公开(公告)号：US20220155607A1

公开(公告)日：2022-05-19

申请号：US17438763

申请日：2020-03-11

Applicant: HORIBA FRANCE SAS

Inventor： Olivier ACHER ,  Simon RICHARD

IPC: G02B27/28 ,  G02B7/02 ,  G02B26/06

Abstract: Disclosed is a polarization separation device to receive an incident light beam. The device includes first and second geometric-phase lenses, having respective first optical centers, first optical axes and first focal lengths. The first and second geometric-phase lenses are separated from one another by a first distance according to the first optical axis, the first geometric-phase lens and the second geometric-phase lens being disposed to have an optical power with the same sign for a first circular polarization state and an optical power with an opposite sign for another circular polarization state orthogonal to the first circular polarization state. The device is configured and directed so a projection of the first optical center according to the first optical axis on the second geometric-phase optical lens is located at a non-zero second distance from the second optical center.

公开(公告)号：US20190122026A1

公开(公告)日：2019-04-25

申请号：US16301615

申请日：2017-05-15

Applicant: HORIBA FRANCE SAS

Inventor： Olivier ACHER ,  Simon RICHARD ,  Melanie GAILLET ,  Alexander PODZOROV ,  Adrian KNOWLES

IPC: G06K9/00 ,  G01Q30/04 ,  G01Q30/20 ,  H04N5/232

CPC classification number: G06K9/00134 ,  G01Q30/04 ,  G01Q30/20 ,  G02B21/26 ,  G02B21/34 ,  G02B21/365 ,  H04N5/23218

Abstract: Disclosed is a micro-localisation device defining a system of spatial coordinates for an imaging instrument. The micro-localisation device includes at least one first zone and a second zone, adjacent to each other, each zone extending spatially over an area of macroscopic size, each zone including an elementary cell or a tiling of a plurality of elementary cells extending over the respective area of the zone, each elementary cell of the first, respectively second, zone including an orientation pattern, a positioning pattern and a periodic spatial pattern, configured to be imaged by an imaging instrument and to determine a position and, respectively an orientation of the imaging instrument in the system of spatial coordinates of the micro-localisation device.

公开(公告)号：US20200103214A1

公开(公告)日：2020-04-02

申请号：US16470061

申请日：2017-12-14

Applicant: HORIBA FRANCE SAS

Inventor： Simon RICHARD

IPC: G01B9/02 ,  G01B11/22

Abstract: Disclosed is a method for measuring etch depth including the following steps: splitting a light beam into a first, and respectively second, incident beam directed towards a first, respectively second, area of a sample exposed to an etching treatment to form a first, and respectively second, reflected beam, recombining the first reflected beam and the second reflected beam to form an interferometric beam; detecting a first, and respectively second, interferometric intensity signal relative to a first, respectively second, polarisation component; calculating a lower envelope function and an upper envelope function of a differential polarimetric interferometry signal; determining an offset function and a normalisation function from the first lower envelope function and the first upper envelope function; and calculating a differential polarimetric interferometry function normalised locally at each time instant.

公开(公告)号：US20190086262A1

公开(公告)日：2019-03-21

申请号：US16091837

申请日：2017-04-03

Applicant: HORIBA FRANCE SAS

Inventor： Simon RICHARD ,  Sébastien LADEN ,  Dmitri KOUZNETSOV

IPC: G01J3/28 ,  G01J3/44 ,  G01N21/64 ,  G01N21/65 ,  G06T3/40

CPC classification number: G01J3/2823 ,  G01J3/027 ,  G01J3/2803 ,  G01J3/44 ,  G01J3/4406 ,  G01J2003/2813 ,  G01J2003/2826 ,  G01N21/6458 ,  G01N21/65 ,  G06T3/4061

Abstract: Disclosed is a method for acquiring and forming a spectrometry image, including the following steps: a) acquiring an initial structural image of an area of a sample; b) breaking down the initial structural image so as to determine a multi-scale spatial sample of the area of the sample; c) determining a plurality of spectrometry measurement positions in the area of the sample, as a function of the multi-scale spatial sampling determined in step b); d) consecutively, for each spectrometry measurement position determined in step c), positioning the excitation beam and acquiring a spectrometry measurement; and e) reconstructing a spectrometry image point-by-point from the spectrometry measurements acquired in step d).