公开(公告)号：US20180215612A1

公开(公告)日：2018-08-02

申请号：US15747759

申请日：2015-10-23

Applicant: HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P.

Inventor： Richard B. IRWIN, JR.

IPC: B81B7/02 ,  G02B26/08 ,  G03B21/00

CPC classification number: B81B7/02 ,  B81B3/0062 ,  B81B2201/042 ,  B81B2201/045 ,  B81B2203/0154 ,  B81B2203/0361 ,  B81B2203/04 ,  B81B2207/053 ,  G02B26/0833 ,  G02B26/0841 ,  G03B21/008

Abstract: An example microelectromechanical system (MEMS) switch comprises a hinge plane having two or more intersecting hinges; a switch plate; and a plurality of electrostatic pads. Selective activation of the electrostatic pads causes torsion of at least one of the two or more intersecting hinges to tilt the switch plate to a selected one of three or more positions.