公开(公告)号：US20150041667A1

公开(公告)日：2015-02-12

申请号：US14397478

申请日：2013-04-16

Applicant: INDIAN INSTITUTE OF TECHNOLOGY KANPUR

Inventor： Sudeep Bhattacharjee ,  Samit Paul

IPC: G01T1/29

CPC classification number: G01T1/2921 ,  H01J37/244 ,  H01J37/30 ,  H01J2237/24542

Abstract: An apparatus for characterizing a focused charged beam is provided. The apparatus includes a plurality of parallel conducting channels and at least one current sensing unit configured to measure current across each of the plurality of parallel conducting channels.

Abstract translation: 提供了一种用于表征聚焦带电束的装置。 该装置包括多个平行导电通道和至少一个电流检测单元，其配置成测量横跨多个平行导电通道中的每一个的电流。

公开(公告)号：US09733366B2

公开(公告)日：2017-08-15

申请号：US14397478

申请日：2013-04-16

Applicant: INDIAN INSTITUTE OF TECHNOLOGY KANPUR

Inventor： Sudeep Bhattacharjee ,  Samit Paul

IPC: G01T1/29 ,  H01J37/244 ,  H01J37/30

CPC classification number: G01T1/2921 ,  H01J37/244 ,  H01J37/30 ,  H01J2237/24542

Abstract: An apparatus for characterizing a focused charged beam is provided. The apparatus includes a plurality of parallel conducting channels and at least one current sensing unit configured to measure current across each of the plurality of parallel conducting channels.