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公开(公告)号：US4781511A
公开(公告)日：1988-11-01
申请号：US932182
申请日：1986-11-18
IPC分类号： H01L21/02 , H01L21/22 , H01L21/677 , C23C15/00
CPC分类号： H01L21/67775 , H01L21/67772 , Y10S414/137 , Y10S414/139 , Y10S414/14
摘要： A semiconductor processing system which includes: a first semiconductor wafer cassette for housing semiconductor wafers; a first transfer pod for enclosing the first cassette airtightly, the first pod having a box-like pod body with an open bottom and a bottom plate detachably attached to the pod body for closing the bottom of the pod body; a wafer processing equipment having a first port for loading the cassette and a canopy covering the first port, the processing equipment processing the wafer in the first cassette when the cassette is loaded in the first port; and a first mechanism for transferring the first cassette between the first port of the processing equipment and the first pod without exposing the cassette and the wafers therein to outside contamination. The first transferring mechanism includes: a second port, provided on the canopy of the processing equipment at the position directly above the first port, for placing the first pod on the second port, the second port including a port assembly for attaching and detaching the bottom plate of the first pod to and from the pod body when the first pod is placed on the second port; and a first lift mechanism, arranged mainly between the first and second ports, for conveying the bottom plate of the first pod between the first and second ports when the bottom plate of the pod is detached from the pod body.
摘要翻译： 一种半导体处理系统，包括：用于容纳半导体晶片的第一半导体晶片盒; 用于密封地封闭第一盒的第一传送盒，第一盒具有带有敞开的底部的盒状盒体和可拆卸地附接到盒体的底板，用于封闭荚体的底部; 晶片处理设备具有用于装载盒的第一端口和覆盖第一端口的盖，处理设备在盒装载在第一端口中时处理第一盒中的晶片; 以及用于在处理设备的第一端口和第一容器之间转移第一盒的第一机构，而不将盒和其中的晶片暴露于外部污染物。 第一传送机构包括：第二端口，设置在位于第一端口正上方的处理设备的顶盖上，用于将第一容器放置在第二端口上，第二端口包括端口组件，用于连接和拆卸底部 当第一荚放置在第二端口上时，第一荚的板与荚体之间的板; 以及主要设置在第一和第二端口之间的第一提升机构，用于当荚的底板从荚体脱离时，在第一和第二端口之间输送第一荚的底板。
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公开(公告)号：US4867629A
公开(公告)日：1989-09-19
申请号：US123313
申请日：1987-11-20
申请人： Yoshiyuki Iwasawa , Tsutomu Ishida , Hiroshi Harada , Kenji Okamoto , Shintaro Kobayashi , Takashi Matsumoto , Tsutomu Shinya , Shigeru Tanaka , Toshio Takasu , Kiwamu Yamamoto
发明人： Yoshiyuki Iwasawa , Tsutomu Ishida , Hiroshi Harada , Kenji Okamoto , Shintaro Kobayashi , Takashi Matsumoto , Tsutomu Shinya , Shigeru Tanaka , Toshio Takasu , Kiwamu Yamamoto
IPC分类号： H01L21/677
CPC分类号： H01L21/67769 , Y10S414/14
摘要： There is disclosed a dusttight storage cabinet apparatus used for storing works such as wafer cassettes for containing semiconductor wafers. The storage cabinet apparatus includes: a housing having an entrance, formed in its front wall, for allowing works to come in and go out of the housing therethrough; an air supply duct for supplying the inside of the housing with clean air; a vertical rotation shaft rotatably disposed in the housing for turning about its longitudinal axis; a drive motor for turning the rotation shaft; and a rack assembly of a substantially cylindrical structure. The rack assembly is coaxially secured to the rotation shaft and has a plurality of compartments for storing the works therewithin. The compartments open radially outward and are partitioned off from one another so as to prevent cross contamination by dust among the compartments.
