SYSTEM AND METHOD FOR MONITORING AND CONTROLLING MULTI-PHASE CONDITION OF REACTANTS IN MANUFACTURING PROCESS

    公开(公告)号:US20230136503A1

    公开(公告)日:2023-05-04

    申请号:US17853351

    申请日:2022-06-29

    IPC分类号: G01N21/75 G01N21/17

    摘要: A method for monitoring and controlling multi-phase condition of reactant in manufacturing process is provided. The monitoring and controlling method includes the following steps. A plurality of clusters of monitoring images is captured corresponding to a plurality of process reaction time points in a plurality of observation regions. According to the clusters of the monitoring images, a plurality of image index features is extracted. According to the image index features, a plurality of phase modes corresponding to the observation regions is determined. According to the image index features, a cluster of generation characteristics of the reactant corresponding to the phase modes is determined. According to the cluster of generation characteristics, an adjustment of the manufacturing process is performed.