公开(公告)号：US10955336B2

公开(公告)日：2021-03-23

申请号：US16105448

申请日：2018-08-20

Applicant: Innovative Micro Technology

Inventor： Christopher S. Gudeman ,  Jaquelin K. Spong

IPC: G01J3/26 ,  G01J3/42 ,  G01N21/3504 ,  G01N21/25 ,  G01N33/00 ,  G01N21/35 ,  G01N21/03 ,  G01J3/12

Abstract: Systems and methods for forming a compact gas sensor include a multilayer etalon as a wavelength discriminating element. The position of the etalon may be adjusted to tune its transmission profile. And embodiment directed to carbon dioxide detection is described.

公开(公告)号：US09372185B2

公开(公告)日：2016-06-21

申请号：US13987464

申请日：2013-07-29

Applicant: Owl biomedical, Inc. ,  Innovative Micro Technology

Inventor： John S Foster ,  Daryl W. Grummitt ,  Jaquelin K. Spong ,  Kimberley L. Turner ,  John C. Harley

IPC: G01N33/50 ,  B01L3/00 ,  C12M1/00

CPC classification number: G01N33/5005 ,  B01L3/502738 ,  B01L3/502761 ,  B01L2200/0652 ,  B01L2400/043 ,  B01L2400/0633 ,  C12M47/04

Abstract: A MEMS-based system and a method are described for separating a target particle from the remainder of a fluid stream. The system makes use of a unique, microfabricated movable structure formed on a substrate, which moves in a rotary fashion about one or more fixed points, which are all located on one side of the axis of motion. The movable structure is actuated by a separate force-generating apparatus, which is entirely separate from the movable structure formed on its substrate. This allows the movable structure to be entirely submerged in the sample fluid.

Abstract translation: 描述了基于MEMS的系统和方法，用于将目标颗粒与流体流的其余部分分离。 该系统利用形成在基板上的独特的微加工可移动结构，其以旋转方式围绕一个或多个固定点移动，所述固定点都位于运动轴的一侧。 可移动结构由独立的力产生装置致动，该装置与其基板上形成的可移动结构完全分开。 这允许可移动结构完全浸没在样品流体中。

公开(公告)号：US20150031120A1

公开(公告)日：2015-01-29

申请号：US13987464

申请日：2013-07-29

Applicant: Innovative Micro Technology

Inventor： John S. Foster ,  Daryl W. Grummitt ,  John C. Harley ,  Jaquelin K. Spong ,  Kimberly L. Turner

IPC: G01N33/50

CPC classification number: G01N33/5005 ,  B01L3/502738 ,  B01L3/502761 ,  B01L2200/0652 ,  B01L2400/043 ,  B01L2400/0633 ,  C12M47/04

Abstract: A MEMS-based system and a method are described for separating a target particle from the remainder of a fluid stream. The system makes use of a unique, microfabricated movable structure formed on a substrate, which moves in a rotary fashion about one or more fixed points, which are all located on one side of the axis of motion. The movable structure is actuated by a separate force-generating apparatus, which is entirely separate from the movable structure formed on its substrate. This allows the movable structure to be entirely submerged in the sample fluid.

Abstract translation: 描述了基于MEMS的系统和方法，用于将目标颗粒与流体流的其余部分分离。 该系统利用形成在基板上的独特的微加工可移动结构，其以旋转方式围绕一个或多个固定点移动，所述固定点都位于运动轴的一侧。 可移动结构由独立的力产生装置致动，该装置与其基板上形成的可移动结构完全分开。 这允许可移动结构完全浸没在样品流体中。