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公开(公告)号：US20090212018A1
公开(公告)日：2009-08-27
申请号：US12330028
申请日：2008-12-08
Applicant: Josef MATHUNI
Inventor： Josef MATHUNI
IPC: B44C1/22
CPC classification number: B81C99/0085 , B81C2201/032 , H01J37/32357
Abstract: An apparatus and the use of such an apparatus and method for producing microcomponents with component structures are presented which are generated in a process chamber on a substrate according to the LIGA method for example and are stripped from the enclosing photoresist with the help of a cooled remote plasma source.
Abstract translation: 本发明提供了一种用于制造具有部件结构的微型部件的这种装置和方法的使用方法，其在例如基于LIGA方法的基板上的处理室中产生，并且借助于冷却的远程 等离子体源
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公开(公告)号：US20120325264A1
公开(公告)日：2012-12-27
申请号：US13599985
申请日：2012-08-30
Applicant: Josef MATHUNI
Inventor： Josef MATHUNI
CPC classification number: B81C99/0085 , B81C2201/032 , H01J37/32357
Abstract: An apparatus and the use of such an apparatus and method for producing microcomponents with component structures are presented which are generated in a process chamber on a substrate according to the LIGA method for example and are stripped from the enclosing photoresist with the help of a cooled remote plasma source.
Abstract translation: 本发明提供了一种用于制造具有部件结构的微型部件的这种装置和方法的使用方法，其在例如基于LIGA方法的基板上的处理室中产生，并且借助于冷却的远程 等离子体源
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