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公开(公告)号：US3530055A
公开(公告)日：1970-09-22
申请号：US3530055D
申请日：1968-08-26
Applicant: IBM
Inventor： MAISSEL LEON I , SCHAIBLE PAUL M
CPC classification number: C23C14/024 , C23C14/0036 , C23C14/14 , H01J37/34
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