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公开(公告)号：US4781511A
公开(公告)日：1988-11-01
申请号：US932182
申请日：1986-11-18
IPC分类号： H01L21/02 , H01L21/22 , H01L21/677 , C23C15/00
CPC分类号： H01L21/67775 , H01L21/67772 , Y10S414/137 , Y10S414/139 , Y10S414/14
摘要： A semiconductor processing system which includes: a first semiconductor wafer cassette for housing semiconductor wafers; a first transfer pod for enclosing the first cassette airtightly, the first pod having a box-like pod body with an open bottom and a bottom plate detachably attached to the pod body for closing the bottom of the pod body; a wafer processing equipment having a first port for loading the cassette and a canopy covering the first port, the processing equipment processing the wafer in the first cassette when the cassette is loaded in the first port; and a first mechanism for transferring the first cassette between the first port of the processing equipment and the first pod without exposing the cassette and the wafers therein to outside contamination. The first transferring mechanism includes: a second port, provided on the canopy of the processing equipment at the position directly above the first port, for placing the first pod on the second port, the second port including a port assembly for attaching and detaching the bottom plate of the first pod to and from the pod body when the first pod is placed on the second port; and a first lift mechanism, arranged mainly between the first and second ports, for conveying the bottom plate of the first pod between the first and second ports when the bottom plate of the pod is detached from the pod body.
摘要翻译： 一种半导体处理系统，包括：用于容纳半导体晶片的第一半导体晶片盒; 用于密封地封闭第一盒的第一传送盒，第一盒具有带有敞开的底部的盒状盒体和可拆卸地附接到盒体的底板，用于封闭荚体的底部; 晶片处理设备具有用于装载盒的第一端口和覆盖第一端口的盖，处理设备在盒装载在第一端口中时处理第一盒中的晶片; 以及用于在处理设备的第一端口和第一容器之间转移第一盒的第一机构，而不将盒和其中的晶片暴露于外部污染物。 第一传送机构包括：第二端口，设置在位于第一端口正上方的处理设备的顶盖上，用于将第一容器放置在第二端口上，第二端口包括端口组件，用于连接和拆卸底部 当第一荚放置在第二端口上时，第一荚的板与荚体之间的板; 以及主要设置在第一和第二端口之间的第一提升机构，用于当荚的底板从荚体脱离时，在第一和第二端口之间输送第一荚的底板。
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公开(公告)号：US4867629A
公开(公告)日：1989-09-19
申请号：US123313
申请日：1987-11-20
申请人： Yoshiyuki Iwasawa , Tsutomu Ishida , Hiroshi Harada , Kenji Okamoto , Shintaro Kobayashi , Takashi Matsumoto , Tsutomu Shinya , Shigeru Tanaka , Toshio Takasu , Kiwamu Yamamoto
发明人： Yoshiyuki Iwasawa , Tsutomu Ishida , Hiroshi Harada , Kenji Okamoto , Shintaro Kobayashi , Takashi Matsumoto , Tsutomu Shinya , Shigeru Tanaka , Toshio Takasu , Kiwamu Yamamoto
IPC分类号： H01L21/677
CPC分类号： H01L21/67769 , Y10S414/14
摘要： There is disclosed a dusttight storage cabinet apparatus used for storing works such as wafer cassettes for containing semiconductor wafers. The storage cabinet apparatus includes: a housing having an entrance, formed in its front wall, for allowing works to come in and go out of the housing therethrough; an air supply duct for supplying the inside of the housing with clean air; a vertical rotation shaft rotatably disposed in the housing for turning about its longitudinal axis; a drive motor for turning the rotation shaft; and a rack assembly of a substantially cylindrical structure. The rack assembly is coaxially secured to the rotation shaft and has a plurality of compartments for storing the works therewithin. The compartments open radially outward and are partitioned off from one another so as to prevent cross contamination by dust among the compartments.
