公开(公告)号：US08587180B2

公开(公告)日：2013-11-19

申请号：US12989614

申请日：2009-02-18

申请人： Katsuyuki Sugita ,  Nobukazu Ikeda ,  Kouji Nishino ,  Ryousuke Dohi ,  Kaoru Hirata ,  Takatoshi Nakatani

发明人： Katsuyuki Sugita ,  Nobukazu Ikeda ,  Kouji Nishino ,  Ryousuke Dohi ,  Kaoru Hirata ,  Takatoshi Nakatani

IPC分类号： H01L41/09

CPC分类号： G05D7/0635 ,  Y10T137/7762

摘要： A pressure control valve piezoelectric element driving circuit is provided for a pressure type flow rate control device provided with a flow rate self-diagnosis function for comparing initial pressure drop characteristics data measured and with pressure drop characteristics data in a flow rate diagnosis which are measured under conditions that are the same for both measurements to detect malfunction in flow rate control from a difference between both characteristics data, wherein a first discharge circuit slowly discharges a piezoelectric element driving voltage applied to the piezoelectric element according to a step-down command signal from a CPU, through a step-down command circuit to step down the voltage, and a second discharge circuit that rapidly discharges a piezoelectric element driving voltage applied to the piezoelectric element according to a high-speed step-down command signal from the CPU, through a high-speed step-down command circuit to step down the voltage.

摘要翻译： 为压力式流量控制装置设置压力式流量控制装置，该压力式流量控制装置具有用于比较测定的初始压降特性数据和流量诊断中的压降特性数据的流量自我诊断功能， 两个测量结果相同的条件是根据两个特性数据之间的差异来检测流量控制的故障，其中第一放电电路根据来自一个压电元件的降压命令信号缓慢放电施加到压电元件的压电元件驱动电压 CPU通过降压指令电路降低电压，以及第二放电电路，其根据来自CPU的高速降压命令信号快速放电施加到压电元件的压电元件的驱动电压，通过 高速降压指令电路降压。

公开(公告)号：US20110108138A1

公开(公告)日：2011-05-12

申请号：US12989614

申请日：2009-02-18

申请人： Katsuyuki Sugita ,  Nobukazu Ikeda ,  Kouji Nishino ,  Ryousuke Dohi ,  Kaoru Hirata ,  Takatoshi Nakatani

发明人： Katsuyuki Sugita ,  Nobukazu Ikeda ,  Kouji Nishino ,  Ryousuke Dohi ,  Kaoru Hirata ,  Takatoshi Nakatani

IPC分类号： F16K31/12

CPC分类号： G05D7/0635 ,  Y10T137/7762

摘要： A pressure control valve piezoelectric element driving circuit is provided for a pressure type flow rate control device provided with a flow rate self-diagnosis function for comparing initial pressure drop characteristics data measured and with pressure drop characteristics data in a flow rate diagnosis which are measured under conditions that are the same for both measurements to detect malfunction in flow rate control from a difference between both characteristics data, wherein a first discharge circuit slowly discharges a piezoelectric element driving voltage applied to the piezoelectric element according to a step-down command signal from a CPU, through a step-down command circuit to step down the voltage, and a second discharge circuit that rapidly discharges a piezoelectric element driving voltage applied to the piezoelectric element according to a high-speed step-down command signal from the CPU, through a high-speed step-down command circuit to step down the voltage.

摘要翻译： 为压力式流量控制装置设置压力式流量控制装置，该压力式流量控制装置具有用于比较测定的初始压降特性数据和流量诊断中的压降特性数据的流量自我诊断功能， 两个测量结果相同的条件是根据两个特性数据之间的差异来检测流量控制的故障，其中第一放电电路根据来自一个压电元件的降压命令信号缓慢放电施加到压电元件的压电元件驱动电压 CPU通过降压指令电路降低电压，以及第二放电电路，其根据来自CPU的高速降压命令信号快速放电施加到压电元件的压电元件的驱动电压，通过 高速降压指令电路降压。