摘要翻译： 公开了一种用于存储诸如用于容纳半导体晶片的晶片盒的工作的防尘存储柜装置。 存储柜装置包括：壳体，其具有形成在其前壁中的入口，用于允许工件从壳体中进出; 用于向壳体内部供给清洁空气的供气管道; 可旋转地设置在所述壳体中以围绕其纵向轴线转动的垂直旋转轴; 用于转动旋转轴的驱动马达; 以及基本上圆柱形结构的齿条组件。 齿条组件同轴地固定到旋转轴上，并具有多个用于在其中存储工件的隔间。 隔间径向向外敞开，并隔开隔间，以防止间隔室内的灰尘交叉污染。
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公开(公告)号：US4826360A
公开(公告)日：1989-05-02
申请号：US18993
申请日：1987-02-25
IPC分类号： H01L21/677 , H01L21/687 , B65G51/32
CPC分类号： H01L21/67724 , H01L21/6773 , H01L21/67736 , H01L21/67775 , H01L21/68707 , Y10S414/139 , Y10S414/14
摘要： A transfer system for transferring a SMIF pod.TM. in a clean room, in which the pod is adapted to contain a wafer cassette. The transfer system includes: at least one pair of SMIF arms.TM., the arms disposed adjacent to a semiconductor processing apparatus for transferring wafers, carried in the wafer cassette, into and out of the semiconductor processing apparatus; a transfer tube disposed near the arms; a vehicle adapted to carry the pod and adapted to move within the transfer tube; evacuation mechanism for evacuating the transfer tube to produce a negative pressure within the transfer tube so that the vehicle is moved along an axis of the transfer tube due to the negative pressure; and at least one pair of conveying mechanisms for conveying the vehicle between the transfer tube and respective arms.
摘要翻译： 传送系统，用于将洁净室中的SMIF盒TM传送到其中，其中盒子适于包含晶片盒。 传送系统包括：至少一对SMIF臂TM，与半导体处理设备相邻设置的用于将晶片盒中承载的晶片转移到半导体处理设备中的臂; 设置在臂附近的转移管; 适于承载所述荚并适于在所述传送管内移动的车辆; 排出机构，用于排出输送管，以在输送管内产生负压，使得车辆由于负压而沿着输送管的轴线移动; 以及至少一对传送机构，用于在传送管和相应的臂之间传送车辆。
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公开(公告)号：US4904153A
公开(公告)日：1990-02-27
申请号：US119839
申请日：1987-11-12
申请人： Yoshiyuki Iwasawa , Tsutomu Ishida , Hiroshi Harada , Shintaro Kobayashi , Kenji Okamoto , Takashi Matsumoto , Kiwamu Yamamoto , Toshio Takasu
发明人： Yoshiyuki Iwasawa , Tsutomu Ishida , Hiroshi Harada , Shintaro Kobayashi , Kenji Okamoto , Takashi Matsumoto , Kiwamu Yamamoto , Toshio Takasu
CPC分类号： H01L21/67796 , B25J15/02 , B25J17/025 , B25J18/02 , B25J19/0091 , B25J21/005 , B25J5/02 , Y10S294/902 , Y10S414/14
摘要： There is disclosed a robot used in a clean room and adapted to transport a wafer cassette containing semiconductor wafers. The robot includes: a guide rail disposed in the clean room; a robot body slidably connected to the guide rail for movement along the guide rail; and a first drive mechanism for driving the robot body along the guide rail. The robot body includes: a clamping hand for releasably clamping the wafer cassette; an arm assembly, extending between the guide rail and the clamping hand, for controlling the position of the clamping hand; and a wrist assembly, interposed between the arm assembly and the clamping hand, for adjusting the orientation of the clamping hand. The wrist assembly includes: a wrist frame connected via a horizontal pivot to the arm assembly for upward and downward movement, the wrist frame rotatably supporting the clamping hand for turning about an axis perpendicular to the horizontal pivot; a second drive mechanism for pivoting the wrist frame relative to the arm assembly; and a third drive mechanism for turning the clamping hand relative to the wrist frame.
