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公开(公告)号：US11563420B1
公开(公告)日：2023-01-24
申请号：US16775242
申请日：2020-01-28
Applicant: HRL Laboratories, LLC
Inventor： Randall L. Kubena , Walter S. Wall
Abstract: A RF antenna or sensor has a substrate, a resonator operable at UHF disposed on the substrate, the resonator preferably having a quartz bar or body with electrodes disposed on opposing major surfaces thereof and with a magnetostrictive material disposed on or covering at least one of the electrodes. A pair of trapezoidal, triangular or wing shaped high permeability pole pieces preferably supported by that substrate are disposed confronting the resonator, one of the pair being disposed one side of the resonator and the other one of the pair being disposed on an opposing side of said resonator, the pair of high permeability pole pieces being spaced apart by a gap G, the resonator being disposed within that gap G. The size of gap G is preferably less than 100 μm.
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公开(公告)号：US11431293B1
公开(公告)日：2022-08-30
申请号：US17348344
申请日：2021-06-15
Applicant: HRL Laboratories, LLC
Inventor： Randall L. Kubena , Walter S. Wall
Abstract: A method and apparatus for increasing the Signal-to-Noise Ratio (SNR) of phononic comb teeth generated by a non-linear resonator. The method comprises generating a drive signal; applying the drive signal to the non-linear resonator with sufficient gain to generate the phononic comb teeth; and filtering the drive signal before applying it to the non-linear resonator to thereby increase the Signal-to-Noise Ratio (SNR) of phononic comb teeth generated by the non-linear resonator. The apparatus may comprise a circuit including a filter disposed between an oscillator generating the drive signal and the non-linear resonator, the filter preferably having a 3 db passband width which is less than a spacing of the phononic comb teeth generated by the non-linear resonator.
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公开(公告)号：US10110198B1
公开(公告)日：2018-10-23
申请号：US14973701
申请日：2015-12-17
Applicant: HRL Laboratories, LLC
Inventor： Randall L. Kubena
Abstract: A piezoelectric quartz tuning fork resonator having a pair of tines formed from a common quartz plate, with a middle electrode and two outer electrodes being disposed at or on top and bottom surfaces of each of the pair of tines and interconnected such that the outer electrodes at or on the top and bottom surfaces of a first one of the pair of tines are connected in common with the middle electrodes on the top and bottom surfaces of a second one of the pair of tines and further interconnected such that the outer electrodes at or on the top and bottom surfaces of the second one of the pair of tines are connected in common with the middle electrodes on the top and bottom surfaces of the first one of the pair of tines.
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公开(公告)号：US09985198B1
公开(公告)日：2018-05-29
申请号：US14286419
申请日：2014-05-23
Applicant: HRL LABORATORIES LLC.
Inventor： David T. Chang , Frederic P. Stratton , Hung Nguyen , Randall L. Kubena
IPC: H01L41/311 , H01L41/053 , H01L41/047 , H01L41/23 , H01L41/29 , H01L41/332
CPC classification number: H01L41/311 , H01L41/0475 , H01L41/053 , H01L41/23 , H01L41/29 , H01L41/332
Abstract: High-yield fabrication methods are provided for making quartz resonators having thicknesses ranging from one micrometer to several hundred micrometers and thus covering the frequency range from HF to UHF. Plasma dry etching is used to form arbitrary resonator geometries. The quartz resonator structure and the through-quartz vias are formed concurrently. The method includes bonding a quartz device wafer to a quartz handle wafer with a temporary adhesive. Mesa structures formed by plasma dry etching enable the resonators to achieve high-Q operation with energy trapping/mode confinement. A thermo-compression bond integrates the quartz resonators to a host wafer (e.g., an oscillator ASIC) to form oscillators. Silicon cap wafers are bonded over the resonators to the ASIC to provide wafer scale hermetic encapsulation of the quartz oscillators.
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公开(公告)号：US11567147B1
公开(公告)日：2023-01-31
申请号：US16932431
申请日：2020-07-17
Applicant: HRL Laboratories, LLC
Inventor： Randall L. Kubena , Walter S. Wall
IPC: G01R33/022 , H01L41/06 , H01L41/04
Abstract: A differential gradiometer comprising a substrate with at least a pair of resonators disposed thereon, wherein each of the at least a pair of resonators is sensitive to environmental factors which produces differential strains between the resonators, a first one of said pair of resonators being connected with a circuit for forming a first oscillator, the second one of said pair of resonators being connected with another circuit for forming a non-linear oscillator, an output of the first oscillator being applied to the non-linear oscillator for generating a comb of frequencies, wherein an addition oscillator is locked to the nth tooth of the comb thereby increasing the sensitivity of the gradiometer by a factor of n.
