公开(公告)号：US10996075B2

公开(公告)日：2021-05-04

申请号：US16221409

申请日：2018-12-14

申请人： INVENSENSE, INC.

发明人： Sriraman Dakshinamurthy ,  Doruk Senkal ,  Ali Shirvani ,  Ronak Chetan Desai ,  Carlo Pinna

IPC分类号： G01C25/00 ,  B81B3/00 ,  B81B7/02 ,  G01C19/56

摘要： Microelectromechanical systems (MEMS) gyroscopes and related measurement and calibration techniques are described. Various embodiments facilitate phase estimation of an ideal phase for a demodulator mixer associated with an exemplary MEMS gyroscope using quadrature tuning, which can improve offset performance over life time for exemplary MEMS gyroscopes. Exemplary embodiments can comprise adjusting a quadrature component of an exemplary MEMS gyroscope sense signal, measuring a change in offset of the exemplary MEMS gyroscope at an output of a demodulator mixer associated with the exemplary MEMS gyroscope, estimating a phase error between the quadrature component and a demodulation phase angle of the demodulator mixer based on the change in the offset, and periodically adjusting the demodulation phase angle of the demodulator mixer based on the phase error.

公开(公告)号：US20190186950A1

公开(公告)日：2019-06-20

申请号：US16221409

申请日：2018-12-14

申请人： INVENSENSE, INC.

发明人： Sriraman Dakshinamurthy ,  Doruk Senkal ,  Ali Shirvani ,  Ronak Chetan Desai ,  Carlo Pinna

IPC分类号： G01C25/00 ,  B81B7/02 ,  B81B3/00

CPC分类号： G01C25/005 ,  B81B3/0018 ,  B81B7/02 ,  B81B2201/0242

摘要： Microelectromechanical systems (MEMS) gyroscopes and related measurement and calibration techniques are described. Various embodiments facilitate phase estimation of an ideal phase for a demodulator mixer associated with an exemplary MEMS gyroscope using quadrature tuning, which can improve offset performance over life time for exemplary MEMS gyroscopes. Exemplary embodiments can comprise adjusting a quadrature component of an exemplary MEMS gyroscope sense signal, measuring a change in offset of the exemplary MEMS gyroscope at an output of a demodulator mixer associated with the exemplary MEMS gyroscope, estimating a phase error between the quadrature component and a demodulation phase angle of the demodulator mixer based on the change in the offset, and periodically adjusting the demodulation phase angle of the demodulator mixer based on the phase error.

公开(公告)号：US20210262796A1

公开(公告)日：2021-08-26

申请号：US17317787

申请日：2021-05-11

申请人： INVENSENSE, INC.

发明人： Sriraman Dakshinamurthy ,  Carlo Pinna ,  Ronak Chetan Desai

IPC分类号： G01C19/5776

摘要： Microelectromechanical systems (MEMS) gyroscopes and related sense frequency tracking techniques are described. Various embodiments facilitate sense frequency tracking and offset and/or sensitivity change compensation. Exemplary embodiments can comprise receiving a sense signal at an output of a MEMS gyroscope and determining a sense resonant frequency of the sense signal. In addition, exemplary methods can comprise generating an input sine wave with a frequency of the sense resonant frequency of the sense signal injecting the input sine wave into the MEMS gyroscope, to facilitate sense frequency tracking.

公开(公告)号：US11466986B2

公开(公告)日：2022-10-11

申请号：US16221415

申请日：2018-12-14

申请人： INVENSENSE, INC.

发明人： Sriraman Dakshinamurthy ,  Carlo Pinna ,  Ronak Chetan Desai

IPC分类号： G01C19/5776

摘要： Microelectromechanical systems (MEMS) gyroscopes and related sense frequency tracking techniques are described. Various embodiments facilitate sense frequency tracking and offset and/or sensitivity change compensation. Exemplary embodiments can comprise receiving a sense signal at an output of a MEMS gyroscope and determining a sense resonant frequency of the sense signal. In addition, exemplary methods can comprise generating an input sine wave with a frequency of the sense resonant frequency of the sense signal injecting the input sine wave into the MEMS gyroscope, to facilitate sense frequency tracking.

公开(公告)号：US20190186917A1

公开(公告)日：2019-06-20

申请号：US16221415

申请日：2018-12-14

申请人： INVENSENSE, INC.

发明人： Sriraman Dakshinamurthy ,  Carlo Pinna ,  Ronak Chetan Desai

IPC分类号： G01C19/5776

CPC分类号： G01C19/5776

摘要： Microelectromechanical systems (MEMS) gyroscopes and related sense frequency tracking techniques are described. Various embodiments facilitate sense frequency tracking and offset and/or sensitivity change compensation. Exemplary embodiments can comprise receiving a sense signal at an output of a MEMS gyroscope and determining a sense resonant frequency of the sense signal. In addition, exemplary methods can comprise generating an input sine wave with a frequency of the sense resonant frequency of the sense signal injecting the input sine wave into the MEMS gyroscope, to facilitate sense frequency tracking.