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公开(公告)号：US20220148848A1
公开(公告)日：2022-05-12
申请号：US17430019
申请日：2019-11-22
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Yasumasa HAMANA , Hiroyuki WATANABE , Kenshi SHIMANO , Hiroji NISHIZAWA
Abstract: A method of manufacturing a phosphor panel includes: forming a phosphor layer having a plurality of phosphor particles on an exit window; forming an organic film on the phosphor layer; forming a metal reflection film on the organic film; forming an oxide film on the metal reflection film; removing the organic film by firing; and forming an oxide film integrally covering a surface of the metal reflection film and surfaces of the phosphor particles by atomic layer deposition.
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