摘要:
A method for manufacturing a physical quantity detector is for a physical quantity detector including a flat frame-like base part, a flat plate-like moving part which is arranged inside the base part and has one end thereof connected to the base part via a joint part, and a physical quantity detection element laid on the base part and the moving part. The method includes: integrally forming the base part, the joint part, the moving part, and a connecting part which is provided on a free end side of the moving part and connects the base part and the moving part to each other; laying and fixing the physical quantity detection element on the base part and the moving part; and cutting off the connecting part.
摘要:
An acceleration sensor includes an acceleration detector, a first fixed portion and a second fixed portion, and first to fourth beams that connect the first fixed portion and the second fixed portion to the acceleration detector. A support substrate includes a fixed first substrate piece, a movable second substrate piece, and a hinge that connects the first substrate piece and the second substrate piece to each other. The longitudinal direction of the acceleration detector extends along the direction perpendicular to a detection axis thereof, and a central portion of the acceleration detector in the short-side direction overlaps with the hinge in the short-side direction. The length of the second substrate piece along the longitudinal direction of the hinge is greater than the length of the second substrate piece along the short-side direction of the hinge.
摘要:
An acceleration detector includes a base portion, a plate-like movable portion connected to the base portion via a joint portion, an acceleration detecting element laid over the base portion and the movable portion, and a supporting portion having a part extending along the movable portion from the base portion, as viewed in a plan view. A mass portion partly overlapping the supporting portion, as viewed in a plan view, is arranged on at least one of two main surfaces of the movable portion. The movable portion is displaceable about the joint portion as a fulcrum in a direction intersecting the main surface according to an acceleration applied in the direction intersecting the main surface. A space is provided between the mass portion and the supporting portion in an area where the mass portion and the supporting portion overlap each other.
摘要:
A wavelength splitting element for splitting a multiplexed light beam into separate wavelength bands and emitting the beams from separate emission ports including a first filter for splitting the multiplexed light beam into light beams in wavelength band λ1, which passes in a first direction, and wavelength bands λ2 and λ3, which reflects; a second filter, for splitting the reflected light into light beams in wavelength band λ3, which passes in a second direction, and wavelength band λ2, which reflects in a third direction; and a third filter, for passing the light beam in the wavelength band λ2. The first filter passes the light beam in the wavelength band λ2 reflected by the second filter and incident to the first filter again based on an incident angle, and the third filter passes only the light beam in the wavelength band λ2 that the first filter passes in the third direction.
摘要:
A wavelength splitting element for splitting a multiplexed light beam in wavelength bands λ1, λ2 and λ3 into light beams in separate wavelength bands and emitting the split light beams from separate emission ports, includes: a first filter for splitting the multiplexed light beam in the wavelength bands λ1, λ2 and λ3 into a light beam in the wavelength band λ1 that the first filter passes in a first direction and into a light beam in the wavelength bands λ2 and λ3 that the first filter reflects; a second filter, which is provided in the direction of the light beam in the wavelength bands λ2 and λ3 that has been reflected by the first filter, for splitting the light beam in wavelength bands λ2 and λ3 that has been reflected by the first filter into a light beam in the wavelength band λ3 that the second filter passes in a second direction and into a light beam in the wavelength band λ2 that the second filter reflects; and a third filter, which is provided in the direction of the light beam that has been reflected by the second filter, for passing the light beam in the wavelength band λ2 that has been reflected by the second filter. The first filter has characteristics to pass the light beam in the wavelength band λ2 that has been reflected by the second filter and incident to the second filter again in a third direction depending on an incident angle, and the third filter has characteristics to pass only the light beam in the wavelength band λ2 out of the light beams that the first filter passes in the third direction.