公开(公告)号：US20190004298A1

公开(公告)日：2019-01-03

申请号：US15672797

申请日：2017-08-09

Applicant: KLA-Tencor Corporation

Inventor： Ichiro Honjo ,  Christopher Sears ,  Hedong Yang ,  Thanh Ha ,  Jianwei Wang ,  Huina Xu

IPC: G02B21/00 ,  H01J37/22 ,  H01J37/30 ,  G06N3/08

Abstract: Objective lens alignment of a scanning electron microscope review tool with fewer image acquisitions can be obtained using the disclosed techniques and systems. Two different X-Y voltage pairs for the scanning electron microscope can be determined based on images. A second image based on the first X-Y voltage pair can be used to determine a second X-Y voltage pair. The X-Y voltage pairs can be applied at the Q4 lens or other optical components of the scanning electron microscope.

公开(公告)号：US10790114B2

公开(公告)日：2020-09-29

申请号：US15672797

申请日：2017-08-09

Applicant: KLA-Tencor Corporation

Inventor： Ichiro Honjo ,  Christopher Sears ,  Hedong Yang ,  Thanh Ha ,  Jianwei Wang ,  Huina Xu

IPC: H01J37/28 ,  G02B21/00 ,  H01J37/22 ,  H01J37/30 ,  H01J37/10 ,  G06N3/08 ,  G06N3/04

Abstract: Objective lens alignment of a scanning electron microscope review tool with fewer image acquisitions can be obtained using the disclosed techniques and systems. Two different X-Y voltage pairs for the scanning electron microscope can be determined based on images. A second image based on the first X-Y voltage pair can be used to determine a second X-Y voltage pair. The X-Y voltage pairs can be applied at the Q4 lens or other optical components of the scanning electron microscope.