公开(公告)号：US09734994B2

公开(公告)日：2017-08-15

申请号：US14362491

申请日：2012-12-04

Applicant: KOREA INSTITUTE OF INDUSTRIAL TECHNOLOGY

Inventor： Seung-Yong Shin ,  Kyoung-Il Moon ,  Ju-Hyun Sun ,  Chang-Hun Lee

IPC: H01J37/32 ,  C22C16/00 ,  C23C14/34 ,  B22F3/12 ,  C22C30/02 ,  C22C1/00 ,  C22C45/00 ,  B22F9/08 ,  B22F9/10 ,  C22C1/04

CPC classification number: H01J37/3255 ,  B22F3/12 ,  B22F3/14 ,  B22F9/082 ,  B22F9/10 ,  B22F2999/00 ,  C22C1/002 ,  C22C1/0458 ,  C22C16/00 ,  C22C30/02 ,  C22C45/00 ,  C22C2200/02 ,  C22C2200/04 ,  C23C14/3414 ,  B22F2202/06

Abstract: Provided are a crystalline alloy having significantly better thermal stability than an amorphous alloy as well as glass-forming ability, and a method of manufacturing the crystalline alloy. The present invention also provides an alloy sputtering target that is manufactured by using the crystalline alloy, and a method of manufacturing the alloy target. According to an aspect of the present invention, provided is a crystalline alloy having glass-forming ability which is formed of three or more elements having glass-forming ability, wherein the average grain size of the alloy is in a range of 0.1 μm to 5 μm and the alloy includes 5 at % to 20 at % of aluminum (Al), 15 at % to 40 at % of any one or more selected from copper (Cu) and nickel (Ni), and the remainder being zirconium (Zr).

公开(公告)号：US20140346038A1

公开(公告)日：2014-11-27

申请号：US14362491

申请日：2012-12-04

Applicant: KOREA INSTITUTE OF INDUSTRIAL TECHNOLOGY

Inventor： Seung-Yong Shin ,  Kyoung-Il Moon ,  Ju-Hyun Sun ,  Chang-Hun Lee

IPC: H01J37/32 ,  C22C16/00 ,  C22C30/02 ,  B22F3/12

CPC classification number: H01J37/3255 ,  B22F3/12 ,  B22F3/14 ,  B22F9/082 ,  B22F9/10 ,  B22F2999/00 ,  C22C1/002 ,  C22C1/0458 ,  C22C16/00 ,  C22C30/02 ,  C22C45/00 ,  C22C2200/02 ,  C22C2200/04 ,  C23C14/3414 ,  B22F2202/06

Abstract: Provided are a crystalline alloy having significantly better thermal stability than an amorphous alloy as well as glass-forming ability, and a method of manufacturing the crystalline alloy. The present invention also provides an alloy sputtering target that is manufactured by using the crystalline alloy, and a method of manufacturing the alloy target. According to an aspect of the present invention, provided is a crystalline alloy having glass-forming ability which is formed of three or more elements having glass-forming ability, wherein the average grain size of the alloy is in a range of 0.1 μm to 5 μm and the alloy includes 5 at % to 20 at % of aluminum (Al), 15 at % to 40 at % of any one or more selected from copper (Cu) and nickel (Ni), and the remainder being zirconium (Zr).

Abstract translation: 提供一种具有比非晶态合金显着更好的热稳定性以及玻璃形成能力的结晶合金，以及制造该结晶合金的方法。 本发明还提供了通过使用该结晶合金制造的合金溅射靶，以及该合金靶的制造方法。 根据本发明的一个方面，提供一种具有玻璃形成能力的结晶合金，其由具有玻璃形成能力的三种或更多种元素形成，其中合金的平均晶粒尺寸在0.1μm至5的范围内 并且该合金包括铝（Al）的5原子％至20原子％，选自铜（Cu）和镍（Ni）中的任何一种或多种的15原子％至40原子％，其余为锆（Zr） 。