公开(公告)号：US20020023999A1

公开(公告)日：2002-02-28

申请号：US09978314

申请日：2001-10-15

Applicant: HRL Laboratories

Inventor： Tsung-Yuan Hsu ,  Robert Y. Loo ,  Greg Tangonan ,  Juan F. Lam

IPC: G02B007/04

CPC classification number: H01H59/0009 ,  H01H1/0036 ,  H01H47/24 ,  H01H67/22

Abstract: An optically controlled micro-electromechanical (MEM) switch is described which desirably utilizes photoconductive properties of a semiconductive substrate upon which MEM switches are fabricated. In one embodiment the bias voltage provided for actuation of the switch is altered by illuminating an optoelectric portion of the switch to deactuate the switch. In an alternative embodiment, a photovoltaic device provides voltage to actuate the switch without any bias lines at all. Due to the hysteresis of the electromechanical switching as a function of applied voltage, only modest variation of voltage applied to the switch is necessary to cause the switch to open or close sharply under optical control.

Abstract translation: 描述了一种光学控制的微机电（MEM）开关，其理想地利用其上制造有MEM开关的半导体基板的光导特性。 在一个实施例中，用于致动开关的偏置电压通过照亮开关的光电部分而改变，以使开关停止。 在替代实施例中，光伏器件提供电压以完全启动开关而没有任何偏置线。 由于作为施加电压的函数的机电开关的滞后，仅需要施加到开关的电压的适度变化，以使开关在光学控制下急剧地打开或闭合。

公开(公告)号：US20030193012A1

公开(公告)日：2003-10-16

申请号：US10439624

申请日：2003-05-15

Applicant: HRL Laboratories, LLC.

Inventor： Tsung-Yuan Hsu ,  Robert Y. Loo ,  Greg Tangonan ,  Juan F. Lam

IPC: H01L031/00

CPC classification number: H01H59/0009 ,  H01H1/0036 ,  H01H47/24 ,  H01H67/22

Abstract: An optically controlled micro-electromechanical (MEM) switch is described which desirably utilizes photoconductive properties of a semiconductive substrate upon which MEM switches are fabricated. In one embodiment the bias voltage provided for actuation of the switch is altered by illuminating an optoelectric portion of the switch to deactuate the switch. In an alternative embodiment, a photovoltaic device provides voltage to actuate the switcdh without any bias lines at all. Due to the hysteresis of the electromechanical switching as a function of applied voltage, only modest variation of voltage applied to the switch is necessary to cause the switch to open or close sharply under optical control.

Abstract translation: 描述了一种光学控制的微机电（MEM）开关，其理想地利用其上制造有MEM开关的半导体基板的光导特性。 在一个实施例中，用于致动开关的偏置电压通过照亮开关的光电部分而改变，以使开关停止。 在替代实施例中，光伏器件提供电压以完全驱动开关而没有任何偏置线。 由于作为施加电压的函数的机电开关的滞后，仅需要施加到开关的电压的适度变化，以使开关在光学控制下开启或闭合。