公开(公告)号：US20220383470A1

公开(公告)日：2022-12-01

申请号：US17492321

申请日：2021-10-01

Applicant: KLA Corporation

Inventor： Abdurrahman Sezginer ,  Wei Zhao ,  Richard Wallingford ,  Grace Hsiu-Ling Chen ,  Xuzhao Liu ,  Ge Cong ,  Leon Yu ,  Kuljit Virk ,  Bosheng Zhang ,  Amrish Patel ,  Patrick McBride

IPC: G06T7/00 ,  H01L21/66

Abstract: A system includes a processing unit communicatively coupled to a detector array of an optical wafer characterization system. The processing unit is configured to perform one or more steps of a method or process including the steps of acquiring one or more target images of a target location on a wafer from the detector array, applying a de-noising filter to at least the one or more target images, determining one or more difference images from one or more reference images and the one or more target images, and up-sampling the one or more difference images to generate one or more up-sampled images. One or more wafer defects are detectable in the one or more difference images or the up-sampled images.