公开(公告)号：US20100098518A1

公开(公告)日：2010-04-22

申请号：US12254517

申请日：2008-10-20

申请人： Hung T. Nguyen ,  George Tzeng ,  Daniel I. Handjojo ,  Lawrence T. Nguyen ,  Jonathan Cerezo

发明人： Hung T. Nguyen ,  George Tzeng ,  Daniel I. Handjojo ,  Lawrence T. Nguyen ,  Jonathan Cerezo

IPC分类号： H01L21/67

CPC分类号： H01L21/67201 ,  H01L21/67126

摘要： A load lock chamber sized for a large area substrate is provided. The load lock chamber includes a housing comprising a door and a body having at least two sealable ports, a movable door associated with at least one of the sealable ports, and a door actuation assembly coupled between the door and the housing. The door actuation assembly further includes a pair of first actuators coupled to the door for moving the door in a first direction, and a pair of second actuators for moving the door in a second direction that is orthogonal to the first direction.

摘要翻译： 提供了一种用于大面积基板的负载锁定室。 所述装载锁定室包括壳体，所述壳体包括具有至少两个可密封端口的门和主体，与所述可密封端口中的至少一个相关联的活动门以及联接在所述门和所述壳体之间的门致动组件。 门致动组件还包括耦合到门的一对第一致动器，用于沿第一方向移动门;以及一对第二致动器，用于沿与第一方向正交的第二方向移动门。