摘要翻译： 公开了一种在洁净室中使用并适于运送包含半导体晶片的晶片盒的机器人。 机器人包括：布置在洁净室中的导轨; 可滑动地连接到所述导轨以沿着所述导轨移动的机器人主体; 以及用于沿导轨驱动机器人主体的第一驱动机构。 机器人主体包括：用于可释放地夹紧晶片盒的夹紧手; 臂组件，其在导轨和夹持手之间延伸，用于控制夹持手的位置; 以及插入在臂组件和夹持手之间的腕部组件，用于调节夹紧手的取向。 手腕组件包括：手腕架，其经由水平枢轴连接到臂组件以用于向上和向下运动，所述腕架可旋转地支撑夹持手以围绕垂直于水平枢轴的轴线转动; 用于相对于所述臂组件枢转所述腕架的第二驱动机构; 以及用于相对于手腕架转动夹持手的第三驱动机构。
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公开(公告)号：US4903610A
公开(公告)日：1990-02-27
申请号：US126475
申请日：1987-11-25
申请人： Takashi Matsumoto , Shigeru Tanaka , Tsutomu Shinya , Yoshiyuki Iwasawa , Tsutomu Ishida , Hiroshi Harada , Shintaro Kobayashi , Kenji Okamoto
发明人： Takashi Matsumoto , Shigeru Tanaka , Tsutomu Shinya , Yoshiyuki Iwasawa , Tsutomu Ishida , Hiroshi Harada , Shintaro Kobayashi , Kenji Okamoto
IPC分类号： B61B13/08 , B61C11/00 , H01L21/677
CPC分类号： H01L21/67706 , B61B13/08 , B61C11/00 , H01L21/6773
摘要： A railway carrier apparatus for semiconductor wafers which are contained in a wafer cassette is disclosed. This railway carrier apparatus includes: a carrier for carrying the wafer cassette; a guide rail, disposed along a line of travel of the carrier, for supporting the carrier to guide the carrier along the line of travel; and a drive mechanism for driving the carrier along the line of travel. The carrier includes; a carrier body slidably connected to the guide rail for movement along the guide rail; and a bedplate member, mounted on the carrier body, for supporting the wafer cassette on its upper face. The upper face of the bedplate member is inclined with respect to a horizontal plane in such a manner that one of its opposite side edges is positioned at a higher level than the other side edge.
摘要翻译： 公开了一种包含在晶片盒中的用于半导体晶片的铁路载体装置。 这种铁路运输装置包括：承载晶片盒的载体; 导轨，沿着所述载体的行进线布置，用于支撑所述载体以沿所述行进线引导所述载体; 以及用于沿行驶线驱动行星架的驱动机构。 承运人包括 可滑动地连接到所述导轨上以沿着所述导轨运动的托架体; 以及安装在载体主体上的底板构件，用于将晶片盒支撑在其上表面上。 底板构件的上表面相对于水平面倾斜，使得其相对侧边缘之一位于比另一侧边缘更高的高度。
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6.发明授权Image forming apparatus for determining remaining amount of developer in developer container 有权用于确定显影剂容器中的显影剂的剩余量的图像形成装置公开(公告)号：US09317005B2
公开(公告)日：2016-04-19
申请号：US14112801
申请日：2012-04-19
CPC分类号： G03G21/1652 , G03G15/0856 , G03G15/086 , G03G15/0889 , G03G2215/0888
摘要： An image forming apparatus includes a developing unit that contains developer and that is detachable; and a detection member that includes a detected electrode and that moves around a rotation shaft in the developing unit, an electrostatic capacitance sensor electrode that is provided on an outer side of the developing unit, an electrostatic capacitance sensor that detects an electrostatic capacitance between the detected electrode and the electrostatic capacitance sensor electrode and that outputs data related to the detected electrostatic capacitance, and a CPU that determines an amount of the developer in the developing unit based on the data output from the electrostatic capacitance sensor.
摘要翻译： 图像形成装置包括显影单元，该显影单元包含显影剂并且是可拆卸的; 以及检测构件，其包括被检测的电极并围绕所述显影单元中的旋转轴移动;静电电容传感器电极，设置在所述显影单元的外侧;静电电容传感器，其检测所检测到的静电电容 电极和静电电容传感器电极，并且输出与检测到的静电电容相关的数据;以及CPU，其基于从静电电容传感器输出的数据来确定显影单元中的显影剂的量。
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公开(公告)号：US08995854B2
公开(公告)日：2015-03-31
申请号：US13571195
申请日：2012-08-09
申请人： Tsutomu Ishida
发明人： Tsutomu Ishida
IPC分类号： G03G15/00
CPC分类号： G03G15/5029
摘要： A recording material determination apparatus includes a transmission unit configured to transmit an ultrasonic wave, a reception unit configured to receive an ultrasonic wave transmitted from the transmission unit and then via a recording material, and a control unit configured to cause the transmission unit to transmit an ultrasonic wave a plurality of times under different conditions, measure an output value a plurality of times, and determine the recording material based on the output values measured a plurality of times.