摘要翻译： 公开了一种用于存储诸如用于容纳半导体晶片的晶片盒的工作的防尘存储柜装置。 存储柜装置包括：壳体，其具有形成在其前壁中的入口，用于允许工件从壳体中进出; 用于向壳体内部供给清洁空气的供气管道; 可旋转地设置在所述壳体中以围绕其纵向轴线转动的垂直旋转轴; 用于转动旋转轴的驱动马达; 以及基本上圆柱形结构的齿条组件。 齿条组件同轴地固定到旋转轴上，并具有多个用于在其中存储工件的隔间。 隔间径向向外敞开，并隔开隔间，以防止间隔室内的灰尘交叉污染。
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公开(公告)号：US4826360A
公开(公告)日：1989-05-02
申请号：US18993
申请日：1987-02-25
IPC分类号： H01L21/677 , H01L21/687 , B65G51/32
CPC分类号： H01L21/67724 , H01L21/6773 , H01L21/67736 , H01L21/67775 , H01L21/68707 , Y10S414/139 , Y10S414/14
摘要： A transfer system for transferring a SMIF pod.TM. in a clean room, in which the pod is adapted to contain a wafer cassette. The transfer system includes: at least one pair of SMIF arms.TM., the arms disposed adjacent to a semiconductor processing apparatus for transferring wafers, carried in the wafer cassette, into and out of the semiconductor processing apparatus; a transfer tube disposed near the arms; a vehicle adapted to carry the pod and adapted to move within the transfer tube; evacuation mechanism for evacuating the transfer tube to produce a negative pressure within the transfer tube so that the vehicle is moved along an axis of the transfer tube due to the negative pressure; and at least one pair of conveying mechanisms for conveying the vehicle between the transfer tube and respective arms.
摘要翻译： 传送系统，用于将洁净室中的SMIF盒TM传送到其中，其中盒子适于包含晶片盒。 传送系统包括：至少一对SMIF臂TM，与半导体处理设备相邻设置的用于将晶片盒中承载的晶片转移到半导体处理设备中的臂; 设置在臂附近的转移管; 适于承载所述荚并适于在所述传送管内移动的车辆; 排出机构，用于排出输送管，以在输送管内产生负压，使得车辆由于负压而沿着输送管的轴线移动; 以及至少一对传送机构，用于在传送管和相应的臂之间传送车辆。
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公开(公告)号：US4904153A
公开(公告)日：1990-02-27
申请号：US119839
申请日：1987-11-12
申请人： Yoshiyuki Iwasawa , Tsutomu Ishida , Hiroshi Harada , Shintaro Kobayashi , Kenji Okamoto , Takashi Matsumoto , Kiwamu Yamamoto , Toshio Takasu
发明人： Yoshiyuki Iwasawa , Tsutomu Ishida , Hiroshi Harada , Shintaro Kobayashi , Kenji Okamoto , Takashi Matsumoto , Kiwamu Yamamoto , Toshio Takasu
CPC分类号： H01L21/67796 , B25J15/02 , B25J17/025 , B25J18/02 , B25J19/0091 , B25J21/005 , B25J5/02 , Y10S294/902 , Y10S414/14
摘要： There is disclosed a robot used in a clean room and adapted to transport a wafer cassette containing semiconductor wafers. The robot includes: a guide rail disposed in the clean room; a robot body slidably connected to the guide rail for movement along the guide rail; and a first drive mechanism for driving the robot body along the guide rail. The robot body includes: a clamping hand for releasably clamping the wafer cassette; an arm assembly, extending between the guide rail and the clamping hand, for controlling the position of the clamping hand; and a wrist assembly, interposed between the arm assembly and the clamping hand, for adjusting the orientation of the clamping hand. The wrist assembly includes: a wrist frame connected via a horizontal pivot to the arm assembly for upward and downward movement, the wrist frame rotatably supporting the clamping hand for turning about an axis perpendicular to the horizontal pivot; a second drive mechanism for pivoting the wrist frame relative to the arm assembly; and a third drive mechanism for turning the clamping hand relative to the wrist frame.
摘要翻译： 公开了一种在洁净室中使用并适于运送包含半导体晶片的晶片盒的机器人。 机器人包括：布置在洁净室中的导轨; 可滑动地连接到所述导轨以沿着所述导轨移动的机器人主体; 以及用于沿导轨驱动机器人主体的第一驱动机构。 机器人主体包括：用于可释放地夹紧晶片盒的夹紧手; 臂组件，其在导轨和夹持手之间延伸，用于控制夹持手的位置; 以及插入在臂组件和夹持手之间的腕部组件，用于调节夹紧手的取向。 手腕组件包括：手腕架，其经由水平枢轴连接到臂组件以用于向上和向下运动，所述腕架可旋转地支撑夹持手以围绕垂直于水平枢轴的轴线转动; 用于相对于所述臂组件枢转所述腕架的第二驱动机构; 以及用于相对于手腕架转动夹持手的第三驱动机构。
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公开(公告)号：US4903610A
公开(公告)日：1990-02-27
申请号：US126475
申请日：1987-11-25
申请人： Takashi Matsumoto , Shigeru Tanaka , Tsutomu Shinya , Yoshiyuki Iwasawa , Tsutomu Ishida , Hiroshi Harada , Shintaro Kobayashi , Kenji Okamoto
发明人： Takashi Matsumoto , Shigeru Tanaka , Tsutomu Shinya , Yoshiyuki Iwasawa , Tsutomu Ishida , Hiroshi Harada , Shintaro Kobayashi , Kenji Okamoto
IPC分类号： B61B13/08 , B61C11/00 , H01L21/677
CPC分类号： H01L21/67706 , B61B13/08 , B61C11/00 , H01L21/6773
摘要： A railway carrier apparatus for semiconductor wafers which are contained in a wafer cassette is disclosed. This railway carrier apparatus includes: a carrier for carrying the wafer cassette; a guide rail, disposed along a line of travel of the carrier, for supporting the carrier to guide the carrier along the line of travel; and a drive mechanism for driving the carrier along the line of travel. The carrier includes; a carrier body slidably connected to the guide rail for movement along the guide rail; and a bedplate member, mounted on the carrier body, for supporting the wafer cassette on its upper face. The upper face of the bedplate member is inclined with respect to a horizontal plane in such a manner that one of its opposite side edges is positioned at a higher level than the other side edge.