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Patent Agency Ranking
公开(公告)号：US20220140813A1
公开(公告)日：2022-05-05
申请号：US17574200
申请日：2022-01-12
Applicant: HRL Laboratories, LLC
Inventor： Randall L. Kubena , Walter S. Wall
Abstract: A RF antenna comprises a quartz resonator having electrodes disposed thereon with a magnetostrictive film disposed on the quartz resonator either on, partially under or adjacent at least one of the electrodes. A RF antenna having a magnetostrictive film may be made by patterning selected portions of a top surface of the quartz wafer for deposition of electrode metal and deposition of the magnetostrictive film and depositing the electrode metal and the magnetostrictive film; temporarily bonding the quartz wafer to a handle wafer; thinning the quartz wafer to a desired thickness; etching the quartz wafer to define the outlines of at least one quartz resonator bearing the electrode metal and the magnetostrictive film; patterning selected portions of a bottom surface the at least one quartz resonator for deposition of electrode metal and at least one bond pad and depositing the electrode metal and the at least one bond pad; bonding the at least one quartz resonator to a substrate wafer; and releasing the at least one quartz resonator from the handle wafer.
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公开(公告)号：US11239823B1
公开(公告)日：2022-02-01
申请号：US15965652
申请日：2018-04-27
Applicant: HRL Laboratories, LLC
Inventor： Randall L. Kubena , Walter S. Wall
Abstract: A RF antenna comprises a quartz resonator having electrodes disposed thereon with a magnetostrictive film disposed on the quartz resonator either on, partially under or adjacent at least one of the electrodes. A RF antenna having a magnetostrictive film may be made by patterning selected portions of a top surface of the quartz wafer for deposition of electrode metal and deposition of the magnetostrictive film and depositing the electrode metal and the magnetostrictive film; temporarily bonding the quartz wafer to a handle wafer; thinning the quartz wafer to a desired thickness; etching the quartz wafer to define the outlines of at least one quartz resonator bearing the electrode metal and the magnetostrictive film; patterning selected portions of a bottom surface the at least one quartz resonator for deposition of electrode metal and at least one bond pad and depositing the electrode metal and the at least one bond pad; bonding the at least one quartz resonator to a substrate wafer; and releasing the at least one quartz resonator from the handle wafer.
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公开(公告)号：US11211711B2
公开(公告)日：2021-12-28
申请号：US15942435
申请日：2018-03-31
Applicant: HRL Laboratories, LLC
Inventor： Walter S. Wall , Randall L. Kubena , Harris P. Moyer
Abstract: A RF transmitting device and method for transmitting digital information wherein the device is connected to or connectable with an antenna, the RF transmitting device having an RF source or transmitter, an electronic switch, a plurality electromechanical resonators each connected to the electronic switch. The electronic switch connects a selected one or selected ones of the electromechanical resonators between the RF source or transmitter and the antenna. Alternatively, the electronic switch connects a selected one or selected ones of the electromechanical resonators between different portions of the antenna. The electronic switch is controlled by a digital control unit for causing the electronic switch to couple RF energy produced by the RF source or transmitter to the antenna via the selected one or selected ones of the plurality of electromechanical resonators.
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公开(公告)号：US10389392B1
公开(公告)日：2019-08-20
申请号：US15801642
申请日：2017-11-02
Applicant: HRL Laboratories, LLC
Inventor： Randall L. Kubena , Walter S. Wall
Abstract: A resonator is formed from a unitary slab of a plate of quartz material which is KT cut with a theta cut angle between 20 and 35 degree, the unitary slab of a plate of quartz material having vertical side walls defining (i) an elongated central portion, the elongated central portion having a centerline along its major dimension, the elongated central portion resonating, in use, in an extensional mode disposed at a right angle to said centerline, (ii) a pair of isolating springs integrally connected to said central portion at the centerline thereof and (iii) first and second pairs of tethers, each one of the pairs tethers being integrally connected at a mid point of each the first and second pairs of tethers to ends of the isolating springs remote from the elongated central portion, each of the pairs tethers having two arms which wrap around the elongated central portion so that an end of one arm of the one of the tether approaches, but does not contact, an end of an arm of the another one of the tethers. The elongated central portion has two major opposing surfaces with a first pair of parallel electrodes disposed on one of the two opposing surfaces and with a second pair of parallel electrodes disposed on the other one of the two opposing surfaces. Interconnecting conductors disposed on the elongated central portion, on the isolating springs and on the first and second tethers, interconnecting conductors electrically connecting the first and second electrodes with pads located at the ends of the arms of said tethers.
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公开(公告)号：US10266398B1
公开(公告)日：2019-04-23
申请号：US14555459
申请日：2014-11-26
Applicant: HRL Laboratories, LLC
Inventor： Randall L. Kubena , Richard J. Joyce
IPC: H03H9/02 , H03H9/24 , B81C1/00 , C23C16/455 , C23C16/06
Abstract: A method for fabricating a Microelectromechanical System (MEMS) resonator includes providing a dielectric substrate defining a resonator and depositing a conductive coating having a resistivity of approximately 1 to 50 μΩ-cm on that substrate by Atomic Layer Deposition (ALD). A resonator fabricated according to this process includes a dielectric substrate defining a resonator and a conductive coating having a resistivity of approximately 1 to 50 μΩ-cm for electrically coupling the resonator to electronics. Another method for fabricating a MEMS resonator includes providing a dielectric substrate defining a resonator, depositing an aluminum oxide film on that substrate by ALD, and depositing a noble metal film on the aluminum oxide film, also by ALD.
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