公开(公告)号：US20240361120A1

公开(公告)日：2024-10-31

申请号：US18687468

申请日：2022-07-04

申请人： HAMAMATSU PHOTONICS K.K.

发明人： Naoaki KATO ,  Yuu TAKIGUCHI ,  Hiroshi TANAKA

IPC分类号： G01B11/24 ,  G01B9/02002 ,  G01B11/30

CPC分类号： G01B11/2441 ,  G01B9/02002 ,  G01B11/30

摘要： An optical heterodyne interference measurement apparatus includes a beam generation unit, a beam splitter, a mirror, a first photodetector, a linear polarizer, a second photodetector, a linear polarizer, an AD conversion unit, and a computer. The beam generation unit generates and outputs a first light beam and a second light beam having polarizations orthogonal to each other. The first light beam and the second light beam have optical frequencies different from each other by a heterodyne frequency. The computer sets, when ωp is set to any peak frequency being temporally constant in a frequency spectrum of intensity noise included in the first light beam or the second light beam output from the beam generation unit, the heterodyne frequency ωh to a value of a rational multiple of the peak frequency ωp.

公开(公告)号：US12038271B2

公开(公告)日：2024-07-16

申请号：US17790962

申请日：2021-01-07

申请人： NOVA LTD

发明人： Eitan A. Rothstein ,  Yongha Kim ,  Ilya Rubinovich ,  Ariel Broitman ,  Olga Krasnykov ,  Barak Bringoltz

IPC分类号： G01B11/30 ,  G03F7/00

CPC分类号： G01B11/30 ,  G03F7/70625 ,  G01B2210/56

摘要： A system and methods for OCD metrology are provided including receiving training data for training an OCD machine learning (ML) model, including multiple pairs of corresponding sets of scatterometric data and reference parameters. For each of the pairs, one or more corresponding outlier metrics are by calculated and corresponding outlier thresholds are applied whether a given pair is an outlier pair. The OCD MIL model is then trained with the training data less the outlier pairs.

公开(公告)号：US20240230547A1

公开(公告)日：2024-07-11

申请号：US18572255

申请日：2021-06-21

申请人： Nissan Motor Co., Ltd.

发明人： Shota YAMAZAKI ,  Takahiro KAITO ,  Kentarou YUGE ,  Mori NAGAYAMA ,  Yoshitaka UEHARA

IPC分类号： G01N21/84 ,  G01B11/24 ,  G01B11/30 ,  G01N21/01 ,  G01N21/47

CPC分类号： G01N21/8422 ,  G01B11/24 ,  G01B11/30 ,  G01N2021/0125 ,  G01N21/4738 ,  G01N2021/8427

摘要： In a coating evaluation device and a coating evaluation method, information on a coating is acquired. The information on a coating includes shape information representing a curved shape of a coating surface and surface roughness information representing a surface roughness of the coating surface. An evaluation value that corresponds to a combination of the shape information and the surface roughness information is estimated by using an evaluation model that outputs a brilliance evaluation value pertaining to the coating surface in response to an input including the shape information and the surface roughness information.

公开(公告)号：US12008758B2

公开(公告)日：2024-06-11

申请号：US17952234

申请日：2022-09-24

申请人： PSIP LLC

发明人： Salmaan Hameed ,  Giau Nguyen

IPC分类号： G06T7/00 ,  A61B1/00 ,  G01B11/03 ,  G01B11/30 ,  G06F18/2413 ,  G06V10/44 ,  G06V10/50 ,  G06V10/764 ,  G06V10/82

CPC分类号： G06T7/0014 ,  A61B1/000094 ,  A61B1/000096 ,  A61B1/0014 ,  A61B1/00177 ,  A61B1/00181 ,  G01B11/03 ,  G01B11/30 ,  G06V10/454 ,  G06V10/50 ,  G06V10/764 ,  G06V10/82 ,  A61B1/00101 ,  G06F18/2414 ,  G06T2207/10068 ,  G06T2207/30032 ,  G06V2201/032 ,  G06V2201/034

摘要： Identifying polyps or lesions in a colon. In some variations, computer-implemented methods for polyp detection may be used in conjunction with an endoscope system to analyze the images captured by the endoscopic system, identify any polyps and/or lesions in a visual scene captured by the endoscopic system, and provide an indication to the practitioner that a polyp and/or lesion has been detected.

公开(公告)号：US12007225B2

公开(公告)日：2024-06-11

申请号：US17057966

申请日：2019-05-29

申请人： Metso Sweden AB

发明人： Andreas Hoffmann ,  Lars Furtenbach

IPC分类号： G01B11/30 ,  B02C17/18

CPC分类号： G01B11/30 ,  B02C17/1805 ,  B02C2210/02

摘要： The disclosure relates to a system for analyzing a wear surface in a material handling system. The system including a scanner and a processor configured to generate measurement data. The disclosure further comprises a corresponding method for utilizing the system for analyzing a wear surface.

公开(公告)号：US11982869B2

公开(公告)日：2024-05-14

申请号：US18149887

申请日：2023-01-04

申请人： LG INNOTEK CO., LTD.