摘要翻译： 公开了一种包含在晶片盒中的用于半导体晶片的铁路载体装置。 这种铁路运输装置包括：承载晶片盒的载体; 导轨，沿着所述载体的行进线布置，用于支撑所述载体以沿所述行进线引导所述载体; 以及用于沿行驶线驱动行星架的驱动机构。 承运人包括 可滑动地连接到所述导轨上以沿着所述导轨运动的托架体; 以及安装在载体主体上的底板构件，用于将晶片盒支撑在其上表面上。 底板构件的上表面相对于水平面倾斜，使得其相对侧边缘之一位于比另一侧边缘更高的高度。
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6.发明授权
公开(公告)号：US4631076A
公开(公告)日：1986-12-23
申请号：US675132
申请日：1984-11-27
CPC分类号： F01N3/0293 , B01D53/86 , F01N3/029 , F01N3/035 , F01N3/206 , F01N2250/02 , F01N2470/30 , F01N2610/01 , F01N3/38 , Y10S55/30
摘要： Apparatus for removing black fumes from exhaust gas from an internal combustion engine includes a filter mounted on an exhaust pipe of the engine. The filter includes a body defining a filter chamber and a filter element mounted within the filter chamber for collecting carbon particles constituting the black fume. A solution dispersing device is provided for dispersing a solution of catalyst to the exhaust gas in the filter chamber at a position upstream of the filter element to cause the oxidation of the carbon particles collected in the filter element to remove them therefrom. There is also disclosed a method of removing black fume from exhaust gas from the internal combustion engine.
摘要翻译： 用于从内燃机的废气中除去黑烟的装置包括安装在发动机排气管上的过滤器。 过滤器包括限定过滤室的主体和安装在过滤室内的过滤元件，用于收集构成黑烟的碳颗粒。 提供了一种溶液分散装置，用于将催化剂溶液在过滤器元件的上游位置处的过滤室中的排气分散，从而使收集在过滤器元件中的碳颗粒氧化从其中除去。 还公开了从内燃机的废气中除去黑烟的方法。
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公开(公告)号：US09070910B2
公开(公告)日：2015-06-30
申请号：US13291738
申请日：2011-11-08
申请人： Hiroshi Harada
发明人： Hiroshi Harada
CPC分类号： H01M8/0291 , H01M8/0289 , H01M8/1016 , Y02E60/521 , Y02P70/56
摘要： According to the present invention, a porous material for a fuel cell electrolyte membrane, wherein at least one strength auxiliary layer is provided inside and/or on the surface of a high porosity layer, the high porosity layer and the strength auxiliary layer constitute a multilayer structure, and the average diameter of pores of the high porosity layer is different from the average diameter of pores of the strength auxiliary layer, is provided. Also, a porous material having high porosity and high strength, which is suitable as a base material for an electrolyte membrane of a solid polymer fuel cell, is provided and a high-performance fuel cell using such material is realized.
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8.发明授权Wireless communication system, cluster head equipment (CHE) installed in wireless communication system, and wireless communication method 有权无线通信系统，无线通信系统中安装的集群头设备（CHE）和无线通信方式公开(公告)号：US08917685B2
公开(公告)日：2014-12-23
申请号：US13635437
申请日：2011-03-15
申请人： Gabriel Porto Villardi , Chen Sun , Yohannes Alemseged Demessie , Ha Nguyen Tran , Hiroshi Harada
发明人： Gabriel Porto Villardi , Chen Sun , Yohannes Alemseged Demessie , Ha Nguyen Tran , Hiroshi Harada
CPC分类号： H04W16/14
摘要： Disclosed is a wireless communication system and the like that can avoid interference even if a plurality of networks coexist. The wireless communication system includes a primary user, cluster head equipment, and a secondary user. The cluster head equipment is for providing a local area network to a cluster region containing the abovementioned primary user. Also, the cluster head equipment contains: an acquisition means that acquires one or both—of information regarding the primary user and information regarding a primary signal—and the like; and a transmission means that transmits information to the secondary user. Then, using this wireless communication system, the secondary user performs cognitive wireless communication or the like on the basis of the information received from the transmission means of the cluster head equipment.
