公开(公告)号：US09239295B2

公开(公告)日：2016-01-19

申请号：US13857744

申请日：2013-04-05

Applicant: KLA-Tencor Corporation

Inventor： Xianzhao Peng ,  Mark Shi Wang ,  Grace Hsiu-Ling Chen

IPC: G01N21/88 ,  G01N21/21 ,  G01N21/95

CPC classification number: G01N21/8806 ,  G01N21/21 ,  G01N21/9501 ,  G01N2021/8848

Abstract: Methods and systems for variable polarization wafer inspection are provided. One system includes one or more polarizing components position in one or more paths of light scattered from a wafer and detected by one or more channels of an inspection system. The polarizing component(s) are configured to have detection polarization(s) that are selected from two or more polarization settings for the polarizing component(s).

Abstract translation: 提供了用于可变偏振晶片检查的方法和系统。 一个系统包括一个或多个偏振组件，位于从晶片散射的光的一个或多个路径中，并由检查系统的一个或多个通道检测。 偏振分量被配置为具有从偏振分量的两个或更多个偏振设置中选择的检测极化。

公开(公告)号：US20130265577A1

公开(公告)日：2013-10-10

申请号：US13857744

申请日：2013-04-05

Applicant: KLA-TENCOR CORPORATION

Inventor： Xianzhao Peng ,  Mark Shi Wang ,  Grace Hsiu-Ling Chen

IPC: G01N21/21

CPC classification number: G01N21/8806 ,  G01N21/21 ,  G01N21/9501 ,  G01N2021/8848

Abstract: Methods and systems for variable polarization wafer inspection are provided. One system includes one or more polarizing components position in one or more paths of light scattered from a wafer and detected by one or more channels of an inspection system. The polarizing component(s) are configured to have detection polarization(s) that are selected from two or more polarization settings for the polarizing component(s).

Abstract translation: 提供了用于可变偏振晶片检查的方法和系统。 一个系统包括一个或多个偏振组件，位于从晶片散射的光的一个或多个路径中，并由检查系统的一个或多个通道检测。 偏振分量被配置为具有从偏振分量的两个或更多个偏振设置中选择的检测极化。

公开(公告)号：US20140260640A1

公开(公告)日：2014-09-18

申请号：US13844576

申请日：2013-03-15

Applicant: KLA-Tencor Corporation

Inventor： Jamie Sullivan ,  Wenjian Cai ,  Yevgeniy Churin ,  Ralph Johnson ,  Meier Yitzhak Brender ,  Mark Shi Wang ,  Rex Runyon ,  Kai Cao

IPC: G01N29/24

CPC classification number: G01N29/2418 ,  G01N21/8806 ,  G01N21/9501 ,  G01N21/956 ,  G01N2291/2697

Abstract: A method of scanning a sample includes simultaneously forming a plurality of co-linear scans. Each scan is formed by a sweep of a spot by an acousto-optical device (AOD). The co-linear scans are separated by a predetermined spacing. A first plurality of swaths are formed by repeating the simultaneous forming of the plurality of co-linear scans in a direction perpendicular to the co-linear scans. The first plurality of swaths have an inter-swath spacing that is the same as the predetermined spacing. A second plurality of swaths can be formed adjacent to the first plurality of swaths. Forming the second plurality of swaths can be performed in an opposite direction to that of the first plurality of swaths or in a same direction. An inspection system can implement this method by including a diffractive optical element (DOE) path after a magnification changer.

Abstract translation: 扫描样本的方法同时形成多个共线扫描。 通过声光装置（AOD）的扫描形成每个扫描。 共线扫描以预定间隔分开。 通过在垂直于共线扫描的方向上重复同时形成多个共线扫描来形成第一多个条带。 第一多个条带具有与预定间隔相同的跨幅间距。 可以在第一多个条带附近形成第二多个条带。 形成第二多个条可以沿与第一多个条的方向相反的方向或在相同的方向上执行。 检查系统可以通过在放大倍率变换器之后包括衍射光学元件（DOE）路径来实现该方法。

公开(公告)号：US10194108B2

公开(公告)日：2019-01-29

申请号：US15806913

申请日：2017-11-08

Applicant: KLA-Tencor Corporation

Inventor： Yung-Ho Alex Chuang ,  John Fielden ,  David L. Brown ,  Jingjing Zhang ,  Keith Lyon ,  Mark Shi Wang

IPC: G01N21/00 ,  H04N5/3722 ,  G01N21/956

Abstract: Pixel aperture size adjustment in a linear sensor is achieved by applying more negative control voltages to central regions of the pixel's resistive control gate, and applying more positive control voltages to the gate's end portions. These control voltages cause the resistive control gate to generate an electric field that drives photoelectrons generated in a selected portion of the pixel's light sensitive region into a charge accumulation region for subsequent measurement, and drives photoelectrons generated in other portions of the pixel's light sensitive region away from the charge accumulation region for subsequent discard or simultaneous readout. A system utilizes optics to direct light received at different angles or locations from a sample into corresponding different portions of each pixel's light sensitive region. Multiple aperture control electrodes are selectively actuated to collect/measure light received from either narrow or wide ranges of angles or locations, thereby enabling rapid image data adjustment.

