 4 that detects heat generation due to a current flowing in the reception antenna 2. The directional antenna 1 overlaps the reception antenna 2 in plan view, and a longitudinal length of the directional antenna 1 is set to be less than a longitudinal length of the reception antenna 2.