公开(公告)号：US20130209200A1

公开(公告)日：2013-08-15

申请号：US13726614

申请日：2012-12-26

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Masatoshi FURUICHI ,  Kazunori HINO ,  Daisuke SHIN

IPC: H01L21/677

CPC classification number: H01L21/67739 ,  H01L21/67742 ,  H01L21/67766

Abstract: A carrier device according to an aspect of an embodiment includes a carrier chamber, a robot that is placed near one longitudinal-side wall in the carrier chamber, and a linear moving mechanism that has a track by which the robot is linearly moved in the longitudinal direction of the carrier chamber. The arm of the robot is defined to a length by which the arm does not interfere with the other longitudinal-side wall even if the arm is rotated around an arm spindle. The track of the linear moving mechanism has a length by which the leading end of the hand perpendicular to the track reaches a predetermined position in a connecting hole located at an end among connecting holes provided in the longitudinal-side wall.

Abstract translation: 根据实施例的一个方面的载体装置包括载体室，放置在载体室中的一个纵向侧壁附近的机器人，以及线性移动机构，其具有轨道，通过该轨道机器人在纵向上线性移动 载体室的方向。 机器人的臂被限定为即使臂围绕臂主轴旋转的臂也不会干扰另一纵向侧壁的长度。 线性移动机构的轨道具有垂直于轨道的手的前端到位于设置在纵向侧壁中的连接孔之间的连接孔中的预定位置的长度。

公开(公告)号：US20130195601A1

公开(公告)日：2013-08-01

申请号：US13742348

申请日：2013-01-16

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Daisuke SHIN ,  Yoshiki KIMURA

IPC: H01L21/677 ,  B25J9/02

CPC classification number: H01L21/677 ,  B25J9/02 ,  B25J9/042 ,  G05B2219/39082 ,  G05B2219/45032 ,  H01L21/67766 ,  H01L21/67772 ,  Y10S901/40 ,  Y10T29/53365 ,  Y10T29/5337 ,  Y10T29/53435

Abstract: A transfer system according to an embodiment includes a transfer room, a robot, a trajectory generator, a determination unit, and an output unit. The transfer room has an exclusive area defined by a predetermined distance. The robot has an arm unit that is equipped with a robot hand transferring a thin plate-like workpiece and that operates in horizontal directions. The robot is installed in the transfer room so that a minimum turning area of the arm unit overlaps with a part of the exclusive area. The transfer system generates a trajectory of the robot hand, then determines, based on the generated trajectory, whether a part of the arm unit is included in the exclusive area, and outputs a predetermined signal.

Abstract translation: 根据实施例的传送系统包括传送室，机器人，轨迹发生器，确定单元和输出单元。 转移室具有由预定距离限定的排他区域。 机器人具有臂单元，其具有传递薄板状工件并且在水平方向上操作的机器人手。 机器人安装在转移室中，使得臂单元的最小转动面积与专有区域的一部分重叠。 传送系统生成机器人手的轨迹，然后基于生成的轨迹来确定臂单元的一部分是否包括在专用区域中，并输出预定信号。

公开(公告)号：US20140350714A1

公开(公告)日：2014-11-27

申请号：US14285565

申请日：2014-05-22

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Yoshiki KIMURA ,  Daisuke SHIN

IPC: B25J13/08 ,  B65G47/90

CPC classification number: B65G47/90 ,  B25J9/042 ,  B25J9/1679 ,  G05B2219/40087 ,  G05B2219/45031 ,  H01L21/67265 ,  H01L21/67766 ,  Y10S901/02

Abstract: A substrate transfer robot includes a hand to approach a substrate storage on which a substrate is placed, and to hold the substrate. An arm moves the hand. A controller controls a position and orientation of the hand. When in plan view, a substrate holding center at a time when the hand is holding the substrate is adjacent to the substrate storage and is at an access start position at a predetermined distance from the substrate storage, the substrate holding center reaches a substrate placement position in the substrate storage with a hand center line inclined toward an access straight line and with the hand holding center overlapping the access straight line. The hand center line is oriented from a base to a distal end of the hand. The access straight line is perpendicular to a front surface of the substrate storage and associated with the hand approaching the substrate storage.