公开(公告)号：US09395340B2

公开(公告)日：2016-07-19

申请号：US13844576

申请日：2013-03-15

Applicant: KLA-Tencor Corporation

Inventor： Jamie Sullivan ,  Wenjian Cai ,  Yevgeniy Churin ,  Ralph Johnson ,  Meier Yitzhak Brender ,  Mark Shi Wang ,  Rex Runyon ,  Kai Cao

IPC: G01N21/88 ,  G01N21/95 ,  G01N29/24 ,  G01N21/956

CPC classification number: G01N29/2418 ,  G01N21/8806 ,  G01N21/9501 ,  G01N21/956 ,  G01N2291/2697

Abstract: A method of scanning a sample includes simultaneously forming a plurality of co-linear scans. Each scan is formed by a sweep of a spot by an acousto-optical device (AOD). The co-linear scans are separated by a predetermined spacing. A first plurality of swaths are formed by repeating the simultaneous forming of the plurality of co-linear scans in a direction perpendicular to the co-linear scans. The first plurality of swaths have an inter-swath spacing that is the same as the predetermined spacing. A second plurality of swaths can be formed adjacent to the first plurality of swaths. Forming the second plurality of swaths can be performed in an opposite direction to that of the first plurality of swaths or in a same direction. An inspection system can implement this method by including a diffractive optical element (DOE) path after a magnification changer.

Abstract translation: 扫描样本的方法同时形成多个共线扫描。 通过声光装置（AOD）的扫描形成每个扫描。 共线扫描以预定间隔分开。 通过在垂直于共线扫描的方向上重复同时形成多个共线扫描来形成第一多个条带。 第一多个条带具有与预定间隔相同的跨幅间距。 可以在第一多个条带附近形成第二多个条带。 形成第二多个条可以沿与第一多个条的方向相反的方向或在相同的方向上执行。 检查系统可以通过在放大倍率变换器之后包括衍射光学元件（DOE）路径来实现该方法。

公开(公告)号：US10060884B2

公开(公告)日：2018-08-28

申请号：US15184590

申请日：2016-06-16

Applicant: KLA-Tencor Corporation

Inventor： Jamie Sullivan ,  Wenjian Cai ,  Yevgeniy Churin ,  Ralph Johnson ,  Meier Yitzhak Brender ,  Mark Shi Wang ,  Rex Runyon ,  Kai Cao

IPC: G01N21/88 ,  G01N21/95 ,  G01N29/24 ,  G01N21/956

CPC classification number: G01N29/2418 ,  G01N21/8806 ,  G01N21/9501 ,  G01N21/956 ,  G01N2291/2697

Abstract: A method of scanning a sample includes simultaneously forming a plurality of co-linear scans. Each scan is formed by a sweep of a spot by an acousto-optical device (AOD). The co-linear scans are separated by a predetermined spacing. A first plurality of swaths are formed by repeating the simultaneous forming of the plurality of co-linear scans in a direction perpendicular to the co-linear scans. The first plurality of swaths have an inter-swath spacing that is the same as the predetermined spacing. The predetermined spacing can be a scan length or an integral number of scan lengths. A second plurality of swaths can be formed adjacent to the first plurality of swaths. Forming the second plurality of swaths can be performed in an opposite direction to that of the first plurality of swaths or in a same direction. An inspection system can implement this method by including a diffractive optical element (DOE) path after a magnification changer.

公开(公告)号：US09860466B2

公开(公告)日：2018-01-02

申请号：US15153543

申请日：2016-05-12

Applicant: KLA-Tencor Corporation

Inventor： Yung-Ho Alex Chuang ,  John Fielden ,  David L. Brown ,  Jingjing Zhang ,  Keith Lyon ,  Mark Shi Wang

IPC: G01N21/00 ,  H04N5/3722 ,  G01N21/956

CPC classification number: H04N5/3722 ,  G01N21/956 ,  G01N2201/12

Abstract: Pixel aperture size adjustment in a linear sensor is achieved by applying more negative control voltages to central regions of the pixel's resistive control gate, and applying more positive control voltages to the gate's end portions. These control voltages cause the resistive control gate to generate an electric field that drives photoelectrons generated in a selected portion of the pixel's light sensitive region into a charge accumulation region for subsequent measurement, and drives photoelectrons generated in other portions of the pixel's light sensitive region away from the charge accumulation region for subsequent discard or simultaneous readout. A system utilizes optics to direct light received at different angles or locations from a sample into corresponding different portions of each pixel's light sensitive region. Multiple aperture control electrodes are selectively actuated to collect/measure light received from either narrow or wide ranges of angles or locations, thereby enabling rapid image data adjustment.

