公开(公告)号：US20170294334A1

公开(公告)日：2017-10-12

申请号：US15479215

申请日：2017-04-04

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Hiroki SANEMASA ,  Daisuke SHIN ,  Hisaya INOUE ,  Ryosuke WATANABE

IPC: H01L21/687 ,  H01L21/677

CPC classification number: H01L21/68707 ,  H01L21/67715 ,  H01L21/6773 ,  H01L21/67766

Abstract: A conveyance system includes a conveyance chamber including a second side wall opposite to a first side wall in a depth direction of the conveyance chamber. A robot is disposed in the conveyance chamber. The robot includes a body, a first arm, a second aim, and a hand. The body is disposed between the second side wall and a reference position in the depth direction. A second leading end of the second arm is positioned between a restricted position and the reference position in the depth direction when a first inter-axis direction and a second inter-axis direction are substantially perpendicular to the first side wall. A controller is connected to the robot to control the robot to limit entrance into an area between the first side wall and the restricted position in the depth direction.

公开(公告)号：US20140140800A1

公开(公告)日：2014-05-22

申请号：US14080675

申请日：2013-11-14

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Hisaya INOUE ,  Satoshi SUEYOSHI

IPC: B25J18/04 ,  H01L21/677

CPC classification number: H01L21/67766 ,  B25J9/042 ,  B25J9/046 ,  B25J9/1045

Abstract: A robot arm includes an extensible/retractable arm unit, which is configured to extend and retract in a horizontal direction and provided with a pulley arranged in a tip end portion thereof, and a robot hand rotatably connected to the tip end portion of the extensible/retractable arm unit through the pulley. The robot arm further includes a belt drive device including one or more drive power sources, which are arranged close to the robot hand and configured to directly drive a belt wound around the pulley.

Abstract translation: 机器人手臂包括可伸缩臂单元，其构造成在水平方向上延伸和缩回，并且设置有设置在其末端部分中的滑轮，以及机器人手可旋转地连接到可伸展/ 可伸缩臂单元通过滑轮。 机器人手臂进一步包括皮带驱动装置，该皮带驱动装置包括一个或多个驱动力源，它们靠近机器人手并且构造成直接驱动缠绕在滑轮周围的皮带。