摘要翻译： 记录材料确定装置包括：发送单元，被配置为发送超声波;接收单元，被配置为接收从所述发送单元发送的超声波，然后经由记录材料;以及控制单元，被配置为使所述发送单元发送 在不同条件下多次超声波测量多次输出值，并且基于多次测量的输出值来确定记录材料。
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公开(公告)号：US08861999B2
公开(公告)日：2014-10-14
申请号：US13272101
申请日：2011-10-12
IPC分类号： G03G15/00
CPC分类号： G03G15/5062 , G03G15/5029 , G03G15/6529 , G03G2215/00734 , G03G2215/00738 , G03G2215/00751
摘要： By providing a step in a pressing member for pressing a recording material P to a reading surface of an image-pickup unit, surface images in a tight contact area and a non-tight-contact area are picked up. By identifying the type of the recording material P based on the two surface images, the accuracy of identifying the recording material is improved without using a plurality of sensors.
摘要翻译： 通过在将记录材料P按压到图像拾取单元的读取表面的按压构件中提供一个步骤，拾取紧密接触区域和非紧密接触区域中的表面图像。 通过基于两个表面图像识别记录材料P的类型，在不使用多个传感器的情况下提高了记录材料的识别精度。
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公开(公告)号：US20140037305A1
公开(公告)日：2014-02-06
申请号：US14112801
申请日：2012-04-19
IPC分类号： G03G15/08
CPC分类号： G03G21/1652 , G03G15/0856 , G03G15/086 , G03G15/0889 , G03G2215/0888
摘要： The image forming apparatus includes a developing unit that contains developer and that is detachable; a detection member that includes a detected electrode and that moves around a rotation shaft in the developing unit, an electrostatic capacitance sensor electrode that is provided on an outer side of the developing unit, an electrostatic capacitance sensor that detects an electrostatic capacitance between the detected electrode and the electrostatic capacitance sensor electrode and that outputs data related to the detected electrostatic capacitance, and a CPU that determines an amount of the developer in the developing unit based on the data output from the electrostatic capacitance sensor.
摘要翻译： 图像形成装置包括显影单元，其包含显影剂并且可拆卸; 检测构件，其包括检测电极并且围绕所述显影单元中的旋转轴移动;静电电容传感器电极，设置在所述显影单元的外侧;静电电容传感器，其检测所检测到的电极之间的静电电容 和静电电容传感器电极，并且输出与检测到的静电电容相关的数据;以及CPU，其基于从静电电容传感器输出的数据确定显影单元中的显影剂的量。
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公开(公告)号：US20140023385A1
公开(公告)日：2014-01-23
申请号：US14007709
申请日：2012-04-04
IPC分类号： G03G15/08
CPC分类号： G03G15/086 , G03G15/0856 , G03G15/0889 , G03G21/1652 , G03G2215/0888
摘要： The image forming apparatus includes a developing unit that is detachable and contains a developer, a detection member that includes an electrode to be detected and is rotatable around a rotation axis in the developing unit, an agitator that moves around the rotation axis in the developing unit; an electrostatic capacitance sensor electrode provided on an exterior of the developing unit, an electrostatic capacitance sensor that detects electrostatic capacitance between the electrode to be detected and the electrostatic capacitance sensor electrode, and outputs data on the detected electrostatic capacitance, and a CPU that determines an amount of developer in the developing unit based on the data output from the electrostatic capacitance sensor.
摘要翻译： 图像形成装置包括可拆卸并包含显影剂的显影单元，包括待检测电极并且可围绕显影单元的旋转轴线旋转的检测构件，围绕显影单元中的旋转轴线移动的搅拌器 ; 设置在显影单元的外部的静电电容传感器电极，检测待检测电极和静电电容传感器电极之间的静电电容的静电电容传感器，并输出检测到的静电电容的数据;以及CPU， 基于从静电电容传感器输出的数据，显影单元中的显影剂量。
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