公开(公告)号：US20190122026A1

公开(公告)日：2019-04-25

申请号：US16301615

申请日：2017-05-15

Applicant: HORIBA FRANCE SAS

Inventor： Olivier ACHER ,  Simon RICHARD ,  Melanie GAILLET ,  Alexander PODZOROV ,  Adrian KNOWLES

IPC: G06K9/00 ,  G01Q30/04 ,  G01Q30/20 ,  H04N5/232

CPC classification number: G06K9/00134 ,  G01Q30/04 ,  G01Q30/20 ,  G02B21/26 ,  G02B21/34 ,  G02B21/365 ,  H04N5/23218

Abstract: Disclosed is a micro-localisation device defining a system of spatial coordinates for an imaging instrument. The micro-localisation device includes at least one first zone and a second zone, adjacent to each other, each zone extending spatially over an area of macroscopic size, each zone including an elementary cell or a tiling of a plurality of elementary cells extending over the respective area of the zone, each elementary cell of the first, respectively second, zone including an orientation pattern, a positioning pattern and a periodic spatial pattern, configured to be imaged by an imaging instrument and to determine a position and, respectively an orientation of the imaging instrument in the system of spatial coordinates of the micro-localisation device.

公开(公告)号：US20210010928A1

公开(公告)日：2021-01-14

申请号：US16980806

申请日：2019-03-14

Applicant: HORIBA FRANCE SAS

Inventor： Olivier ACHER ,  Alexander PODZOROV ,  Thanh-Liem NGUYEN ,  Brice VILLIER ,  Géraldine MELIZZI ,  Jean-Paul GASTON

IPC: G01N21/21 ,  G02B27/10 ,  G02B5/30

Abstract: Disclosed is an ellipsometer or scatterometer including a light source, a polarizer, an optical illumination system suitable for directing an incident polarized light beam towards a sample, a wavefront-division optical beam splitter arranged to receive a secondary light beam produced by reflection, transmission or diffraction, the wavefront-division optical beam splitter being oriented to form three collimated split beams, an optical polarization modification device and an optical polarization splitting device to form six angularly split beams, a detection system suitable for detecting the six split beams, and a processing system suitable for deducing therefrom an ellipsometric or scatterometric measurement.