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公开(公告)号：US11609146B2
公开(公告)日：2023-03-21
申请号：US16815909
申请日：2020-03-11
发明人： Sota Matsumoto , Kentaro Nagai , Yuko Imasato
摘要： In order to accurately judge whether or not there is a seat leakage in the first valve and the second valve in a short period of time, a fluid control apparatus comprises a fluid resistor arranged in a flow channel, a first valve arranged upstream of the fluid resistor, a first pressure sensor that measures a pressure in a first volume between the first valve and the fluid resistor in the flow channel, a second valve arranged downstream of the fluid resistor, a second pressure sensor that measures a pressure in a second volume between the fluid resistor and the second valve, a valve controller that controls the first or second valve, and a seat leakage judging part that judges whether or not there is a seat leakage in the valve valves based on the pressure sensors in a state where the valves are fully closed.
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2.发明授权公开(公告)号：US10754361B2
公开(公告)日：2020-08-25
申请号：US16297004
申请日：2019-03-08
摘要： In order to provide a flow rate control apparatus that estimates a flow rate actually flowing at a control point without a large amount of noise, there are provided a fluid resistor that is provided on a flow path, a downstream-side valve that is provided on a downstream side of the fluid resistor, a resistance flow rate measurement mechanism that measures a resistance flow rate that flows through the fluid resistor, and flows into a volumetric space located on the flow path between this fluid resistor and the downstream-side valve, a subject flow rate estimation part that estimates a valve flow rate based on the flow rate characteristics stored in the flow rate characteristics storage part, and a flow rate control unit that controls the downstream-side valve based on a set flow rate, and on the valve flow rate estimated by the subject flow rate estimation part.
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公开(公告)号：US10705544B2
公开(公告)日：2020-07-07
申请号：US15910869
申请日：2018-03-02
摘要： In order to restrain generation of a peak in the measured flow rate, a fluid control unit measures a flow rate of a fluid in a channel and outputs a signal indicating a valve operation amount of a fluid control valve obtained based on a deviation between a preset flow rate and a measured flow rate and a control coefficient, and the control coefficient for a stable state and the control coefficient for a transitional state are so set to moderate fluctuation of the valve operation amount to the deviation more in the transitional state than in the stable state. At or shortly after a timing when the stable state is switched to the transitional state, a signal is output that indicates an operation amount for a switching time calculated based on each of the operation amounts output at a plurality of timings in the stable state.
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公开(公告)号：US20200033896A1
公开(公告)日：2020-01-30
申请号：US16520710
申请日：2019-07-24
发明人： Tsai Wei Tseng , Tomohiro Yoshida , Kentaro Nagai
IPC分类号： G05D7/06
摘要： In order to provide a flow rate control apparatus capable of reducing noise while reducing delay, the flow rate control apparatus includes: a fluid resistor provided in a flow path; a downstream valve provided downstream of the fluid resistor; and a downstream pressure sensor provided between the fluid resistor and the downstream valve. The apparatus calculates a resistor flow rate through the fluid resistor; the time change amount of the downstream pressure; on the basis of the resistor flow rate, the difference between the resistor flow rate and the time change amount of the downstream side pressure, and a weighting factor, calculates a weighted average to estimate a valve flow rate through the downstream valve; and, on the basis of the deviation between a set flow rate and the valve flow rate, controls the downstream side valve, in which the weighting factor is configured to be changeable.
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5.发明申请公开(公告)号：US20150241264A1
公开(公告)日：2015-08-27
申请号：US14706789
申请日：2015-05-07
发明人： Kentaro Nagai
IPC分类号： G01F25/00
CPC分类号： G01F25/0007 , G01F15/005 , G01F25/0053 , G05D7/00 , G05D7/0635
摘要： A valve fully closing part; a calibrating volume calculation part that calculates a calibrating volume on the basis value of an integration of a flow rate measured value outputted from a flow rate sensor in a fluid parameter changing interval; and a calibration part that calibrates a flow rate on the basis of the calculated calibrating volume and a preset reference volume are provided.