公开(公告)号：US20160334342A1

公开(公告)日：2016-11-17

申请号：US15153543

申请日：2016-05-12

Applicant: KLA-Tencor Corporation

Inventor： Yung-Ho Alex Chuang ,  John Fielden ,  David L. Brown ,  Jingjing Zhang ,  Keith Lyon ,  Mark Shi Wang

IPC: G01N21/95

CPC classification number: H04N5/3722 ,  G01N21/956 ,  G01N2201/12

Abstract: Pixel aperture size adjustment in a linear sensor is achieved by applying more negative control voltages to central regions of the pixel's resistive control gate, and applying more positive control voltages to the gate's end portions. These control voltages cause the resistive control gate to generate an electric field that drives photoelectrons generated in a selected portion of the pixel's light sensitive region into a charge accumulation region for subsequent measurement, and drives photoelectrons generated in other portions of the pixel's light sensitive region away from the charge accumulation region for subsequent discard or simultaneous readout. A system utilizes optics to direct light received at different angles or locations from a sample into corresponding different portions of each pixel's light sensitive region. Multiple aperture control electrodes are selectively actuated to collect/measure light received from either narrow or wide ranges of angles or locations, thereby enabling rapid image data adjustment.

Abstract translation: 通过对像素的电阻控制栅极的中心区域施加更多的负的控制电压，并对栅极的端部施加更多的正的控制电压来实现线性传感器中的像素孔径尺寸调整。 这些控制电压使得电阻控制栅极产生将在像素的感光区域的选定部分中产生的光电子驱动到用于后续测量的电荷累积区域中的电场，并驱动在像素的光敏区域的其他部分中产生的光电子 从电荷累积区域进行随后的丢弃或同时读出。 系统利用光学器件将从不同角度或不同位置接收的光引导到每个像素的光敏区域的相应不同部分。 选择性地启动多个孔径控制电极以收集/测量从窄范围或宽范围的角度或位置接收的光，从而实现快速的图像数据调整。

公开(公告)号：US20180070040A1

公开(公告)日：2018-03-08

申请号：US15806913

申请日：2017-11-08

Applicant: KLA-Tencor Corporation

Inventor： Yung-Ho Alex Chuang ,  John Fielden ,  David L. Brown ,  Jingjing Zhang ,  Keith Lyon ,  Mark Shi Wang

IPC: H04N5/3722

CPC classification number: H04N5/3722 ,  G01N21/956 ,  G01N2201/12

Abstract: Pixel aperture size adjustment in a linear sensor is achieved by applying more negative control voltages to central regions of the pixel's resistive control gate, and applying more positive control voltages to the gate's end portions. These control voltages cause the resistive control gate to generate an electric field that drives photoelectrons generated in a selected portion of the pixel's light sensitive region into a charge accumulation region for subsequent measurement, and drives photoelectrons generated in other portions of the pixel's light sensitive region away from the charge accumulation region for subsequent discard or simultaneous readout. A system utilizes optics to direct light received at different angles or locations from a sample into corresponding different portions of each pixel's light sensitive region. Multiple aperture control electrodes are selectively actuated to collect/measure light received from either narrow or wide ranges of angles or locations, thereby enabling rapid image data adjustment.

公开(公告)号：US20160290971A1

公开(公告)日：2016-10-06

申请号：US15184590

申请日：2016-06-16

Applicant: KLA-Tencor Corporation

Inventor： Jamie Sullivan ,  Wenjian Cai ,  Yevgeniy Churin ,  Ralph Johnson ,  Meier Yitzhak Brender ,  Mark Shi Wang ,  Rex Runyon ,  Kai Cao

IPC: G01N29/24 ,  G01N21/95 ,  G01N21/956 ,  G01N21/88

CPC classification number: G01N29/2418 ,  G01N21/8806 ,  G01N21/9501 ,  G01N21/956 ,  G01N2291/2697

Abstract: A method of scanning a sample includes simultaneously forming a plurality of co-linear scans. Each scan is formed by a sweep of a spot by an acousto-optical device (AOD). The co-linear scans are separated by a predetermined spacing. A first plurality of swaths are formed by repeating the simultaneous forming of the plurality of co-linear scans in a direction perpendicular to the co-linear scans. The first plurality of swaths have an inter-swath spacing that is the same as the predetermined spacing. The predetermined spacing can be a scan length or an integral number of scan lengths. A second plurality of swaths can be formed adjacent to the first plurality of swaths. Forming the second plurality of swaths can be performed in an opposite direction to that of the first plurality of swaths or in a same direction. An inspection system can implement this method by including a diffractive optical element (DOE) path after a magnification changer.

Abstract translation: 扫描样本的方法同时形成多个共线扫描。 通过声光装置（AOD）的扫描形成每个扫描。 共线扫描以预定间隔分开。 通过在垂直于共线扫描的方向上重复同时形成多个共线扫描来形成第一多个条带。 第一多个条带具有与预定间隔相同的跨幅间距。 预定间隔可以是扫描长度或整数倍的扫描长度。 可以在第一多个条带附近形成第二多个条带。 形成第二多个条可以沿与第一多个条的方向相反的方向或在相同的方向上执行。 检查系统可以通过在放大倍率变换器之后包括衍射光学元件（DOE）路径来实现该方法。