公开(公告)号：US20170234674A1

公开(公告)日：2017-08-17

申请号：US15518875

申请日：2015-10-05

Applicant: KOREA INSTITUTE OF INDUSTRIAL TECHNOLOGY

Inventor： Ho Jae LEE ,  Sang Seon LEE

IPC: G01B9/02 ,  G01N21/45 ,  G01B11/24 ,  G01B11/06

CPC classification number: G01B9/02044 ,  G01B11/06 ,  G01B11/0625 ,  G01B11/2441 ,  G01B11/30 ,  G01N21/45 ,  G01N21/8422 ,  G01N2201/068

Abstract: The present invention relates to a multi-function spectroscopic device which includes a first lens installed in an emission direction of parallel light emitted by a parallel light generation part and configured to focus the light in a center portion thereof with respect to a light axis of the parallel light, a second lens disposed to face the first lens and configured to convert light which moves through a first focus of the first lens and is diffused into parallel light, a reference mirror installed to face the second lens to reflect light which moves through the second lens, a beam splitter installed between the first lens and the second lens and disposed to reflect some of the light which moves through the first lens in a direction intersecting a light axis of the first lens and to transmit the remaining light toward the second lens, a third lens configured to focus light which moves through the beam splitter onto a measurement object, a fourth lens configured to focus light which is reflected by the measurement object and reversely moves through the third mirror and the beam splitter, a fifth lens configured to convert light which is diffused through a second focus of the fourth lens into parallel light, and a diffraction grating obliquely disposed with respect to a light axis of the fifth lens and configured to diffract parallel light which moves through the fifth lens and split the parallel light. Such a multi-function spectroscopic device provides an advantage in that a film thickness, a surface shape, and a refractive index can be measured by using a desired measurement method using an integrated optical system.