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公开(公告)号:US20130249052A1
公开(公告)日:2013-09-26
申请号:US13428004
申请日:2012-03-23
申请人: Jennifer E. Appleyard , John E. Barth, JR. , John B. DeForge , Herbert L. Ho , Babar A. Khan , Kirk D. Peterson , Andrew A. Turner
发明人: Jennifer E. Appleyard , John E. Barth, JR. , John B. DeForge , Herbert L. Ho , Babar A. Khan , Kirk D. Peterson , Andrew A. Turner
CPC分类号: H01L28/40 , H01L21/76898 , H01L27/0805 , H01L28/91 , H01L29/945
摘要: A semiconductor structure and method of fabricating the same are disclosed. In an embodiment, the structure includes a first substrate having a buried plate or plates in the substrate. Each buried plate includes at least one buried plate contact, and a plurality of deep trench capacitors disposed about the at least one buried plate contact. A first oxide layer is disposed over the first substrate. The deep trench capacitors and buried plate contacts in the first substrate may be accessed for use in a variety of memory and decoupling applications.
摘要翻译: 公开了半导体结构及其制造方法。 在一个实施例中,该结构包括在衬底中具有掩埋板或板的第一衬底。 每个掩埋板包括至少一个掩埋板触点和围绕至少一个掩埋板触点设置的多个深沟槽电容器。 第一氧化物层设置在第一衬底上。 可以访问第一衬底中的深沟槽电容器和掩埋板触点,以用于各种存储器和去耦应用。
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公开(公告)号:US08586444B2
公开(公告)日:2013-11-19
申请号:US13428004
申请日:2012-03-23
申请人: Jennifer E. Appleyard , John E. Barth, Jr. , John B. DeForge , Herbert L. Ho , Babar A. Khan , Kirk D. Peterson , Andrew A. Turner
发明人: Jennifer E. Appleyard , John E. Barth, Jr. , John B. DeForge , Herbert L. Ho , Babar A. Khan , Kirk D. Peterson , Andrew A. Turner
IPC分类号: H01L21/20
CPC分类号: H01L28/40 , H01L21/76898 , H01L27/0805 , H01L28/91 , H01L29/945
摘要: A semiconductor structure and method of fabricating the same are disclosed. In an embodiment, the structure includes a first substrate having a buried plate or plates in the substrate. Each buried plate includes at least one buried plate contact, and a plurality of deep trench capacitors disposed about the at least one buried plate contact. A first oxide layer is disposed over the first substrate. The deep trench capacitors and buried plate contacts in the first substrate may be accessed for use in a variety of memory and decoupling applications.
摘要翻译: 公开了半导体结构及其制造方法。 在一个实施例中,该结构包括在衬底中具有掩埋板或板的第一衬底。 每个掩埋板包括至少一个掩埋板触点和围绕至少一个掩埋板触点设置的多个深沟槽电容器。 第一氧化物层设置在第一衬底上。 可以访问第一衬底中的深沟槽电容器和掩埋板触点,以用于各种存储器和去耦应用。
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3.
公开(公告)号:US07058531B2
公开(公告)日:2006-06-06
申请号:US10708916
申请日:2004-03-31
申请人: Jennifer E. Appleyard , Troy Carlson , Joseph M. Forbes , Dean G. Percy , Norman J. Rohrer , William J. Tanona
发明人: Jennifer E. Appleyard , Troy Carlson , Joseph M. Forbes , Dean G. Percy , Norman J. Rohrer , William J. Tanona
IPC分类号: G01K15/00
CPC分类号: G01K7/00
摘要: A method is disclosed of temperature compensation for measurement of a temperature sensitive parameter of semiconductor IC chips, particularly temperature compensation for a maximum frequency measurement (Fmax) and speed sort/categorization of semiconductor IC chips. The method includes determining a change of a temperature sensitive parameter of the chip with temperature; measuring the temperature sensitive parameter of the chip during testing of the chip; measuring the chip temperature directly during or following the measurement of the temperature sensitive parameter; and determining an adjusted temperature sensitive parameter of the chip based upon the measured temperature sensitive parameter of the chip during testing, the measured chip temperature, and the determined change of the temperature sensitive parameter of the chip with temperature.
摘要翻译: 公开了用于测量半导体IC芯片的温度敏感参数的温度补偿的方法,特别是用于最大频率测量(Fmax)的温度补偿和半导体IC芯片的速度分类/分类。 该方法包括用温度确定芯片的温度敏感参数的变化; 在芯片测试期间测量芯片的温度敏感参数; 在温度敏感参数测量期间或之后直接测量芯片温度; 以及基于所测量的芯片在测试期间的温度敏感参数,测量的芯片温度以及所确定的具有温度的芯片的温度敏感参数的变化来确定芯片的调节的温度敏感参数。
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公开(公告)号:US06982591B2
公开(公告)日:2006-01-03
申请号:US10731298
申请日:2003-12-09
CPC分类号: G05F3/242
摘要: A method and circuit for tunneling leakage current compensation, the method including: forcing a current of known value through a tunneling current leakage monitor device to provide a voltage signal; and regulating an on-chip power supply of the integrated circuit chip based on the voltage signal.
摘要翻译: 一种用于隧道泄漏电流补偿的方法和电路,所述方法包括:通过隧道电流泄漏监测装置强制已知值的电流以提供电压信号; 以及基于所述电压信号来调节所述集成电路芯片的片上电源。
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