公开(公告)号：US20240013365A9

公开(公告)日：2024-01-11

申请号：US17671519

申请日：2022-02-14

Applicant: KLA Corporation

Inventor： Jing Zhang ,  Rajkumar Theagarajan ,  Yujie Dong ,  John Song ,  Kris Bhaskar

IPC: G06T7/00

CPC classification number: G06T7/0004 ,  G06T2207/20081 ,  G06T2207/20084 ,  G06T2207/30148

Abstract: Methods and systems for determining information for a specimen are provided. One system includes a computer subsystem and one or more components executed by the computer subsystem that include a deep learning (DL) model trained without labeled data (e.g., in an unsupervised or self-supervised manner) and configured to generate a reference for a specimen from one or more inputs that include at least a specimen image or data generated from the specimen image. The computer subsystem is configured for determining information for the specimen from the reference and at least the specimen image or the data generated from the specimen image.

公开(公告)号：US20230136110A1

公开(公告)日：2023-05-04

申请号：US17677887

申请日：2022-02-22

Applicant: KLA Corporation

Inventor： Rajkumar Theagarajan ,  Jing Zhang ,  Yujie Dong ,  Kris Bhaskar

IPC: G06N5/02 ,  G06N20/20 ,  G06V10/774

Abstract: Methods and systems for determining information for a specimen are provided. One system includes a computer subsystem and one or more components executed by the computer subsystem that include multiple deep learning (DL) models configured for determining information for a specimen based on output generated by the specimen with learning mode(s) of an imaging subsystem. The one or more components also include a knowledge distillation component configured for combining output generated by the multiple DL models. In addition, the one or more components include a final knowledge distilled DL model configured for determining information for the specimen or an additional specimen based on output generated for the specimen or the additional specimen with runtime mode(s) of the imaging subsystem. Before the final KD DL model determines the information, the knowledge distillation component is configured for supervised training of the final knowledge distilled DL model using the combined output.

公开(公告)号：US20250020598A1

公开(公告)日：2025-01-16

申请号：US18646704

申请日：2024-04-25

Applicant: KLA Corporation

Inventor： Rajkumar Theagarajan ,  Yujie Dong ,  Jing Zhang ,  Brian Duffy ,  Atiqur Rahman Chowdhury ,  Kris Bhaskar ,  Yang Li ,  Graham Jensen

IPC: G01N21/95 ,  G06T7/00

Abstract: Methods and systems for determining information for a specimen are provided. One system includes a computer subsystem and one or more components executed by the computer subsystem that include a setup deep learning (DL) model configured for separately performing defect detection for a specimen based on output generated for the specimen by each of two or more modes of an inspection system, respectively, and separately re-performing defect detection for the specimen based on masked output generated for each of the modes, respectively. The computer subsystem determines a difference between results of separately performing and separately re-performing the defect detections for each of the modes, respectively, and identifies a subset of the modes for which the difference is larger than other modes as candidate mode(s) for inspection of the specimen.

公开(公告)号：US20230260100A1

公开(公告)日：2023-08-17

申请号：US17671519

申请日：2022-02-14

Applicant: KLA Corporation

Inventor： Jing Zhang ,  Rajkumar Theagarajan ,  Yujie Dong ,  John Song ,  Kris Bhaskar

IPC: G06T7/00

CPC classification number: G06T7/0004 ,  G06T2207/20081 ,  G06T2207/20084 ,  G06T2207/30148

Abstract: Methods and systems for determining information for a specimen are provided. One system includes a computer subsystem and one or more components executed by the computer subsystem that include a deep learning (DL) model trained without labeled data (e.g., in an unsupervised or self-supervised manner) and configured to generate a reference for a specimen from one or more inputs that include at least a specimen image or data generated from the specimen image. The computer subsystem is configured for determining information for the specimen from the reference and at least the specimen image or the data generated from the specimen image.