摘要翻译： 公开了即使多个网络共存也能够避免干扰的无线通信系统等。 无线通信系统包括主用户，群集头设备和次用户。 集群头设备用于向包含上述主用户的集群区域提供局域网。 此外，集群头设备包括：获取装置，其获取关于主用户的一个或两个信息以及关于主信号的信息等; 以及向第二用户发送信息的发送装置。 然后，使用该无线通信系统，次要用户根据从簇头设备的发送装置接收到的信息进行认知无线通信等。
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9.发明授权Method for adjusting channels in cognitive wireless communication, and cognitive wireless communication system capable of implementing the method 有权在认知无线通信中调整信道的方法，以及能够实现该方法的认知无线通信系统公开(公告)号：US08849338B2
公开(公告)日：2014-09-30
申请号：US13384453
申请日：2010-07-16
CPC分类号： H04W16/14 , H04W72/082
摘要： There is disclosed a channel adjusting method capable of suppressing the occurrence of interference between a cognitive pilot channel (CPC) and an auxiliary control channel (ACS) in cognitive wireless communications. According to the channel adjusting method for use in cognitive wireless communications, initially, a connection using a cognitive pilot channel (CPC) is set up. Thereafter, it is determined whether or not a spectrum sensing channel (ACS) is to be utilized. If yes, it is then determined whether or not any interference occurs between the spectrum sensing channel (ACS) and the set-up cognitive pilot channel (CPC). This allows an adjustment to be performed such that no interference occurs between the cognitive pilot channel (CPC) and the spectrum sensing channel (ACS).
摘要翻译： 公开了能够抑制认知无线通信中的认知导频信道（CPC）与辅助控制信道（ACS）之间的干扰的发生的信道调整方法。 根据用于认知无线通信的信道调整方法，首先建立了使用认知导频信道（CPC）的连接。 此后，确定是否要使用频谱感测通道（ACS）。 如果是，则确定在频谱感测信道（ACS）和建立认知导频信道（CPC）之间是否发生任何干扰。 这允许执行调整，使得在认知导频信道（CPC）和频谱感测信道（ACS）之间不发生干扰。
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公开(公告)号：US08845955B2
公开(公告)日：2014-09-30
申请号：US13376946
申请日：2010-06-08
IPC分类号： C21D1/74 , H05B6/10 , C21D9/00 , F27B5/14 , H05B6/36 , F27B5/04 , F27D15/02 , C21D1/62 , F27B5/02 , C22F1/10 , H05B6/44 , F27D9/00 , C21D1/40 , F27B5/12 , C22F1/00
CPC分类号： F27B5/02 , C21D1/40 , C21D1/62 , C21D9/0018 , C21D9/0062 , C22F1/002 , C22F1/10 , F27B5/04 , F27B5/12 , F27B5/14 , F27D9/00 , F27D15/02 , H05B6/101 , H05B6/36 , H05B6/44 , Y02P10/253
摘要： A heating section 20 having heating elements using carbon which generates heat when a high-frequency electric current is fed to a coil whose pitch can be adjusted as desired is arranged in a heating chamber 10. A cooling chamber 80 configured to cool metal is disposed below the heating chamber 10 in communication with the heating chamber 10 via a connection section 60. A water-cooled vertically movable shaft 90 which is capable of supporting the metal to be heat-treated and entering the heating chamber 10 is disposed so as to penetrate through the bottom portion of the cooling chamber 80. A gas introducing pipe 81 configured to introduce gas for cooling heated metal to be heat-treated supported by the water-cooled vertically movable shaft 90 and moved from the heating chamber 10 to the cooling chamber 80 is disposed in the cooling chamber 80.
摘要翻译： 在加热室10内设置加热部20，该加热部20具有使用碳的发热元件，当将高频电流供给到可以根据需要进行调整的线圈的线圈时，产生热量。在冷却室80内配置冷却金属 加热室10经由连接部60与加热室10连通。能够支撑待热处理并进入加热室10的金属的水冷可升降轴90被设置成穿透 冷却室80的底部。气体导入管81，被配置为引导用于冷却由水冷可升降轴90支撑并被从加热室10移动到冷却室80的受热处理的加热金属的气体， 设置在冷却室80中。
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