公开(公告)号：US20170052102A1

公开(公告)日：2017-02-23

申请号：US14953424

申请日：2015-11-30

Applicant: Industrial Technology Research Institute

Inventor： Chia-Wen Chiang ,  Cheng-Ta Ko ,  I-Hsing Lin

IPC: G01N15/06 ,  H01L21/304 ,  H01L21/306 ,  H01L21/768

CPC classification number: H01L21/30604 ,  G01N15/0606 ,  G01N29/022 ,  G01N29/036 ,  G01N2015/0046 ,  G01N2291/014 ,  G01N2291/02809

Abstract: In an embodiment, a miniaturize particulate matter detector includes a filter having a plurality of holes, and a concentration detector correspondingly disposed under the filter. The concentration detector has a detect area used for detecting a concentration of at least one miniaturize particulate matter. A manufacturing method of the filter is also provided.

Abstract translation: 在一个实施例中，小型化颗粒物质检测器包括具有多个孔的过滤器和相应地设置在过滤器下方的浓度检测器。 浓度检测器具有用于检测至少一种小型化颗粒物质的浓度的检测区域。 还提供了一种过滤器的制造方法。

公开(公告)号：US20170052103A1

公开(公告)日：2017-02-23

申请号：US15245199

申请日：2016-08-24

Applicant: Industrial Technology Research Institute

Inventor： Chia-Wen Chiang ,  Cheng-Ta Ko ,  I-Hsing Lin ,  Hsiang-Hung Chang ,  Wen-Chih Chen

IPC: G01N15/06

Abstract: A miniaturized particulate matter detector that includes a filter and a concentration detector is provided. The filter has a plurality of holes, and the concentration detector is correspondingly disposed under the filter. The concentration detector has a detected area used to detect a concentration of at least one miniaturized particulate matter. A manufacturing method of the filter is also provided.

Abstract translation: 提供一种包括过滤器和浓度检测器的微型颗粒物检测器。 过滤器具有多个孔，并且浓度检测器相应地设置在过滤器下方。 浓度检测器具有用于检测至少一种小型化颗粒物质的浓度的检测区域。 还提供了一种过滤器的制造方法。

公开(公告)号：US10121673B2

公开(公告)日：2018-11-06

申请号：US14953424

申请日：2015-11-30

Applicant: Industrial Technology Research Institute

Inventor： Chia-Wen Chiang ,  Cheng-Ta Ko ,  I-Hsing Lin

IPC: H01L21/306 ,  G01N29/02 ,  G01N29/036 ,  G01N15/00 ,  G01N15/06

Abstract: In an embodiment, a miniaturize particulate matter detector includes a filter having a plurality of holes, and a concentration detector correspondingly disposed under the filter. The concentration detector has a detect area used for detecting a concentration of at least one miniaturize particulate matter. A manufacturing method of the filter is also provided.

公开(公告)号：US10458893B2

公开(公告)日：2019-10-29

申请号：US15245199

申请日：2016-08-24

Applicant: Industrial Technology Research Institute

Inventor： Chia-Wen Chiang ,  Cheng-Ta Ko ,  I-Hsing Lin ,  Hsiang-Hung Chang ,  Wen-Chih Chen

IPC: G01N15/06 ,  G01N15/00

Abstract: A miniaturized particulate matter detector that includes a filter and a concentration detector is provided. The filter has a plurality of holes, and the concentration detector is correspondingly disposed under the filter. The concentration detector has a detected area used to detect a concentration of at least one miniaturized particulate matter. A manufacturing method of the filter is also provided.