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1.发明申请SURFACE INSPECTION APPARATUS, METHOD FOR INSPECTING SURFACE, EXPOSURE SYSTEM, AND METHOD FOR PRODUCING SEMICONDUCTOR DEVICE 有权表面检查装置，检查表面的方法，曝光系统和生产半导体器件的方法公开(公告)号：US20120164763A1
公开(公告)日：2012-06-28
申请号：US13325195
申请日：2011-12-14
IPC分类号： G01N21/956 , H01L21/66
CPC分类号： G01N21/9501 , G01N21/94 , G01N21/95607 , G01N2021/95615 , G02B26/0808 , G03F7/70341 , G03F7/70641 , G03F7/70783 , H01L22/12
摘要： A surface inspection apparatus includes: an irradiation unit; a detection unit configured to detect a first detection signal according to a first light beam and a second detection signal according to a second light beam; a providing unit which is configured to provide a first reference data and a second reference data; and a determination unit which is configured to determine a processing condition of the pattern in the substrate as an inspection object substrate, based on consistency between the first detection signal and the first reference data, and consistency between the second detection signal and the second reference data.
摘要翻译： 表面检查装置包括：照射单元; 检测单元，被配置为根据第二光束检测根据第一光束的第一检测信号和第二检测信号; 提供单元，被配置为提供第一参考数据和第二参考数据; 以及确定单元，其被配置为基于所述第一检测信号和所述第一参考数据之间的一致性以及所述第二检测信号和所述第二参考数据之间的一致性来确定所述基板中的图案的处理状况作为检查对象基板 。
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2.发明授权Surface inspection apparatus, method for inspecting surface, exposure system, and method for producing semiconductor device 有权表面检查装置，表面检查方法，曝光系统以及半导体装置的制造方法公开(公告)号：US09240356B2
公开(公告)日：2016-01-19
申请号：US13325195
申请日：2011-12-14
CPC分类号： G01N21/9501 , G01N21/94 , G01N21/95607 , G01N2021/95615 , G02B26/0808 , G03F7/70341 , G03F7/70641 , G03F7/70783 , H01L22/12
摘要： A surface inspection apparatus includes: an irradiation unit; a detection unit configured to detect a first detection signal according to a first light beam and a second detection signal according to a second light beam; a providing unit which is configured to provide a first reference data and a second reference data; and a determination unit which is configured to determine a processing condition of the pattern in the substrate as an inspection object substrate, based on consistency between the first detection signal and the first reference data, and consistency between the second detection signal and the second reference data.
摘要翻译： 表面检查装置包括：照射单元; 检测单元，被配置为根据第二光束检测根据第一光束的第一检测信号和第二检测信号; 提供单元，被配置为提供第一参考数据和第二参考数据; 以及确定单元，其被配置为基于所述第一检测信号和所述第一参考数据之间的一致性以及所述第二检测信号和所述第二参考数据之间的一致性来确定所述基板中的图案的处理状况作为检查对象基板 。
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公开(公告)号：US09196550B2
公开(公告)日：2015-11-24
申请号：US13325195
申请日：2011-12-14
摘要： A surface inspection apparatus includes: an irradiation unit; a detection unit configured to detect a first detection signal according to a first light beam and a second detection signal according to a second light beam; a providing unit which is configured to provide a first reference data and a second reference data; and a determination unit which is configured to determine a processing condition of the pattern in the substrate as an inspection object substrate, based on consistency between the first detection signal and the first reference data, and consistency between the second detection signal and the second reference data.
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公开(公告)号：US20140037894A1
公开(公告)日：2014-02-06
申请号：US14000969
申请日：2012-02-23
申请人： Hisato Higuchi , Shinsuke Takeda , Nagaharu Hara , Tetsuro Ise , Junko Watanabe , Aiichiro Tsukahara , Masayuki Yamashita , Fumihito Takeda
发明人： Hisato Higuchi , Shinsuke Takeda , Nagaharu Hara , Tetsuro Ise , Junko Watanabe , Aiichiro Tsukahara , Masayuki Yamashita , Fumihito Takeda
IPC分类号： C08J9/00
CPC分类号： C08J9/0085 , C08J9/0061 , C08J9/06 , C08J9/32 , C08J2203/22 , C08J2300/24 , C08J2361/10 , C08J2429/04 , Y10T428/24157
摘要： Provided is a composition for a lightweight heat-insulating material having high heat-insulating properties. The composition for a heat-insulating material contains a fibrous material, inorganic foamed particles, a thermosetting resin, and a foaming agent. Since the composition for a heat-insulating material contains the inorganic foamed particles and the foaming agent in addition to the fibrous material and the thermosetting resin, the weight can be reduced and the thermal conductivity can be lowered due to the inorganic foamed particles having low specific gravity. Further, the thermosetting resin is caused to foam by the foaming agent, and the weight can be reduced and the thermal conductivity can be lowered. A lightweight heat-insulating material having high-insulating properties can be obtained.
摘要翻译： 提供一种具有高绝热性的轻质隔热材料用组合物。 绝热材料的组合物含有纤维材料，无机发泡颗粒，热固性树脂和发泡剂。 由于绝热材料的组合物除了纤维材料和热固性树脂之外还含有无机发泡颗粒和发泡剂，所以可以减轻重量，并且由于具有低特异性的无机发泡颗粒导致的导热性降低 重力。 此外，通过发泡剂使热固性树脂发泡，并且可以减轻重量并降低导热性。 可以获得具有高绝缘性的轻质隔热材料。
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