摘要翻译： 阀门完全关闭部分; 校准体积计算部，其基于从流量参数变化区间中的流量传感器输出的流量测量值的积分的基值来计算校准体积; 并且提供了基于计算的校准体积和预设参考体积来校准流量的校准部件。
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公开(公告)号：US11340635B2
公开(公告)日：2022-05-24
申请号：US16446934
申请日：2019-06-20
发明人： Kentaro Nagai
摘要： In order to provide a flow rate control apparatus capable of reducing pressure loss due to a downstream valve while enhancing responsiveness in flow rate control, a controller is designed to control the downstream valve on the basis of a flow rate deviation when a valve opening of the downstream valve is smaller than a predetermined valve opening. The controller is designed to control an upstream valve on the basis of the flow rate deviation when the valve opening of the downstream valve is the predetermined valve opening or more.
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7.发明申请公开(公告)号：US20200292407A1
公开(公告)日：2020-09-17
申请号：US16815909
申请日：2020-03-11
发明人： Sota Matsumoto , Kentaro Nagai , Yuko Imasato
摘要： In order to accurately judge whether or not there is a seat leakage in the first valve and the second valve in a short period of time, a fluid control apparatus comprises a fluid resistor arranged in a flow channel, a first valve arranged upstream of the fluid resistor, a first pressure sensor that measures a pressure in a first volume between the first valve and the fluid resistor in the flow channel, a second valve arranged downstream of the fluid resistor, a second pressure sensor that measures a pressure in a second volume between the fluid resistor and the second valve, a valve controller that controls the first or second valve, and a seat leakage judging part that judges whether or not there is a seat leakage in the valve valves based on the pressure sensors in a state where the valves are fully closed.
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公开(公告)号：US10705546B2
公开(公告)日：2020-07-07
申请号：US16520710
申请日：2019-07-24
发明人： Tsai Wei Tseng , Tomohiro Yoshida , Kentaro Nagai
IPC分类号： G05D7/06
摘要： In order to provide a flow rate control apparatus capable of reducing noise while reducing delay, the flow rate control apparatus includes: a fluid resistor provided in a flow path; a downstream valve provided downstream of the fluid resistor; and a downstream pressure sensor provided between the fluid resistor and the downstream valve. The apparatus calculates a resistor flow rate through the fluid resistor; the time change amount of the downstream pressure; on the basis of the resistor flow rate, the difference between the resistor flow rate and the time change amount of the downstream side pressure, and a weighting factor, calculates a weighted average to estimate a valve flow rate through the downstream valve; and, on the basis of the deviation between a set flow rate and the valve flow rate, controls the downstream side valve, in which the weighting factor is configured to be changeable.
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公开(公告)号：US20180253112A1
公开(公告)日：2018-09-06
申请号：US15910869
申请日：2018-03-02
CPC分类号： G05D7/0635 , G05B6/02
摘要： In order to restrain generation of a peak in the measured flow rate, a fluid control unit measures a flow rate of a fluid in a channel and outputs a signal indicating a valve operation amount of a fluid control valve obtained based on a deviation between a preset flow rate and a measured flow rate and a control coefficient, and the control coefficient for a stable state and the control coefficient for a transitional state are so set to moderate fluctuation of the valve operation amount to the deviation more in the transitional state than in the stable state. At or shortly after a timing when the stable state is switched to the transitional state, a signal is output that indicates an operation amount for a switching time calculated based on each of the operation amounts output at a plurality of timings in the stable state.
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公开(公告)号：US11953924B2
公开(公告)日：2024-04-09
申请号：US17847822
申请日：2022-06-23
CPC分类号： G05D7/0623 , G01F1/363 , G05D7/0635 , F17D3/01 , G01F15/005
摘要： In order to prevent unnatural behavior of a calculated flow rate, provided is a fluid control device in which a fluid control valve and upstream and downstream pressure sensors are provided on a flow path. The device includes a calculation unit configured to calculate a flow rate based on measured pressures; and an output unit configured to output the calculated flow rate, and exhibit a zero output function of outputting a zero value regardless of the calculated flow rate when the valve is in a closed state. The device is further configured to switch between execution and stop of the zero output function, and when the valve is in an open state and a difference between the measured pressures of the pressure sensors is larger than a threshold, stop the zero output function and cause the flow rate output unit to output the calculated flow rate.
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