公开(公告)号：US20250006652A1

公开(公告)日：2025-01-02

申请号：US18346098

申请日：2023-06-30

Applicant: Intel Corporation

Inventor： Omkar G. Karhade ,  Nitin A. Deshpande ,  Francisco Maya ,  Bhaskar Jyoti Krishnatreya ,  Tan Nguyen ,  Siyan Dong ,  Alveera Gill ,  Keith E. Zawadzki

IPC: H01L23/544 ,  H01L23/00 ,  H01L25/065

Abstract: An apparatus comprising a first integrated circuit device, the first integrated circuit device comprising a first layer with an area comprising metallization and metal-free slits; and a fiducial in a second layer above the first layer, the fiducial formed over the area comprising the metallization and metal-free slits.

公开(公告)号：US20250006653A1

公开(公告)日：2025-01-02

申请号：US18346108

申请日：2023-06-30

Applicant: Intel Corporation

Inventor： Omkar G. Karhade ,  Nitin A. Deshpande ,  Bhaskar Jyoti Krishnatreya ,  Francisco Maya ,  Siyan Dong ,  Alveera Gill ,  Tan Nguyen ,  Keith E. Zawadzki

IPC: H01L23/544 ,  H01L23/00 ,  H01L25/065

Abstract: An apparatus comprising an integrated circuit device comprising a fiducial area of a first layer, the fiducial area comprising a metal area and a metal free area; and a plurality of zones that are metal free in multiple layers adjacent to the first layer, wherein the zones are defined by a footprint based on the fiducial area of the first layer and a second fiducial area of a second integrated circuit device, the footprint comprising multiple slits.

公开(公告)号：US20250006651A1

公开(公告)日：2025-01-02

申请号：US18345820

申请日：2023-06-30

Applicant: Intel Corporation

Inventor： Omkar G. Karhade ,  Nitin A. Deshpande ,  Francisco Maya ,  Khant Minn ,  Suresh V. Pothukuchi ,  Arnab Sarkar ,  Mohit Bhatia ,  Bhaskar Jyoti Krishnatreya ,  Siyan Dong

IPC: H01L23/544 ,  H01L23/00

Abstract: An apparatus comprising a first integrated circuit device, the first integrated circuit device comprising a fiducial having a length size greater than a width size of the fiducial, wherein the fiducial comprises at least one first area and at least one second area, wherein the at least one first area is to stop light from a light source and the at least one second area is to pass light from the light source during a determination of an alignment between the first integrated circuit device and a second integrated circuit device.