公开(公告)号：US20240109197A1

公开(公告)日：2024-04-04

申请号：US18371821

申请日：2023-09-22

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Makoto TARUNO

IPC: B25J9/16 ,  B25J11/00 ,  B25J13/08

CPC classification number: B25J9/1687 ,  B25J9/1638 ,  B25J11/0095 ,  B25J13/081 ,  B25J13/088

Abstract: A transfer system includes a robot and a controller that controls an operation of the robot. The robot includes a hand that transfers a substrate, and a lift mechanism that moves up and down the hand. The hand includes a sensor that detects a distance to a lower surface of the substrate. The controller includes a storage unit, a detection unit, and a calculation unit. The storage unit stores placement information including a placement height at a placement position of the substrate. The detection unit detects a separation height at which the substrate is separated from the hand when the hand is moved down from the placement height. The calculation unit calculates a deflection amount of the substrate based on a difference between the placement height and the separation height.

公开(公告)号：US20240383157A1

公开(公告)日：2024-11-21

申请号：US18647509

申请日：2024-04-26

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Koji NAGAFUCHI ,  Makoto TARUNO ,  Hiroki SANEMASA ,  Takashi MINAMI

IPC: B25J15/06 ,  B25J11/00 ,  B25J13/08 ,  B25J15/00

Abstract: A substrate transfer robot includes: a hand that supports a substrate; and an arm that operates the hand. The hand includes an adsorption holder that holds a back surface of the substrate by adsorption, and is stretchable to lower a height position of an upper end thereof, a friction holder that holds the back surface by friction in a state where the adsorption holder supporting the substrate contracts, and a non-contact holder that holds the back surface in a non-contact manner, in a state where the adsorption holder and the friction holder hold the back surface.

公开(公告)号：US20140140801A1

公开(公告)日：2014-05-22

申请号：US14050360

申请日：2013-10-10

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Satoshi SUEYOSHI ,  Makoto TARUNO

IPC: B25J11/00

CPC classification number: B25J11/0095 ,  B25J9/042 ,  B25J9/046 ,  B25J19/021

Abstract: A substrate transfer robot includes an extensible/retractable arm unit, a robot hand and a sensor unit. The extensible/retractable arm unit is configured to extend and retract in a horizontal direction. The robot hand is provided with prongs for holding a substrate. The robot hand includes a base end portion rotatably connected to a tip end portion of the extensible/retractable arm unit. The sensor unit is arranged to be rotated by a rotating force of the robot hand. The sensor unit is configured to, when rotated, intersect a lateral end portion of the substrate held by the prongs when seen in a plan view and to detect a lateral end position of the substrate.

Abstract translation: 基板传送机器人包括可伸缩臂单元，机器人手和传感器单元。 可伸缩臂单元构造成在水平方向上延伸和缩回。 机器人手上设有用于固定基板的插脚。 机器人手包括可旋转地连接到可伸缩臂单元的末端部的基端部。 传感器单元被设置为通过机器人手的旋转力旋转。 传感器单元被构造成当在平面图中观察时旋转时与由叉头保持的基板的横向端部部分相交并且检测基板的横向端部位置。