公开(公告)号：US08488117B2

公开(公告)日：2013-07-16

申请号：US13224096

申请日：2011-09-01

申请人： Haim Feldman ,  Boris Morgenstein ,  Roman Naidis ,  Adam Baer

发明人： Haim Feldman ,  Boris Morgenstein ,  Roman Naidis ,  Adam Baer

IPC分类号： G01N21/00

CPC分类号： G02F1/29 ,  G01N21/8806 ,  G01N21/9501 ,  G02F1/11 ,  G02F2001/294

摘要： An inspection system includes a first focusing unit configured to perform fast focus changes to a first focusing function applied to an incident light beam. A traveling lens acousto-optic device is arranged to receive the light beam focused by the first focusing function and produce focused spots using a plurality of traveling lenses generated in response to radio frequency signals. The traveling lenses apply a second focusing function and the traveling lens acousto-optic device is arranged to alter the second focusing function at a fast rate. The inspection system also includes optics arranged to direct the focused spots onto an inspected object and to direct radiation from the inspected object to a sensor.

摘要翻译： 检查系统包括被配置为对应用于入射光束的第一聚焦功能执行快速聚焦改变的第一聚焦单元。 移动透镜声光装置被布置成接收由第一聚焦功能聚焦的光束，并且使用响应于射频信号产生的多个行进透镜产生聚焦点。 行进透镜应用第二聚焦功能，并且行进透镜声光装置被布置成以快速的速度改变第二聚焦功能。 检查系统还包括被布置成将聚焦点引导到被检查对象并将来自被检查对象的辐射引导到传感器的光学系统。

公开(公告)号：US20120086937A1

公开(公告)日：2012-04-12

申请号：US13224096

申请日：2011-09-01

申请人： Haim Feldman ,  Boris Morgenstein ,  Roman Naidis ,  Adam Baer

发明人： Haim Feldman ,  Boris Morgenstein ,  Roman Naidis ,  Adam Baer

IPC分类号： G01N21/88 ,  G02F1/33 ,  G02F1/29

CPC分类号： G02F1/29 ,  G01N21/8806 ,  G01N21/9501 ,  G02F1/11 ,  G02F2001/294

摘要： An inspection system includes a first focusing unit configured to perform fast focus changes to a first focusing function applied to an incident light beam. A traveling lens acousto-optic device is arranged to receive the light beam focused by the first focusing function and produce focused spots using a plurality of traveling lenses generated in response to radio frequency signals. The traveling lenses apply a second focusing function and the traveling lens acousto-optic device is arranged to alter the second focusing function at a fast rate. The inspection system also includes optics arranged to direct the focused spots onto an inspected object and to direct radiation from the inspected object to a sensor.

摘要翻译： 检查系统包括被配置为对应用于入射光束的第一聚焦功能执行快速聚焦改变的第一聚焦单元。 移动透镜声光装置被布置成接收由第一聚焦功能聚焦的光束，并且使用响应于射频信号产生的多个行进透镜产生聚焦点。 行进透镜应用第二聚焦功能，并且行进透镜声光装置被布置成以快速的速度改变第二聚焦功能。 检查系统还包括被布置成将聚焦点引导到被检查对象并将来自被检查对象的辐射引导到传感器的光学系统。