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公开(公告)号：US3525013A
公开(公告)日：1970-08-18
申请号：US3525013D
申请日：1968-07-26
Applicant: IBM
Inventor： PELTON JAY C JR , SENGER RICHARD C
IPC: C23C14/22 , H01J27/22 , H01J37/305 , H01J3/18 , H01J37/08
CPC classification number: C23C14/221 , H01J27/22 , H01J37/305 , H01J37/3053
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