发明人： Tae Jin Jung ,  Seung Taek Shin ,  Kap Jin Lee ,  Jin Suk Han ,  Sang Jun Min

IPC分类号： G02B7/105 ,  G01B11/30 ,  G02B7/00 ,  G02B7/02 ,  G02B7/09 ,  G02B13/00 ,  G02B26/08 ,  G02B27/64 ,  G03B3/10 ,  G03B13/36 ,  H02K1/17 ,  H04N23/50 ,  H04N23/57

CPC分类号： G02B7/105 ,  G01B11/30 ,  G02B7/00 ,  G02B7/02 ,  G02B7/09 ,  G02B13/001 ,  G02B26/085 ,  G02B27/646 ,  G03B3/10 ,  G03B13/36 ,  H02K1/17 ,  H04N23/50 ,  H04N23/57 ,  G03B2217/002

摘要： The present embodiment of the present invention relates to a lens driving device, comprising: a housing; a bobbin disposed in the housing; a first coil disposed on the bobbin; a magnet which is disposed on the housing and faces the first coil; a base disposed under the housing; a substrate which is disposed on an upper surface of the base and comprises a circuit member including a second coil facing the magnet; an upper elastic member disposed on an upper portion of the bobbin and coupled to the bobbin and the housing; a support member coupled to the upper elastic member; and a terminal member elastically connecting the support member with the substrate, wherein the terminal member comprises; a first connector coupled to the substrate; and a second connector coupled to the support member; and wherein the second connector is disposed at a position lower than the first connector.

公开(公告)号：US11913772B2

公开(公告)日：2024-02-27

申请号：US17696980

申请日：2022-03-17

申请人： Intel Corporation

发明人： Jianyong Mo ,  V Wade Singleton ,  Yiren Wu ,  Liang Zhang ,  David Wasinger

IPC分类号： G01B11/06 ,  G01B11/30

CPC分类号： G01B11/06 ,  G01B11/30

摘要： The present disclosure is directed to a metrology system having 3-dimensional sensors for thickness measurements of semiconductor elements, and methods for taking the thickness measurements. In an aspect, the 3-dimensional sensor may be a single or dual 3-dimensional profiler that may scan across the top and bottom surfaces of an element to obtain a thickness measurement. In another aspect, the method may be used to measure a gap between elements that have assembled together.

公开(公告)号：US20240053143A1

公开(公告)日：2024-02-15

申请号：US17887678

申请日：2022-08-15

申请人： Zygo Corporation

发明人： Peter J. de Groot

IPC分类号： G01B11/30

CPC分类号： G01B11/30

摘要： An interferometric optical system for measuring a test object, including: i) a reference object comprising a partially reflective reference surface; ii) a light source module configured to direct first and second input beams through the reference surface to the test object at an angle to one another; iii) a detector positioned to detect light reflected from the reference surface and one or more surfaces of the test object; and iv) an aperture positioned to selectively block light from reaching the detector, wherein the angle between the first and second input beams causes the aperture to block light from the first input beam reflected by the reference surface and pass light from second input beam reflected by the reference surface, wherein the two input beams have a mutual coherence length smaller than twice an optical distance between the reference surface and the test object.

公开(公告)号：US20240035811A1

公开(公告)日：2024-02-01

申请号：US18228010

申请日：2023-07-31

申请人： Carl Zeiss SMT GmbH

发明人： Stefan SCHULTE ,  Vladan BLAHNIK ,  Martin PESCHKA

IPC分类号： G01B11/24 ,  G01B11/30

CPC分类号： G01B11/2441 ,  G01B11/30

摘要： A measurement apparatus (1) for measuring a shape of a surface (2) of a test object (3), in particular an optical surface (2) by interferometry, has:



an illumination device (4) with an illumination source (5) for generating an illumination wave (6),
an interferometer device (7) with a splitting element (8) for splitting the illumination wave into a test wave (9) directed at the surface (2) and into a reference wave (10), and for combining the returning test wave (9), having interacted with the surface to be measured, with the reference wave (10),
a registration device (11) for registering and evaluating an interference pattern to determine a deviation of the measured surface shape from a target shape, and
a control device (12) configured to split the surface (2) to be measured into a plurality of individual areas (13) to be measured.

公开(公告)号：US11846501B2

公开(公告)日：2023-12-19

申请号：US17343013

申请日：2021-06-09

申请人： Henkel AG & Co, KGaA

发明人： Jens Roland Schoene

IPC分类号： G01B11/30 ,  B23P19/04 ,  G01J5/00 ,  G01J5/02

CPC分类号： G01B11/30 ,  B23P19/04 ,  G01J5/0003 ,  G01J5/0275 ,  G01J2005/0077

摘要： A method for detecting differences in surface properties of one or more components is provided wherein the infrared radiation emitted by the component at a specific temperature of the component is detected as irradiance on a selected receiver surface relative to the component. When detecting at different positions or on a plurality of components, the solid angle covered by the receiver surface and the distance from the component surface is almost unchanged and differences in the detected irradiance can then be equated with differences in the surface properties of the components. The invention further relates to use of such methods for monitoring and optionally adjusting the surface quality of a component, as well as to a device for adjusting the surface properties in the series production of components.