公开(公告)号：US20230136503A1

公开(公告)日：2023-05-04

申请号：US17853351

申请日：2022-06-29

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Feng-Sheng KAO ,  Tzu-Yu LIU ,  Cheng-Hsuan LIN ,  Chih-Ying YEN

IPC: G01N21/75 ,  G01N21/17

Abstract: A method for monitoring and controlling multi-phase condition of reactant in manufacturing process is provided. The monitoring and controlling method includes the following steps. A plurality of clusters of monitoring images is captured corresponding to a plurality of process reaction time points in a plurality of observation regions. According to the clusters of the monitoring images, a plurality of image index features is extracted. According to the image index features, a plurality of phase modes corresponding to the observation regions is determined. According to the image index features, a cluster of generation characteristics of the reactant corresponding to the phase modes is determined. According to the cluster of generation characteristics, an adjustment of the manufacturing process is performed.