Abstract translation: 基板传送机器人包括接近其上放置基板的基板存储器并且保持基板的手。 手臂移动手。 控制器控制手的位置和方向。 当在平面图中，当手保持基板时的基板保持中心与基板存储器相邻，并且处于距离基板存储器预定距离的访问开始位置，基板保持中心到达基板放置位置 在具有朝向访问直线倾斜的手中心线并且手持中心与入口直线重叠的基板存储器中。 手中心线从手的基部到远端。 存取直线垂直于基板存储器的前表面并与靠近基板存储器的手相关联。

公开(公告)号：US20170294334A1

公开(公告)日：2017-10-12

申请号：US15479215

申请日：2017-04-04

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Hiroki SANEMASA ,  Daisuke SHIN ,  Hisaya INOUE ,  Ryosuke WATANABE

IPC: H01L21/687 ,  H01L21/677

CPC classification number: H01L21/68707 ,  H01L21/67715 ,  H01L21/6773 ,  H01L21/67766

Abstract: A conveyance system includes a conveyance chamber including a second side wall opposite to a first side wall in a depth direction of the conveyance chamber. A robot is disposed in the conveyance chamber. The robot includes a body, a first arm, a second aim, and a hand. The body is disposed between the second side wall and a reference position in the depth direction. A second leading end of the second arm is positioned between a restricted position and the reference position in the depth direction when a first inter-axis direction and a second inter-axis direction are substantially perpendicular to the first side wall. A controller is connected to the robot to control the robot to limit entrance into an area between the first side wall and the restricted position in the depth direction.

公开(公告)号：US20170106533A1

公开(公告)日：2017-04-20

申请号：US15291069

申请日：2016-10-12

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Takashi MINAMI ,  Daisuke SHIN

IPC: B25J9/16 ,  H01L21/677 ,  B25J9/04

CPC classification number: B25J9/163 ,  B25J9/042 ,  B25J11/0095 ,  B25J19/021 ,  H01L21/67706 ,  H01L21/6773 ,  H01L21/67766 ,  H01L21/67778 ,  Y10S901/03

Abstract: A transfer system includes a robot including a hand configured to transfer a substrate, a transfer chamber within which the robot is disposed, a plurality of substrate-storing cassettes disposed side by side on a sidewall of the transfer chamber in a plan view, and a robot control device configured to control an operation of the robot based on teaching information. The robot control device includes an operation controller configured to cause the robot to transfer the substrate to a storage position while slanting a hand centerline toward the robot away from a storage centerline with respect to a first cassette and while superimposing the hand centerline on the storage centerline with respect to a second cassette.

公开(公告)号：US20150008689A1

公开(公告)日：2015-01-08

申请号：US14324081

申请日：2014-07-04

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Daisuke SHIN ,  Machiko KAMIJO ,  Ryuji ANDO

IPC: B25J15/06

CPC classification number: B25J15/0616 ,  B25J15/0683 ,  H01L21/67742 ,  H01L21/67766 ,  H01L21/6838 ,  Y10S901/40

Abstract: A suction structure includes a pad and a fixing base. The pad includes a contact portion which makes contact with a target object to be sucked and which has a seal wall, and a major surface portion which is surrounded by the contact portion and which defines an inner space in conjunction with the seal wall as the contact portion makes contact with the target object. The fixing base includes a support portion configured to support the pad at a position offset from the center of the major surface portion of the pad, and a suction hole configured to bring the inner space into communication with a vacuum source.

Abstract translation: 抽吸结构包括垫和固定底座。 焊盘包括与要被吸收的目标物体接触并具有密封壁的接触部分和由接触部分包围并且与密封壁一起形成内部空间的主表面部分，作为接触 部分与目标物体接触。 固定基部包括：支撑部，其被配置为将垫支撑在偏离垫的主表面部分的中心的位置;以及吸入孔，其构造成使内部空间与真空源连通。