公开(公告)号：US20240383157A1

公开(公告)日：2024-11-21

申请号：US18647509

申请日：2024-04-26

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Koji NAGAFUCHI ,  Makoto TARUNO ,  Hiroki SANEMASA ,  Takashi MINAMI

IPC: B25J15/06 ,  B25J11/00 ,  B25J13/08 ,  B25J15/00

Abstract: A substrate transfer robot includes: a hand that supports a substrate; and an arm that operates the hand. The hand includes an adsorption holder that holds a back surface of the substrate by adsorption, and is stretchable to lower a height position of an upper end thereof, a friction holder that holds the back surface by friction in a state where the adsorption holder supporting the substrate contracts, and a non-contact holder that holds the back surface in a non-contact manner, in a state where the adsorption holder and the friction holder hold the back surface.

公开(公告)号：US20240109200A1

公开(公告)日：2024-04-04

申请号：US18371784

申请日：2023-09-22

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Koji NAGAFUCHI ,  Keisuke HIGASHI ,  Takashi MINAMI

IPC: B25J11/00 ,  B25J9/16

CPC classification number: B25J11/0095 ,  B25J9/1687 ,  B25J9/044

Abstract: A transfer system includes a robot that loads and unloads a substrate to and from a cassette that accommodates a plurality of substrates in multiple stages; and a controller configured to control an operation of the robot. The robot includes: a hand that transfers the substrate, a horizontal movement mechanism that moves the hand in a width direction of the cassette in a front side of the cassette, and a lift mechanism that moves up and down the hand in the front side of the cassette. The hand includes a reflective sensor on a distal end side thereof facing the cassette to detect an object in the cassette. The controller operates the horizontal movement mechanism causing the reflective sensor to perform a horizontal scanning such that the reflective sensor facing the substrate scans in the width direction of the substrate accommodated in the cassette.

公开(公告)号：US20240278433A1

公开(公告)日：2024-08-22

申请号：US18440146

申请日：2024-02-13

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Koji NAGAFUCHI ,  Hiroki SANEMASA ,  Takashi MINAMI

IPC: B25J9/16

CPC classification number: B25J9/1692

Abstract: A robot system includes a robot that supports and transfers a substrate W using a hand, a target capable of being placed instead of the substrate, a sensor provided on the hand to detect the target in a non-contact manner while facing the target a first detector that detects a position of the target in the first direction based on a detection result of the sensor facing the target long the first direction and a position of the sensor, and a second detector that controls the robot to move the sensor along a second direction perpendicular to the first direction, and detects a position of the target in the second direction based on a change in the detection result of the sensor due to movement along the second direction and the position of the sensor.

公开(公告)号：US20240178043A1

公开(公告)日：2024-05-30

申请号：US18510341

申请日：2023-11-15

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Hiroki SANEMASA ,  Koji NAGAFUCHI ,  Takashi MINAMI

IPC: H01L21/687 ,  B25J11/00 ,  B25J19/02 ,  H01L21/68

CPC classification number: H01L21/68707 ,  B25J11/0095 ,  B25J19/02 ,  H01L21/68

Abstract: A substrate transfer robot system teaches a transfer position of a substrate to a substrate transfer robot that transfers the substrate. The substrate transfer robot includes: a hand that transfers the substrate; a movement mechanism that moves the hand in horizontal and vertical directions; and first and second sensors that are provided on the hand and radiates a scanning line in the horizontal and vertical directions, respectively. The substrate transfer robot system includes: a controller that controls the hand and the movement mechanism; and a first portion to be detected and a second portion to be detected. The controller operates the hand to detect the first portion by the first and second sensors and detect the second portion by the second sensor, and calculates and stores the transfer position based on position information of the hand when the first and second portions are detected.