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公开(公告)号：US3301637A
公开(公告)日：1967-01-31
申请号：US24770562
申请日：1962-12-27
Applicant: IBM
Inventor： KUCZA JOSEPH A , MOUNT KISCO , GERALD MANDEL
CPC classification number: C01B25/06 , C23C16/301 , H01L21/00 , Y10S148/049 , Y10S148/065 , Y10S148/072
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